GB1306378A - - Google Patents

Info

Publication number
GB1306378A
GB1306378A GB4455270A GB4455270A GB1306378A GB 1306378 A GB1306378 A GB 1306378A GB 4455270 A GB4455270 A GB 4455270A GB 4455270 A GB4455270 A GB 4455270A GB 1306378 A GB1306378 A GB 1306378A
Authority
GB
United Kingdom
Prior art keywords
diaphragm
contrast
beam components
sept
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4455270A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691948270 external-priority patent/DE1948270C/en
Application filed filed Critical
Publication of GB1306378A publication Critical patent/GB1306378A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

1306378 Electron microscopes SIEMENS AG 18 Sept 1970 [19 Sept 1969] 44552/70 Heading H1D A scanning electron microscope is provided, between the scanning system and the object, with means for influencing individual beam components to improve the final image. In the example illustrated the means is a diaphragm 15 having annular zones which are alternately transmissive and opaque and which are so dimensioned that the transmitted beam components provide exclusively positive or exclusively negative contrast. As alternatives the means may comprise a phase-plate or a darkfield diaphragm. The diaphragm 15 should preferably be located at the point 14 where the beam axis 13 crosses the optical axis after successive opposite deflections by the deflection plates 5 and 6 and by an orthogonal deflection system (not shown); this point 14 lies in the entry diaphragm plane of the condenser lens 7. Beyond the object 8 there may be provided a contrast diaphragm 17, which stops out certain beam components and thereby improves the contrast, and a detector 9 located behind a detector entry diaphragm 10.
GB4455270A 1969-09-19 1970-09-18 Expired GB1306378A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691948270 DE1948270C (en) 1969-09-19 Scanning corpuscular beam microscope

Publications (1)

Publication Number Publication Date
GB1306378A true GB1306378A (en) 1973-02-07

Family

ID=5746361

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4455270A Expired GB1306378A (en) 1969-09-19 1970-09-18

Country Status (4)

Country Link
US (1) US3869611A (en)
JP (1) JPS4830182B1 (en)
GB (1) GB1306378A (en)
NL (1) NL7013772A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59758U (en) * 1982-06-22 1984-01-06 岩崎工業株式会社 Synthetic resin sealed container
JP3942363B2 (en) * 2001-02-09 2007-07-11 日本電子株式会社 Lens system for phase plate of transmission electron microscope and transmission electron microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL142277B (en) * 1964-06-11 1974-05-15 Philips Nv ELECTRON MICROSCOPE.
DE1807277A1 (en) * 1968-06-28 1970-01-08 Siemens Ag Corpuscular beam device for examining a preparation with a phase-rotating film

Also Published As

Publication number Publication date
US3869611A (en) 1975-03-04
NL7013772A (en) 1971-03-23
DE1948270B2 (en) 1972-07-27
DE1948270A1 (en) 1971-04-01
JPS4830182B1 (en) 1973-09-18

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee