FR1576943A - - Google Patents

Info

Publication number
FR1576943A
FR1576943A FR1576943DA FR1576943A FR 1576943 A FR1576943 A FR 1576943A FR 1576943D A FR1576943D A FR 1576943DA FR 1576943 A FR1576943 A FR 1576943A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1576943A publication Critical patent/FR1576943A/fr
Expired legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16Heating of the molten zone
    • C30B13/22Heating of the molten zone by irradiation or electric discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Manufacture And Refinement Of Metals (AREA)
FR1576943D 1967-08-14 1968-08-13 Expired FR1576943A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1153767A CH458566A (de) 1967-08-14 1967-08-14 Verfahren und Vorrichtung zum Zonenschmelzen im Vakuum mit Elektronenstrahlbeschuss

Publications (1)

Publication Number Publication Date
FR1576943A true FR1576943A (fr) 1969-08-01

Family

ID=4374471

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1576943D Expired FR1576943A (fr) 1967-08-14 1968-08-13

Country Status (5)

Country Link
CH (1) CH458566A (fr)
DE (1) DE1769751C3 (fr)
FR (1) FR1576943A (fr)
GB (1) GB1179805A (fr)
NL (1) NL140750B (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190300A (ja) * 1983-04-08 1984-10-29 Hitachi Ltd 半導体製造方法および装置

Also Published As

Publication number Publication date
DE1769751C3 (de) 1974-03-28
CH458566A (de) 1968-06-30
NL140750B (nl) 1974-01-15
NL6712840A (fr) 1969-02-18
DE1769751A1 (de) 1971-09-16
DE1769751B2 (de) 1973-08-23
GB1179805A (en) 1970-02-04

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Legal Events

Date Code Title Description
ST Notification of lapse