FR2059999A1 - - Google Patents

Info

Publication number
FR2059999A1
FR2059999A1 FR7011445A FR7011445A FR2059999A1 FR 2059999 A1 FR2059999 A1 FR 2059999A1 FR 7011445 A FR7011445 A FR 7011445A FR 7011445 A FR7011445 A FR 7011445A FR 2059999 A1 FR2059999 A1 FR 2059999A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7011445A
Other languages
French (fr)
Other versions
FR2059999B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Publication of FR2059999A1 publication Critical patent/FR2059999A1/fr
Application granted granted Critical
Publication of FR2059999B1 publication Critical patent/FR2059999B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Bipolar Transistors (AREA)
FR7011445A 1969-03-31 1970-03-31 Expired FR2059999B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2450069 1969-03-31

Publications (2)

Publication Number Publication Date
FR2059999A1 true FR2059999A1 (enrdf_load_stackoverflow) 1971-06-11
FR2059999B1 FR2059999B1 (enrdf_load_stackoverflow) 1976-03-19

Family

ID=12139891

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7011445A Expired FR2059999B1 (enrdf_load_stackoverflow) 1969-03-31 1970-03-31

Country Status (4)

Country Link
DE (1) DE2015333A1 (enrdf_load_stackoverflow)
FR (1) FR2059999B1 (enrdf_load_stackoverflow)
GB (1) GB1263009A (enrdf_load_stackoverflow)
NL (1) NL7004507A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE759667A (fr) * 1969-12-01 1971-06-01 Philips Nv Procede permettant la fabrication d'un dispositif semiconducteur, et dispositif semiconducteur obtenu par la mise en oeuvre de ce procede

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1487974A (fr) * 1965-07-30 1967-07-07 Philips Nv Transistors
GB1102164A (en) * 1964-04-15 1968-02-07 Texas Instruments Inc Selective impurity diffusion
NL6807438A (enrdf_load_stackoverflow) * 1967-05-26 1968-11-27

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1102164A (en) * 1964-04-15 1968-02-07 Texas Instruments Inc Selective impurity diffusion
FR1487974A (fr) * 1965-07-30 1967-07-07 Philips Nv Transistors
NL6807438A (enrdf_load_stackoverflow) * 1967-05-26 1968-11-27

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
(REVUE AMERICAINE "ELECTRONICS"VOLUME 40, 21 AOUT 1967 "GREAT BRITAIN-HIGH ON IONS" PAGE 190 *
(REVUE JAPONAISE"JOURNAL OF THE JAPAN SOCIE *
MICROWAVE TRANSISTOR MADE BY NEM TECHNIQUES"K.FUJINUMA ET AL,PAGES 71-77.) *
PROCEEDINGS OF THE LAST CONFERENCE ON SOLID STATE DEVICES TOKYO,26-27 SEPT 1969"SILICON *
REVUE JAPONAISE "JOURNAL OF THE JAPAN SOCIETY OF APPLIED PHYSICS" VOLUME 39, 1970 SUPPLEMENT "PROCEEDINGS OF THE 1ST CONFERENCE ON SOLID STATE DEVICES TOKYO, 26-27 SEPT 1969 "SILICON MICROWAVE TRANSISTOR MADE BY NEM TECHNIQUES" K.FUJINUMA ET AL, PAGES 71-77.) *
REVUE JAPONAISE"JOURNAL OF THE JAPAN SOCIETY OF APPLIED PHYSICS"VOLUME 39,1970 SUPPLEMENT" *
TY OF APPLIED PHYSICS"VOLUME 39,1970 SUPPLEMENT" PROCEEDINGS OF THE LST CONFERENCE ON SOLID STATE DEVICES TOKYO,26-27 SEPT 1969"SILICON MICROWAVE TRANSISTOR MADE BY NEM TECHNIQUES"K.FUJINUMA ET AL,PAGES 71-77.) *

Also Published As

Publication number Publication date
DE2015333A1 (enrdf_load_stackoverflow) 1970-10-08
FR2059999B1 (enrdf_load_stackoverflow) 1976-03-19
NL7004507A (enrdf_load_stackoverflow) 1970-10-02
GB1263009A (en) 1972-02-09

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Legal Events

Date Code Title Description
ST Notification of lapse