AU410560B2 - Method and apparatus for vapor deposition - Google Patents

Method and apparatus for vapor deposition

Info

Publication number
AU410560B2
AU410560B2 AU37620/68A AU3762068A AU410560B2 AU 410560 B2 AU410560 B2 AU 410560B2 AU 37620/68 A AU37620/68 A AU 37620/68A AU 3762068 A AU3762068 A AU 3762068A AU 410560 B2 AU410560 B2 AU 410560B2
Authority
AU
Australia
Prior art keywords
vapor deposition
deposition
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU37620/68A
Other versions
AU3762068A (en
Inventor
Hugh Roscoe Smith, Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Air Reduction Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Reduction Co Inc filed Critical Air Reduction Co Inc
Application granted granted Critical
Publication of AU3762068A publication Critical patent/AU3762068A/en
Publication of AU410560B2 publication Critical patent/AU410560B2/en
Expired legal-status Critical Current

Links

AU37620/68A 1967-05-10 1968-05-10 Method and apparatus for vapor deposition Expired AU410560B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
USUS637386 1967-05-10
USUS725264 1968-04-24

Publications (2)

Publication Number Publication Date
AU3762068A AU3762068A (en) 1969-11-13
AU410560B2 true AU410560B2 (en) 1969-11-13

Family

ID=

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