GB1323658A - Vacuum coating apparatus - Google Patents

Vacuum coating apparatus

Info

Publication number
GB1323658A
GB1323658A GB1376672A GB1376672A GB1323658A GB 1323658 A GB1323658 A GB 1323658A GB 1376672 A GB1376672 A GB 1376672A GB 1376672 A GB1376672 A GB 1376672A GB 1323658 A GB1323658 A GB 1323658A
Authority
GB
United Kingdom
Prior art keywords
glass
coated
electron beam
coating apparatus
cathodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1376672A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1323658A publication Critical patent/GB1323658A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1323658 Coating by sputtering and evaporation LEYBOLD-HERAEUS-VERWALTUNG GmbH 23 March 1972 [8 April 1971] 13766/72 Heading C7F Metal e.g. Cr-Ni at 4 and Au at 5 is sputtered on to a substrate 6 of e.g. glass and the metal coatings are coated with e.g. glass from sources 9 evaporated by electron beam heaters 10. To prevent the cathodes 4, 5 from being coated with glass a roller blind 13 of e.g. glass fibre reinforced p.t.f.e. coated with Al or a Cr-Nisteel foil is pulled down over the cathodes before the electron beam evaporators are started up.
GB1376672A 1971-04-08 1972-03-23 Vacuum coating apparatus Expired GB1323658A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712117421 DE2117421A1 (en) 1971-04-08 1971-04-08 System for the deposition of thin multilayers in a vacuum

Publications (1)

Publication Number Publication Date
GB1323658A true GB1323658A (en) 1973-07-18

Family

ID=5804346

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1376672A Expired GB1323658A (en) 1971-04-08 1972-03-23 Vacuum coating apparatus

Country Status (4)

Country Link
BE (1) BE779528A (en)
DE (1) DE2117421A1 (en)
FR (1) FR2132642B1 (en)
GB (1) GB1323658A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4166018A (en) * 1974-01-31 1979-08-28 Airco, Inc. Sputtering process and apparatus

Also Published As

Publication number Publication date
FR2132642B1 (en) 1975-04-25
BE779528A (en) 1972-06-16
DE2117421A1 (en) 1972-10-12
FR2132642A1 (en) 1972-11-24

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees