GB1321425A - Methods of producing monocrystalline bodies of semiconductor material - Google Patents

Methods of producing monocrystalline bodies of semiconductor material

Info

Publication number
GB1321425A
GB1321425A GB3479070A GB3479070A GB1321425A GB 1321425 A GB1321425 A GB 1321425A GB 3479070 A GB3479070 A GB 3479070A GB 3479070 A GB3479070 A GB 3479070A GB 1321425 A GB1321425 A GB 1321425A
Authority
GB
United Kingdom
Prior art keywords
rod
coil
ring
zonemelting
encircling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3479070A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1321425A publication Critical patent/GB1321425A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Abstract

1321425 Zone melting PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 17 July 1970 [21 July 1969] 34790/70 Heading B1S A monocrystalline rod is made by zonemelting a rod of semi-conductor material combined at one end to a seed crystal. The zonemelting is effected by high-frequency induction heating and the diameter of the rod is controlled by a short-circuit ring associated with the coil. As shown, the desired rod is made in a hermetically closed tube 18, having a transparent wall, by being a seed crystal 12, in a holder 17 into contact with rod 11, heating the rod with a water-cooled coil 13 encircling 18, and controlling the diameter of the rod by a hollow conductive short-circuit water-cooled ring 14 also encircling 18. The control is effected by varying the distance d between the ring 14 and the coil 13, by displacing arm 23 vertically by a spindle 19, to vary the thickness of the molten zone.
GB3479070A 1969-07-21 1970-07-17 Methods of producing monocrystalline bodies of semiconductor material Expired GB1321425A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6924718A FR2053836A5 (en) 1969-07-21 1969-07-21

Publications (1)

Publication Number Publication Date
GB1321425A true GB1321425A (en) 1973-06-27

Family

ID=9037739

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3479070A Expired GB1321425A (en) 1969-07-21 1970-07-17 Methods of producing monocrystalline bodies of semiconductor material

Country Status (5)

Country Link
BE (1) BE753717A (en)
DE (1) DE2035314A1 (en)
FR (1) FR2053836A5 (en)
GB (1) GB1321425A (en)
NL (1) NL7010430A (en)

Also Published As

Publication number Publication date
DE2035314A1 (en) 1971-02-04
FR2053836A5 (en) 1971-04-16
BE753717A (en) 1971-01-20
NL7010430A (en) 1971-01-25

Similar Documents

Publication Publication Date Title
GB908951A (en) Production of semiconductors and the like
GB1430883A (en) Non-crucible zone melting of crystalline semiconductor rods
GB1022427A (en) An apparatus for zone-by-zone melting a rod of crystalline material
GB1321425A (en) Methods of producing monocrystalline bodies of semiconductor material
GB1216522A (en) Zone-by-zone melting a rod
GB1075706A (en) Production of dislocation-free single crystals of semiconductor material
GB954991A (en) Improvements in or relating to methods of and apparatus for zone-melting
US3935059A (en) Method of producing single crystals of semiconductor material by floating-zone melting
US3296036A (en) Apparatus and method of producing semiconductor rods by pulling the same from a melt
GB1284068A (en) Improvements in or relating to the drawing of crystalline bodies
GB1045664A (en) A process for melting a rod of polycrystalline material zone-by-zone
GB1095587A (en)
GB1375132A (en)
GB1081827A (en) Improvements in or relating to a floating zone process
GB1375133A (en)
GB1164940A (en) A Method of Melting a Rod of Crystalline Material Zone-by-Zone.
GB1083248A (en) Improvements in or relating to zone melting
GB1284008A (en) Improvements in or relating to the non-crucible zone melting of a crystalline rod
GB1279495A (en) Silicon monocrystal bars
GB1045526A (en) A method of zone-by-zone melting a rod of semiconductor material
GB915883A (en) A process for producing a monocrystalline rod of semi-conductor material
FR2146336A1 (en) Ceramic coated prodn - by advancing tube of material through a radiation heating zone
JPS5560092A (en) Production of single crystal
GB1439814A (en) Pulling glass rod from the surface of a melt
GB1398976A (en) Methods of forming evaporated layers

Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees