GB1228916A - - Google Patents

Info

Publication number
GB1228916A
GB1228916A GB1228916DA GB1228916A GB 1228916 A GB1228916 A GB 1228916A GB 1228916D A GB1228916D A GB 1228916DA GB 1228916 A GB1228916 A GB 1228916A
Authority
GB
United Kingdom
Prior art keywords
sputtering
silica
tantalum
plate
heading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1228916A publication Critical patent/GB1228916A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/482Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes for individual devices provided for in groups H10D8/00 - H10D48/00, e.g. for power transistors
    • H10W20/484Interconnections having extended contours, e.g. pads having mesh shape or interconnections comprising connected parallel stripes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/40Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
GB1228916D 1966-11-07 1968-05-09 Expired GB1228916A (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7288766 1966-11-07
NL6706641A NL6706641A (https=) 1966-11-07 1967-05-12

Publications (1)

Publication Number Publication Date
GB1228916A true GB1228916A (https=) 1971-04-21

Family

ID=26414019

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1228916D Expired GB1228916A (https=) 1966-11-07 1968-05-09

Country Status (8)

Country Link
US (1) US3562607A (https=)
AT (1) AT320736B (https=)
BE (1) BE715021A (https=)
CH (1) CH474157A (https=)
DE (1) DE1764237C3 (https=)
FR (1) FR1561857A (https=)
GB (1) GB1228916A (https=)
NL (2) NL6706641A (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1263381A (en) * 1968-05-17 1972-02-09 Texas Instruments Inc Metal contact and interconnection system for nonhermetic enclosed semiconductor devices
GB1245882A (en) * 1968-05-22 1971-09-08 Rca Corp Power transistor with high -resistivity connection
NL7002117A (https=) * 1970-02-14 1971-08-17
FR2121405A1 (en) * 1971-01-11 1972-08-25 Comp Generale Electricite Integrated circuit with resistor(s) - applied without attacking silicon substrate with resistor-trimming etchant
US3740621A (en) * 1971-08-30 1973-06-19 Rca Corp Transistor employing variable resistance ballasting means dependent on the magnitude of the emitter current
DE2251727A1 (de) * 1972-10-21 1974-04-25 Licentia Gmbh Halbleiteranordnung mit mindestens zwei zonen entgegengesetzten leitfaehigkeitstyps
SE444921B (sv) * 1982-06-01 1986-05-20 Asea Ab Vagnskorg for jernvegsfordon i lettmetall med fiberkompositband forenade med lettmetallprofiler
US5128271A (en) * 1989-01-18 1992-07-07 International Business Machines Corporation High performance vertical bipolar transistor structure via self-aligning processing techniques
EP0378794A1 (en) * 1989-01-18 1990-07-25 International Business Machines Corporation Vertical bipolar transistor structure and method of manufacturing

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3504239A (en) * 1964-01-31 1970-03-31 Rca Corp Transistor with distributed resistor between emitter lead and emitter region
ES313647A1 (es) * 1964-09-29 1965-07-16 Fairchild Camera Instr Co Perfeccionamientos en la construccion de transistores
GB1078790A (en) * 1964-11-20 1967-08-09 Nippon Electric Co A resistor element and a manufacturing method therefor
US3427511A (en) * 1965-03-17 1969-02-11 Rca Corp High frequency transistor structure with two-conductivity emitters

Also Published As

Publication number Publication date
AT320736B (de) 1975-02-25
NL6715032A (https=) 1968-05-08
US3562607A (en) 1971-02-09
NL6706641A (https=) 1968-11-13
DE1764237B2 (de) 1979-01-18
FR1561857A (https=) 1969-03-28
DE1764237A1 (de) 1971-07-01
CH474157A (de) 1969-06-15
BE715021A (https=) 1968-11-12
DE1764237C3 (de) 1979-09-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee