GB1228754A - - Google Patents
Info
- Publication number
- GB1228754A GB1228754A GB2476267A GB1228754DA GB1228754A GB 1228754 A GB1228754 A GB 1228754A GB 2476267 A GB2476267 A GB 2476267A GB 1228754D A GB1228754D A GB 1228754DA GB 1228754 A GB1228754 A GB 1228754A
- Authority
- GB
- United Kingdom
- Prior art keywords
- implantation
- ions
- mask
- region
- base region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002513 implantation Methods 0.000 abstract 6
- 150000002500 ions Chemical class 0.000 abstract 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 5
- 229910052782 aluminium Inorganic materials 0.000 abstract 5
- 239000004411 aluminium Substances 0.000 abstract 5
- -1 Boron ions Chemical class 0.000 abstract 4
- 238000005468 ion implantation Methods 0.000 abstract 4
- 229910052698 phosphorus Inorganic materials 0.000 abstract 4
- 239000011574 phosphorus Substances 0.000 abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 4
- 238000000137 annealing Methods 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 abstract 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 2
- 229910052796 boron Inorganic materials 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 230000000694 effects Effects 0.000 abstract 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000005465 channeling Effects 0.000 abstract 1
- 239000000356 contaminant Substances 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000010849 ion bombardment Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 abstract 1
- FAIAAWCVCHQXDN-UHFFFAOYSA-N phosphorus trichloride Chemical compound ClP(Cl)Cl FAIAAWCVCHQXDN-UHFFFAOYSA-N 0.000 abstract 1
- 239000005360 phosphosilicate glass Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D10/00—Bipolar junction transistors [BJT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/62—Capacitors having potential barriers
- H10D1/64—Variable-capacitance diodes, e.g. varactors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2476267 | 1967-05-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1228754A true GB1228754A (enrdf_load_stackoverflow) | 1971-04-21 |
Family
ID=10216859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2476267A Expired GB1228754A (enrdf_load_stackoverflow) | 1967-05-26 | 1967-05-26 |
Country Status (6)
Country | Link |
---|---|
CH (1) | CH474158A (enrdf_load_stackoverflow) |
DE (1) | DE1764372C3 (enrdf_load_stackoverflow) |
FR (1) | FR1573306A (enrdf_load_stackoverflow) |
GB (1) | GB1228754A (enrdf_load_stackoverflow) |
NL (1) | NL151558B (enrdf_load_stackoverflow) |
SE (1) | SE352196B (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7004507A (enrdf_load_stackoverflow) * | 1969-03-31 | 1970-10-02 | ||
GB1332932A (en) * | 1970-01-15 | 1973-10-10 | Mullard Ltd | Methods of manufacturing a semiconductor device |
FR2096876B1 (enrdf_load_stackoverflow) * | 1970-07-09 | 1973-08-10 | Thomson Csf | |
NL170348C (nl) * | 1970-07-10 | 1982-10-18 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een oppervlak van een halfgeleiderlichaam een tegen dotering en tegen thermische oxydatie maskerend masker wordt aangebracht, de door de vensters in het masker vrijgelaten delen van het oppervlak worden onderworpen aan een etsbehandeling voor het vormen van verdiepingen en het halfgeleiderlichaam met het masker wordt onderworpen aan een thermische oxydatiebehandeling voor het vormen van een oxydepatroon dat de verdiepingen althans ten dele opvult. |
GB1355806A (en) * | 1970-12-09 | 1974-06-05 | Mullard Ltd | Methods of manufacturing a semiconductor device |
-
1967
- 1967-05-26 GB GB2476267A patent/GB1228754A/en not_active Expired
-
1968
- 1968-05-22 SE SE06981/68A patent/SE352196B/xx unknown
- 1968-05-27 FR FR1573306D patent/FR1573306A/fr not_active Expired
- 1968-05-27 CH CH785568A patent/CH474158A/de not_active IP Right Cessation
- 1968-05-27 NL NL686807438A patent/NL151558B/xx not_active IP Right Cessation
- 1968-05-27 DE DE1764372A patent/DE1764372C3/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE1764372B2 (de) | 1974-06-12 |
CH474158A (de) | 1969-06-15 |
SE352196B (enrdf_load_stackoverflow) | 1972-12-18 |
FR1573306A (enrdf_load_stackoverflow) | 1969-07-04 |
DE1764372A1 (de) | 1972-04-20 |
NL6807438A (enrdf_load_stackoverflow) | 1968-11-27 |
NL151558B (nl) | 1976-11-15 |
DE1764372C3 (de) | 1975-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
732 | Registration of transactions, instruments or events in the register (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |