GB1179805A - Improvements in and relating to the zone-melting of rod-shaped materials in vacuo by electron bombardment - Google Patents

Improvements in and relating to the zone-melting of rod-shaped materials in vacuo by electron bombardment

Info

Publication number
GB1179805A
GB1179805A GB3577368A GB3577368A GB1179805A GB 1179805 A GB1179805 A GB 1179805A GB 3577368 A GB3577368 A GB 3577368A GB 3577368 A GB3577368 A GB 3577368A GB 1179805 A GB1179805 A GB 1179805A
Authority
GB
United Kingdom
Prior art keywords
rod
zone
melting
electron
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3577368A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB1179805A publication Critical patent/GB1179805A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/22—Heating of the molten zone by irradiation or electric discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

1,179,805. Zone-melting. BALZERS PATENT-UND BETEILIGUNGS A.G. 26 July, 1968 [14 Aug., 1967], No. 35773/68. Heading B1S. In the zone-melting of a rod in a vacuum using an electron beam as heating means, the beam is deflected by means of a guiding magnetic field parallel to the rod so that the electrons encircle the rod and impinge it all round the molten zone. As shown, an electron beam 4 passes through a magnetic focusing lens 5, a deflector device 10, and a diaphragm 12, and then passes between cooled and screened electromagnets 8, thereby being deflected into a path around the rod. The strength of the field may decrease inwardly. The rod may be rotated during the treatment. The radius of curvature of the electron path may be varied by varying (a) the strength of the guiding magnetic field, (b) the electron accelerating voltage, (c) the exciter current of the electromagnetic focusing lens, or (d) the direction of entry of the electron beam into the guiding magnetic field by means of the deflector device 10. A further deflector device at right angles to device 10 may vary the width and/or temperature of the molten zone.
GB3577368A 1967-08-14 1968-07-26 Improvements in and relating to the zone-melting of rod-shaped materials in vacuo by electron bombardment Expired GB1179805A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1153767A CH458566A (en) 1967-08-14 1967-08-14 Method and device for zone melting in a vacuum with electron beam bombardment

Publications (1)

Publication Number Publication Date
GB1179805A true GB1179805A (en) 1970-02-04

Family

ID=4374471

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3577368A Expired GB1179805A (en) 1967-08-14 1968-07-26 Improvements in and relating to the zone-melting of rod-shaped materials in vacuo by electron bombardment

Country Status (5)

Country Link
CH (1) CH458566A (en)
DE (1) DE1769751C3 (en)
FR (1) FR1576943A (en)
GB (1) GB1179805A (en)
NL (1) NL140750B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2137524A (en) * 1983-04-08 1984-10-10 Hitachi Ltd A process for fabricating a semiconductor material and an apparatus therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2137524A (en) * 1983-04-08 1984-10-10 Hitachi Ltd A process for fabricating a semiconductor material and an apparatus therefor

Also Published As

Publication number Publication date
DE1769751C3 (en) 1974-03-28
CH458566A (en) 1968-06-30
NL140750B (en) 1974-01-15
NL6712840A (en) 1969-02-18
DE1769751A1 (en) 1971-09-16
FR1576943A (en) 1969-08-01
DE1769751B2 (en) 1973-08-23

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