GB1324792A - Microelectronic component manufacture - Google Patents

Microelectronic component manufacture

Info

Publication number
GB1324792A
GB1324792A GB4991770A GB4991770A GB1324792A GB 1324792 A GB1324792 A GB 1324792A GB 4991770 A GB4991770 A GB 4991770A GB 4991770 A GB4991770 A GB 4991770A GB 1324792 A GB1324792 A GB 1324792A
Authority
GB
United Kingdom
Prior art keywords
etch
photo
mask
microelectronic component
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4991770A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1324792A publication Critical patent/GB1324792A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/26—Processes using silver-salt-containing photosensitive materials or agents therefor
    • G03C5/40—Chemically transforming developed images
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/26—Processes using silver-salt-containing photosensitive materials or agents therefor
    • G03C5/40—Chemically transforming developed images
    • G03C5/48—Mordanting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
GB4991770A 1969-11-05 1970-10-21 Microelectronic component manufacture Expired GB1324792A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87417869A 1969-11-05 1969-11-05

Publications (1)

Publication Number Publication Date
GB1324792A true GB1324792A (en) 1973-07-25

Family

ID=25363161

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4991770A Expired GB1324792A (en) 1969-11-05 1970-10-21 Microelectronic component manufacture

Country Status (5)

Country Link
US (1) US3666648A (cg-RX-API-DMAC10.html)
JP (1) JPS5036765B1 (cg-RX-API-DMAC10.html)
DE (1) DE2054306A1 (cg-RX-API-DMAC10.html)
FR (1) FR2071742A5 (cg-RX-API-DMAC10.html)
GB (1) GB1324792A (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50156931A (cg-RX-API-DMAC10.html) * 1974-06-08 1975-12-18
JPS5155233A (en) * 1974-11-09 1976-05-14 Shaken Kk Karaamojikaado oyobi sonosakuseihoho
JPS5299170U (cg-RX-API-DMAC10.html) * 1976-01-21 1977-07-26
US5866303A (en) 1997-10-15 1999-02-02 Kabushiki Kaisha Toshiba Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device
US8809247B2 (en) * 2008-02-15 2014-08-19 Lion Corporation Cleaning composition and method for cleaning substrate for electronic device

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1632740A (en) * 1927-06-14 Indttstrie axtiengesellschaft
US1564753A (en) * 1925-12-08 John g
US1857089A (en) * 1932-05-03 Ing cobpobation
US1245152A (en) * 1916-09-15 1917-11-06 Abel Boularan Dit Deval Process for improving photographic negatives.
US1525766A (en) * 1922-07-12 1925-02-10 Eastman Kodak Co Color photography
US1962348A (en) * 1929-11-13 1934-06-12 Eastman Kodak Co Photographic reversal process
US1970869A (en) * 1931-01-17 1934-08-21 Agfa Ansco Corp Photographic reversal development
US2068879A (en) * 1933-09-09 1937-01-26 Cambridge Trust Company Photographic relief process
US2193023A (en) * 1938-04-06 1940-03-12 Eastman Kodak Co Photographic reversal process
US2500052A (en) * 1948-06-02 1950-03-07 Eastman Kodak Co Photographic reversal copying process
US2676101A (en) * 1950-12-21 1954-04-20 Rca Corp Method of reversal processing sound tracks
DE1071478B (cg-RX-API-DMAC10.html) * 1957-03-01
BE573379A (cg-RX-API-DMAC10.html) * 1957-11-29
US3268331A (en) * 1962-05-24 1966-08-23 Itek Corp Persistent internal polarization systems
US3244083A (en) * 1962-10-23 1966-04-05 Xerox Corp Xerographic device
US3271145A (en) * 1963-12-23 1966-09-06 Eastman Kodak Co Process for producing an electrostatic charge image
US3471387A (en) * 1965-08-02 1969-10-07 Carter S Ink Co Electrophoretic printing medium

Also Published As

Publication number Publication date
DE2054306A1 (de) 1971-05-13
US3666648A (en) 1972-05-30
FR2071742A5 (cg-RX-API-DMAC10.html) 1971-09-17
JPS5036765B1 (cg-RX-API-DMAC10.html) 1975-11-27

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee