GB1263043A - Ion source generating an ion beam having a substantially uniform radial density - Google Patents

Ion source generating an ion beam having a substantially uniform radial density

Info

Publication number
GB1263043A
GB1263043A GB03554/70A GB1355470A GB1263043A GB 1263043 A GB1263043 A GB 1263043A GB 03554/70 A GB03554/70 A GB 03554/70A GB 1355470 A GB1355470 A GB 1355470A GB 1263043 A GB1263043 A GB 1263043A
Authority
GB
United Kingdom
Prior art keywords
electrode
anode
ion
uniform radial
source generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB03554/70A
Other languages
English (en)
Inventor
Lucien Bex
Jean Faure
Roger Vienet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1263043A publication Critical patent/GB1263043A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
    • H01J27/12—Duoplasmatrons ; Duopigatrons provided with an expansion cup

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
GB03554/70A 1969-04-04 1970-03-20 Ion source generating an ion beam having a substantially uniform radial density Expired GB1263043A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6910569A FR2061809A5 (enrdf_load_stackoverflow) 1969-04-04 1969-04-04

Publications (1)

Publication Number Publication Date
GB1263043A true GB1263043A (en) 1972-02-09

Family

ID=9031993

Family Applications (1)

Application Number Title Priority Date Filing Date
GB03554/70A Expired GB1263043A (en) 1969-04-04 1970-03-20 Ion source generating an ion beam having a substantially uniform radial density

Country Status (8)

Country Link
US (1) US3702416A (enrdf_load_stackoverflow)
BE (1) BE747725A (enrdf_load_stackoverflow)
CH (1) CH508979A (enrdf_load_stackoverflow)
DE (1) DE2016038B2 (enrdf_load_stackoverflow)
ES (1) ES378259A1 (enrdf_load_stackoverflow)
FR (1) FR2061809A5 (enrdf_load_stackoverflow)
GB (1) GB1263043A (enrdf_load_stackoverflow)
NL (1) NL7004792A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145120A1 (en) * 1983-08-15 1985-06-19 Applied Materials, Inc. Apparatus for ion implantation

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3845300A (en) * 1973-04-18 1974-10-29 Atomic Energy Commission Apparatus and method for magnetoplasmadynamic isotope separation
US3924134A (en) * 1974-11-29 1975-12-02 Ibm Double chamber ion source
DE2610165C2 (de) * 1976-03-11 1983-11-10 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Duoplasmatron-Ionenquelle zur Erzeugung mehrfach geladener Ionen
US4570106A (en) * 1982-02-18 1986-02-11 Elscint, Inc. Plasma electron source for cold-cathode discharge device or the like
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like
GB8607222D0 (en) * 1986-03-24 1986-04-30 Welding Inst Charged particle collection
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
US6250070B1 (en) * 2000-05-09 2001-06-26 Hughes Electronics Corporation Ion thruster with ion-extraction grids having compound contour shapes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285354A (enrdf_load_stackoverflow) * 1961-12-11
FR1366023A (fr) * 1963-05-02 1964-07-10 Csf Perfectionnements aux dispositifs de propulsion à faisceau ionique neutralisé
US3287598A (en) * 1964-01-02 1966-11-22 High Voltage Engineering Corp Ion source having an expansion cup for effecting beam divergence
US3238414A (en) * 1965-07-28 1966-03-01 George G Kelley High output duoplasmatron-type ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145120A1 (en) * 1983-08-15 1985-06-19 Applied Materials, Inc. Apparatus for ion implantation

Also Published As

Publication number Publication date
US3702416A (en) 1972-11-07
CH508979A (fr) 1971-06-15
ES378259A1 (es) 1973-03-16
DE2016038B2 (de) 1972-12-07
NL7004792A (enrdf_load_stackoverflow) 1970-10-06
DE2016038A1 (de) 1970-10-08
BE747725A (fr) 1970-08-31
FR2061809A5 (enrdf_load_stackoverflow) 1971-06-25

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