CA846710A - Method and apparatus for vapor deposition - Google Patents

Method and apparatus for vapor deposition

Info

Publication number
CA846710A
CA846710A CA846710A CA846710DA CA846710A CA 846710 A CA846710 A CA 846710A CA 846710 A CA846710 A CA 846710A CA 846710D A CA846710D A CA 846710DA CA 846710 A CA846710 A CA 846710A
Authority
CA
Canada
Prior art keywords
vapor deposition
deposition
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA846710A
Inventor
Hugh R. Smith, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Air Reduction Co Inc
Publication date
Application granted granted Critical
Publication of CA846710A publication Critical patent/CA846710A/en
Expired legal-status Critical Current

Links

CA846710A Method and apparatus for vapor deposition Expired CA846710A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA846710T

Publications (1)

Publication Number Publication Date
CA846710A true CA846710A (en) 1970-07-14

Family

ID=36330932

Family Applications (1)

Application Number Title Priority Date Filing Date
CA846710A Expired CA846710A (en) Method and apparatus for vapor deposition

Country Status (1)

Country Link
CA (1) CA846710A (en)

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