CH458566A - Method and device for zone melting in a vacuum with electron beam bombardment - Google Patents

Method and device for zone melting in a vacuum with electron beam bombardment

Info

Publication number
CH458566A
CH458566A CH1153767A CH1153767A CH458566A CH 458566 A CH458566 A CH 458566A CH 1153767 A CH1153767 A CH 1153767A CH 1153767 A CH1153767 A CH 1153767A CH 458566 A CH458566 A CH 458566A
Authority
CH
Switzerland
Prior art keywords
vacuum
electron beam
zone melting
beam bombardment
bombardment
Prior art date
Application number
CH1153767A
Other languages
German (de)
Inventor
Lienhard Dr Wegmann
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH1153767A priority Critical patent/CH458566A/en
Priority to NL6712840A priority patent/NL140750B/en
Publication of CH458566A publication Critical patent/CH458566A/en
Priority to DE19681769751 priority patent/DE1769751C3/en
Priority to GB3577368A priority patent/GB1179805A/en
Priority to FR1576943D priority patent/FR1576943A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/22—Heating of the molten zone by irradiation or electric discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Manufacture And Refinement Of Metals (AREA)
CH1153767A 1967-08-14 1967-08-14 Method and device for zone melting in a vacuum with electron beam bombardment CH458566A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH1153767A CH458566A (en) 1967-08-14 1967-08-14 Method and device for zone melting in a vacuum with electron beam bombardment
NL6712840A NL140750B (en) 1967-08-14 1967-09-20 METHOD AND DEVICE FOR THE VACUUM ZONE MELTING OF ROD-SHAPED MATERIAL.
DE19681769751 DE1769751C3 (en) 1967-08-14 1968-07-08 Process for crucible-free zone melting of a rod held at its ends in a vacuum and device for carrying out the process
GB3577368A GB1179805A (en) 1967-08-14 1968-07-26 Improvements in and relating to the zone-melting of rod-shaped materials in vacuo by electron bombardment
FR1576943D FR1576943A (en) 1967-08-14 1968-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1153767A CH458566A (en) 1967-08-14 1967-08-14 Method and device for zone melting in a vacuum with electron beam bombardment

Publications (1)

Publication Number Publication Date
CH458566A true CH458566A (en) 1968-06-30

Family

ID=4374471

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1153767A CH458566A (en) 1967-08-14 1967-08-14 Method and device for zone melting in a vacuum with electron beam bombardment

Country Status (5)

Country Link
CH (1) CH458566A (en)
DE (1) DE1769751C3 (en)
FR (1) FR1576943A (en)
GB (1) GB1179805A (en)
NL (1) NL140750B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190300A (en) * 1983-04-08 1984-10-29 Hitachi Ltd Method and apparatus for production of semiconductor

Also Published As

Publication number Publication date
DE1769751A1 (en) 1971-09-16
FR1576943A (en) 1969-08-01
DE1769751B2 (en) 1973-08-23
NL140750B (en) 1974-01-15
NL6712840A (en) 1969-02-18
DE1769751C3 (en) 1974-03-28
GB1179805A (en) 1970-02-04

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