JPS4830182B1 - - Google Patents

Info

Publication number
JPS4830182B1
JPS4830182B1 JP45081324A JP8132470A JPS4830182B1 JP S4830182 B1 JPS4830182 B1 JP S4830182B1 JP 45081324 A JP45081324 A JP 45081324A JP 8132470 A JP8132470 A JP 8132470A JP S4830182 B1 JPS4830182 B1 JP S4830182B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45081324A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691948270 external-priority patent/DE1948270C/en
Application filed filed Critical
Publication of JPS4830182B1 publication Critical patent/JPS4830182B1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/2614Holography or phase contrast, phase related imaging in general, e.g. phase plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Microscoopes, Condenser (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP45081324A 1969-09-19 1970-09-18 Pending JPS4830182B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691948270 DE1948270C (en) 1969-09-19 Scanning corpuscular beam microscope

Publications (1)

Publication Number Publication Date
JPS4830182B1 true JPS4830182B1 (en) 1973-09-18

Family

ID=5746361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45081324A Pending JPS4830182B1 (en) 1969-09-19 1970-09-18

Country Status (4)

Country Link
US (1) US3869611A (en)
JP (1) JPS4830182B1 (en)
GB (1) GB1306378A (en)
NL (1) NL7013772A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59758U (en) * 1982-06-22 1984-01-06 岩崎工業株式会社 Synthetic resin sealed container

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3942363B2 (en) * 2001-02-09 2007-07-11 日本電子株式会社 Lens system for phase plate of transmission electron microscope and transmission electron microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL142277B (en) * 1964-06-11 1974-05-15 Philips Nv ELECTRON MICROSCOPE.
DE1807277A1 (en) * 1968-06-28 1970-01-08 Siemens Ag Corpuscular beam device for examining a preparation with a phase-rotating film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59758U (en) * 1982-06-22 1984-01-06 岩崎工業株式会社 Synthetic resin sealed container

Also Published As

Publication number Publication date
DE1948270B2 (en) 1972-07-27
DE1948270A1 (en) 1971-04-01
NL7013772A (en) 1971-03-23
GB1306378A (en) 1973-02-07
US3869611A (en) 1975-03-04

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