JPS4822659B1 - - Google Patents

Info

Publication number
JPS4822659B1
JPS4822659B1 JP6766369A JP6766369A JPS4822659B1 JP S4822659 B1 JPS4822659 B1 JP S4822659B1 JP 6766369 A JP6766369 A JP 6766369A JP 6766369 A JP6766369 A JP 6766369A JP S4822659 B1 JPS4822659 B1 JP S4822659B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6766369A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4822659B1 publication Critical patent/JPS4822659B1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP6766369A 1968-08-29 1969-08-28 Pending JPS4822659B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US75618668A 1968-08-29 1968-08-29

Publications (1)

Publication Number Publication Date
JPS4822659B1 true JPS4822659B1 (ja) 1973-07-07

Family

ID=25042380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6766369A Pending JPS4822659B1 (ja) 1968-08-29 1969-08-28

Country Status (5)

Country Link
JP (1) JPS4822659B1 (ja)
DE (1) DE1943029B2 (ja)
FR (1) FR2022140A1 (ja)
GB (1) GB1282322A (ja)
NL (1) NL6913234A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426526Y2 (ja) * 1973-10-24 1979-09-01

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1502754A (en) * 1975-12-22 1978-03-01 Siemens Ag Heat-treatment of semi-conductor wafers
US4479455A (en) * 1983-03-14 1984-10-30 Energy Conversion Devices, Inc. Process gas introduction and channeling system to produce a profiled semiconductor layer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426526Y2 (ja) * 1973-10-24 1979-09-01

Also Published As

Publication number Publication date
DE1943029B2 (de) 1972-01-13
NL6913234A (ja) 1970-03-03
FR2022140A1 (ja) 1970-07-31
GB1282322A (en) 1972-07-19
DE1943029A1 (de) 1970-03-26

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