GB1186625A - Improvements in and relating to Semiconductor Devices - Google Patents

Improvements in and relating to Semiconductor Devices

Info

Publication number
GB1186625A
GB1186625A GB43772/67A GB4377267A GB1186625A GB 1186625 A GB1186625 A GB 1186625A GB 43772/67 A GB43772/67 A GB 43772/67A GB 4377267 A GB4377267 A GB 4377267A GB 1186625 A GB1186625 A GB 1186625A
Authority
GB
United Kingdom
Prior art keywords
layer
oxide layer
openings
etched
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB43772/67A
Other languages
English (en)
Inventor
Boyd Gordon Watkins
Michael Joseph Selser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxar Space LLC
Original Assignee
Philco Ford Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philco Ford Corp filed Critical Philco Ford Corp
Publication of GB1186625A publication Critical patent/GB1186625A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/40—Resistors
    • H10D1/47—Resistors having no potential barriers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11C—FATTY ACIDS FROM FATS, OILS OR WAXES; CANDLES; FATS, OILS OR FATTY ACIDS BY CHEMICAL MODIFICATION OF FATS, OILS, OR FATTY ACIDS OBTAINED THEREFROM
    • C11C5/00—Candles
    • C11C5/002—Ingredients
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/62—Electrodes ohmically coupled to a semiconductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Drying Of Semiconductors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Thin Film Transistor (AREA)
  • Fats And Perfumes (AREA)
GB43772/67A 1966-09-26 1967-09-26 Improvements in and relating to Semiconductor Devices Expired GB1186625A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US58205366A 1966-09-26 1966-09-26
US59516366A 1966-11-17 1966-11-17

Publications (1)

Publication Number Publication Date
GB1186625A true GB1186625A (en) 1970-04-02

Family

ID=27078481

Family Applications (1)

Application Number Title Priority Date Filing Date
GB43772/67A Expired GB1186625A (en) 1966-09-26 1967-09-26 Improvements in and relating to Semiconductor Devices

Country Status (2)

Country Link
DE (3) DE1789194B1 (enExample)
GB (1) GB1186625A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2020531A1 (de) * 1970-04-27 1971-11-18 Siemens Ag Verfahren zur Herstellung eines Halbleiterbauelements
US4297721A (en) 1978-11-03 1981-10-27 Mostek Corporation Extremely low current load device for integrated circuit
EP0090520B1 (en) * 1982-03-26 1989-05-31 Kabushiki Kaisha Toshiba A method of manufacturing a semiconductor device for forming a deep field region in a semiconductor substrate
US5731240A (en) * 1991-07-24 1998-03-24 Canon Kabushiki Kaisha Manufacturing method for semiconductor depositing device
WO2009030336A1 (de) * 2007-08-31 2009-03-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Schaltungsanordnung und ein verfahren zum verkapseln derselben

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4982257A (enExample) * 1972-12-12 1974-08-08

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3189973A (en) * 1961-11-27 1965-06-22 Bell Telephone Labor Inc Method of fabricating a semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2020531A1 (de) * 1970-04-27 1971-11-18 Siemens Ag Verfahren zur Herstellung eines Halbleiterbauelements
US4297721A (en) 1978-11-03 1981-10-27 Mostek Corporation Extremely low current load device for integrated circuit
EP0090520B1 (en) * 1982-03-26 1989-05-31 Kabushiki Kaisha Toshiba A method of manufacturing a semiconductor device for forming a deep field region in a semiconductor substrate
US5731240A (en) * 1991-07-24 1998-03-24 Canon Kabushiki Kaisha Manufacturing method for semiconductor depositing device
WO2009030336A1 (de) * 2007-08-31 2009-03-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Schaltungsanordnung und ein verfahren zum verkapseln derselben

Also Published As

Publication number Publication date
DE1789194B1 (de) 1980-04-10
DE1589852A1 (de) 1970-08-06
DE158928C (enExample)
DE1589852B2 (de) 1979-08-02

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLE Entries relating assignments, transmissions, licences in the register of patents
429A Application made for amendment of specification (sect. 29/1949)
429H Application (made) for amendment of specification now open to opposition (sect. 29/1949)
429D Case decided by the comptroller ** specification amended (sect. 29/1949)
SPA Amended specification published
PE20 Patent expired after termination of 20 years