GB1207118A - An electric gun - Google Patents

An electric gun

Info

Publication number
GB1207118A
GB1207118A GB3141569A GB3141569A GB1207118A GB 1207118 A GB1207118 A GB 1207118A GB 3141569 A GB3141569 A GB 3141569A GB 3141569 A GB3141569 A GB 3141569A GB 1207118 A GB1207118 A GB 1207118A
Authority
GB
United Kingdom
Prior art keywords
electrodes
electrode
cathode
gun
electric gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3141569A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1207118A publication Critical patent/GB1207118A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,207,118. Electron guns. NIHON DENSHI K.K. 20 June, 1969 [12 July, 1968], No. 31415/69. Heading H1D. An electron gun includes a pointed thermionic cathode 1, control electrodes 2 and 3 having part-spherical surfaces concentric with the tip of the cathode, and an anode 4. Control electrode 2 is fed by pulse generator 6, while variable voltage source 9 connected to electrode 3 permits adjustment of the focussing of the beam by the lens formed by electrodes 2 and 3 together. The gun may include a third partspherical electrode disposed between electrodes 2 and 3.
GB3141569A 1968-07-12 1969-06-20 An electric gun Expired GB1207118A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4936868 1968-07-12

Publications (1)

Publication Number Publication Date
GB1207118A true GB1207118A (en) 1970-09-30

Family

ID=12829062

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3141569A Expired GB1207118A (en) 1968-07-12 1969-06-20 An electric gun

Country Status (3)

Country Link
DE (1) DE1933607A1 (en)
FR (1) FR2012817A1 (en)
GB (1) GB1207118A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539058B1 (en) * 1971-05-15 1978-04-03
GB2338589A (en) * 1998-06-18 1999-12-22 Advantest Corp An electron gun used in an electron beam exposure apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318861B1 (en) * 1970-04-01 1978-06-17
DE3036735A1 (en) * 1980-09-29 1982-05-19 Siemens AG, 1000 Berlin und 8000 München ELECTRODE FOR BEAM BLASTING IN AN ELECTRONIC RADIATOR GENERATION SYSTEM

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539058B1 (en) * 1971-05-15 1978-04-03
GB2338589A (en) * 1998-06-18 1999-12-22 Advantest Corp An electron gun used in an electron beam exposure apparatus
GB2338589B (en) * 1998-06-18 2001-02-21 Advantest Corp An electron gun for use in an electron beam exposure apparatus

Also Published As

Publication number Publication date
FR2012817A1 (en) 1970-03-27
DE1933607A1 (en) 1970-01-15

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees