GB1345204A - Interferometer systems for sensing the idsplacement of an object - Google Patents

Interferometer systems for sensing the idsplacement of an object

Info

Publication number
GB1345204A
GB1345204A GB2400371A GB2400371A GB1345204A GB 1345204 A GB1345204 A GB 1345204A GB 2400371 A GB2400371 A GB 2400371A GB 2400371 A GB2400371 A GB 2400371A GB 1345204 A GB1345204 A GB 1345204A
Authority
GB
United Kingdom
Prior art keywords
plate
degrees
produce
beams
interlaced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2400371A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of GB1345204A publication Critical patent/GB1345204A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
GB2400371A 1970-03-13 1971-04-19 Interferometer systems for sensing the idsplacement of an object Expired GB1345204A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7009098A FR2082403A5 (enrdf_load_stackoverflow) 1970-03-13 1970-03-13

Publications (1)

Publication Number Publication Date
GB1345204A true GB1345204A (en) 1974-01-30

Family

ID=9052235

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2400371A Expired GB1345204A (en) 1970-03-13 1971-04-19 Interferometer systems for sensing the idsplacement of an object

Country Status (3)

Country Link
DE (1) DE2111936C3 (enrdf_load_stackoverflow)
FR (1) FR2082403A5 (enrdf_load_stackoverflow)
GB (1) GB1345204A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4360271A (en) 1978-01-13 1982-11-23 National Research Development Corporation Interferometer systems
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2926738C2 (de) * 1979-07-03 1982-10-28 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur interferometrischen Oberflächenformanalyse
US4583855A (en) * 1984-02-17 1986-04-22 Lockheed Missiles & Space Company, Inc. Optical phase measuring apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1085350B (de) * 1957-07-02 1960-07-14 Leitz Ernst Gmbh Interferometer
NL6515207A (enrdf_load_stackoverflow) * 1965-11-24 1967-05-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4360271A (en) 1978-01-13 1982-11-23 National Research Development Corporation Interferometer systems
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers

Also Published As

Publication number Publication date
DE2111936C3 (de) 1981-04-23
FR2082403A5 (enrdf_load_stackoverflow) 1971-12-10
DE2111936A1 (de) 1971-09-23
DE2111936B2 (enrdf_load_stackoverflow) 1980-09-04

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee