GB1307474A - Device for applying thin films to articles by sputtering - Google Patents
Device for applying thin films to articles by sputteringInfo
- Publication number
- GB1307474A GB1307474A GB1307474DA GB1307474A GB 1307474 A GB1307474 A GB 1307474A GB 1307474D A GB1307474D A GB 1307474DA GB 1307474 A GB1307474 A GB 1307474A
- Authority
- GB
- United Kingdom
- Prior art keywords
- sputtering
- articles
- thin films
- chamber
- sputtering apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1307474 Sputtering apparatus INSTITUT FIZIKI AN GRUZINSKOI SSR 16 Aug 1971 38314/71 Heading C7F A sputtering apparatus comprises an anode consisting of two tubes 8 and a coaxial cathode 10 which forms the vacuum chamber. A solenoid 12 provides a magnetic field the lines of force of which coincide with the axis of the anode. An article 6 passes first through a heater 2 and then gas discharge chamber 7, where it is cleaned. Argon is passed through the chamber. The cathode may be of parabolic section to concentrate sputtered particles at the gap between the anodes 8. Multilayer films may be formed in consecutive chambers.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3831471 | 1971-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1307474A true GB1307474A (en) | 1973-02-21 |
Family
ID=10402657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1307474D Expired GB1307474A (en) | 1971-08-16 | 1971-08-16 | Device for applying thin films to articles by sputtering |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1307474A (en) |
-
1971
- 1971-08-16 GB GB1307474D patent/GB1307474A/en not_active Expired
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |