GB1282322A - Continuous deposition system - Google Patents

Continuous deposition system

Info

Publication number
GB1282322A
GB1282322A GB37106/69A GB3710669A GB1282322A GB 1282322 A GB1282322 A GB 1282322A GB 37106/69 A GB37106/69 A GB 37106/69A GB 3710669 A GB3710669 A GB 3710669A GB 1282322 A GB1282322 A GB 1282322A
Authority
GB
United Kingdom
Prior art keywords
chamber
boats
slices
dopant
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB37106/69A
Other languages
English (en)
Inventor
Wilbur Arthur Porter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of GB1282322A publication Critical patent/GB1282322A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H10P95/00—

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
GB37106/69A 1968-08-29 1969-07-23 Continuous deposition system Expired GB1282322A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US75618668A 1968-08-29 1968-08-29

Publications (1)

Publication Number Publication Date
GB1282322A true GB1282322A (en) 1972-07-19

Family

ID=25042380

Family Applications (1)

Application Number Title Priority Date Filing Date
GB37106/69A Expired GB1282322A (en) 1968-08-29 1969-07-23 Continuous deposition system

Country Status (5)

Country Link
JP (1) JPS4822659B1 (enExample)
DE (1) DE1943029B2 (enExample)
FR (1) FR2022140A1 (enExample)
GB (1) GB1282322A (enExample)
NL (1) NL6913234A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1502754A (en) * 1975-12-22 1978-03-01 Siemens Ag Heat-treatment of semi-conductor wafers
US4479455A (en) * 1983-03-14 1984-10-30 Energy Conversion Devices, Inc. Process gas introduction and channeling system to produce a profiled semiconductor layer

Also Published As

Publication number Publication date
DE1943029B2 (de) 1972-01-13
DE1943029A1 (de) 1970-03-26
FR2022140A1 (enExample) 1970-07-31
JPS4822659B1 (enExample) 1973-07-07
NL6913234A (enExample) 1970-03-03

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees