GB1306378A - - Google Patents

Info

Publication number
GB1306378A
GB1306378A GB4455270A GB4455270A GB1306378A GB 1306378 A GB1306378 A GB 1306378A GB 4455270 A GB4455270 A GB 4455270A GB 4455270 A GB4455270 A GB 4455270A GB 1306378 A GB1306378 A GB 1306378A
Authority
GB
United Kingdom
Prior art keywords
diaphragm
contrast
beam components
sept
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4455270A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691948270 external-priority patent/DE1948270C/de
Application filed filed Critical
Publication of GB1306378A publication Critical patent/GB1306378A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB4455270A 1969-09-19 1970-09-18 Expired GB1306378A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691948270 DE1948270C (de) 1969-09-19 Raster Korpuskularstrahlmikroskop

Publications (1)

Publication Number Publication Date
GB1306378A true GB1306378A (enrdf_load_stackoverflow) 1973-02-07

Family

ID=5746361

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4455270A Expired GB1306378A (enrdf_load_stackoverflow) 1969-09-19 1970-09-18

Country Status (4)

Country Link
US (1) US3869611A (enrdf_load_stackoverflow)
JP (1) JPS4830182B1 (enrdf_load_stackoverflow)
GB (1) GB1306378A (enrdf_load_stackoverflow)
NL (1) NL7013772A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59758U (ja) * 1982-06-22 1984-01-06 岩崎工業株式会社 合成樹脂製密封容器
JP3942363B2 (ja) * 2001-02-09 2007-07-11 日本電子株式会社 透過電子顕微鏡の位相板用レンズシステム、および透過電子顕微鏡

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL142277B (nl) * 1964-06-11 1974-05-15 Philips Nv Elektronenmicroscoop.
DE1807277A1 (de) * 1968-06-28 1970-01-08 Siemens Ag Korpuskularstrahlgeraet zur Untersuchung eines Praeparates mit einer phasendrehenden Folie

Also Published As

Publication number Publication date
NL7013772A (enrdf_load_stackoverflow) 1971-03-23
US3869611A (en) 1975-03-04
DE1948270A1 (de) 1971-04-01
DE1948270B2 (de) 1972-07-27
JPS4830182B1 (enrdf_load_stackoverflow) 1973-09-18

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee