GB1263009A - A method for manufacturing a semiconductor device and such device prepared thereby - Google Patents
A method for manufacturing a semiconductor device and such device prepared therebyInfo
- Publication number
- GB1263009A GB1263009A GB05039/70A GB1503970A GB1263009A GB 1263009 A GB1263009 A GB 1263009A GB 05039/70 A GB05039/70 A GB 05039/70A GB 1503970 A GB1503970 A GB 1503970A GB 1263009 A GB1263009 A GB 1263009A
- Authority
- GB
- United Kingdom
- Prior art keywords
- region
- emitter
- base
- diffused
- base contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 4
- 238000005468 ion implantation Methods 0.000 abstract 4
- 229910004298 SiO 2 Inorganic materials 0.000 abstract 3
- 230000003190 augmentative effect Effects 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 230000002411 adverse Effects 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2450069 | 1969-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1263009A true GB1263009A (en) | 1972-02-09 |
Family
ID=12139891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB05039/70A Expired GB1263009A (en) | 1969-03-31 | 1970-03-31 | A method for manufacturing a semiconductor device and such device prepared thereby |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE2015333A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2059999B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1263009A (enrdf_load_stackoverflow) |
| NL (1) | NL7004507A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE759667A (fr) * | 1969-12-01 | 1971-06-01 | Philips Nv | Procede permettant la fabrication d'un dispositif semiconducteur, et dispositif semiconducteur obtenu par la mise en oeuvre de ce procede |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1514807B2 (de) * | 1964-04-15 | 1971-09-02 | Texas Instruments Inc., Dallas. Tex. (V.St.A.) | Verfahren zum herstellen einer planaren halbleiteranordnung |
| FR1487974A (fr) * | 1965-07-30 | 1967-07-07 | Philips Nv | Transistors |
| GB1228754A (enrdf_load_stackoverflow) * | 1967-05-26 | 1971-04-21 |
-
1970
- 1970-03-31 GB GB05039/70A patent/GB1263009A/en not_active Expired
- 1970-03-31 FR FR7011445A patent/FR2059999B1/fr not_active Expired
- 1970-03-31 NL NL7004507A patent/NL7004507A/xx unknown
- 1970-03-31 DE DE19702015333 patent/DE2015333A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2015333A1 (enrdf_load_stackoverflow) | 1970-10-08 |
| FR2059999B1 (enrdf_load_stackoverflow) | 1976-03-19 |
| NL7004507A (enrdf_load_stackoverflow) | 1970-10-02 |
| FR2059999A1 (enrdf_load_stackoverflow) | 1971-06-11 |
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