CA742649A - Silicon vapor deposition apparatus and process for making same - Google Patents

Silicon vapor deposition apparatus and process for making same

Info

Publication number
CA742649A
CA742649A CA742649A CA742649DA CA742649A CA 742649 A CA742649 A CA 742649A CA 742649 A CA742649 A CA 742649A CA 742649D A CA742649D A CA 742649DA CA 742649 A CA742649 A CA 742649A
Authority
CA
Canada
Prior art keywords
vapor deposition
deposition apparatus
making same
silicon vapor
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA742649A
Inventor
L. Bond Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Publication date
Application granted granted Critical
Publication of CA742649A publication Critical patent/CA742649A/en
Expired legal-status Critical Current

Links

CA742649A Silicon vapor deposition apparatus and process for making same Expired CA742649A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA742649T

Publications (1)

Publication Number Publication Date
CA742649A true CA742649A (en) 1966-09-13

Family

ID=36171828

Family Applications (1)

Application Number Title Priority Date Filing Date
CA742649A Expired CA742649A (en) Silicon vapor deposition apparatus and process for making same

Country Status (1)

Country Link
CA (1) CA742649A (en)

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