GB1328713A - Corpuscular beam scanning microscopes - Google Patents

Corpuscular beam scanning microscopes

Info

Publication number
GB1328713A
GB1328713A GB3099871A GB3099871A GB1328713A GB 1328713 A GB1328713 A GB 1328713A GB 3099871 A GB3099871 A GB 3099871A GB 3099871 A GB3099871 A GB 3099871A GB 1328713 A GB1328713 A GB 1328713A
Authority
GB
United Kingdom
Prior art keywords
diaphragm
detector
scattered
zones
inner region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3099871A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften
Publication of GB1328713A publication Critical patent/GB1328713A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB3099871A 1970-08-31 1971-07-02 Corpuscular beam scanning microscopes Expired GB1328713A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702043749 DE2043749C3 (de) 1970-08-31 1970-08-31 Raster-Korpuskularstrahlmikroskop

Publications (1)

Publication Number Publication Date
GB1328713A true GB1328713A (en) 1973-08-30

Family

ID=5781510

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3099871A Expired GB1328713A (en) 1970-08-31 1971-07-02 Corpuscular beam scanning microscopes

Country Status (4)

Country Link
JP (1) JPS5435061B1 (enExample)
DE (1) DE2043749C3 (enExample)
GB (1) GB1328713A (enExample)
NL (1) NL7111783A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1197985A3 (en) * 2000-10-12 2006-07-26 Hitachi, Ltd. Scanning charged-particle microscope
JP2007207764A (ja) * 2007-02-26 2007-08-16 Hitachi Ltd 走査形荷電粒子顕微鏡
WO2008152464A3 (en) * 2007-06-11 2009-04-02 Consiglio Nazionale Ricerche Detection device for electron microscope
WO2013133739A1 (en) * 2012-03-06 2013-09-12 Vg Scienta Ab Analyser arrangement for particle spectrometer
EP2511938A4 (en) * 2009-12-07 2014-03-12 Hitachi High Tech Corp TRANSMISSION ELECTRONIC MICROSCOPE AND TEST SAMPLING METHOD

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009016861A1 (de) 2009-04-08 2010-10-21 Carl Zeiss Nts Gmbh Teilchenstrahlmikroskop
DE102012007868A1 (de) * 2012-04-19 2013-10-24 Carl Zeiss Microscopy Gmbh Transmissionselektronenmikroskopiesystem

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1197985A3 (en) * 2000-10-12 2006-07-26 Hitachi, Ltd. Scanning charged-particle microscope
JP2007207764A (ja) * 2007-02-26 2007-08-16 Hitachi Ltd 走査形荷電粒子顕微鏡
WO2008152464A3 (en) * 2007-06-11 2009-04-02 Consiglio Nazionale Ricerche Detection device for electron microscope
EP2511938A4 (en) * 2009-12-07 2014-03-12 Hitachi High Tech Corp TRANSMISSION ELECTRONIC MICROSCOPE AND TEST SAMPLING METHOD
WO2013133739A1 (en) * 2012-03-06 2013-09-12 Vg Scienta Ab Analyser arrangement for particle spectrometer
EP2851933A1 (en) 2012-03-06 2015-03-25 VG Scienta AB Analyser arrangement for particle spectrometer
US9437408B2 (en) 2012-03-06 2016-09-06 Scienta Omicron Ab Analyser arrangement for particle spectrometer
EP2851933B1 (en) * 2012-03-06 2016-10-19 Scienta Omicron AB Analyser arrangement for particle spectrometer
US9978579B2 (en) 2012-03-06 2018-05-22 Scienta Omicron Ab Analyser arrangement for particle spectrometer

Also Published As

Publication number Publication date
NL7111783A (enExample) 1972-03-02
JPS5435061B1 (enExample) 1979-10-31
DE2043749C3 (de) 1975-08-21
DE2043749B2 (de) 1975-01-09
DE2043749A1 (de) 1972-03-02

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee