DD64635A1 - Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams - Google Patents
Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beamsInfo
- Publication number
- DD64635A1 DD64635A1 DD12749467A DD12749467A DD64635A1 DD 64635 A1 DD64635 A1 DD 64635A1 DD 12749467 A DD12749467 A DD 12749467A DD 12749467 A DD12749467 A DD 12749467A DD 64635 A1 DD64635 A1 DD 64635A1
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- long
- vapor deposition
- electron beams
- large surfaces
- sublimable material
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD12749467A DD64635A1 (en) | 1967-10-02 | 1967-10-02 | Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD12749467A DD64635A1 (en) | 1967-10-02 | 1967-10-02 | Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams |
Publications (1)
Publication Number | Publication Date |
---|---|
DD64635A1 true DD64635A1 (en) | 1968-11-05 |
Family
ID=41720521
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD12749467A DD64635A1 (en) | 1967-10-02 | 1967-10-02 | Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams |
Country Status (1)
Country | Link |
---|---|
DD (1) | DD64635A1 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4444538A1 (en) * | 1994-12-14 | 1996-06-20 | Ardenne Anlagentech Gmbh | Electron beam evapn. appts. esp. for wide strip coating |
DE102007008674B4 (en) * | 2006-02-20 | 2010-03-25 | Von Ardenne Anlagentechnik Gmbh | Method and device for long-term stable coating of flat substrates |
DE102009005513A1 (en) | 2009-01-20 | 2010-07-22 | Von Ardenne Anlagentechnik Gmbh | Method for long-term stable coating of substrate, comprises moving the substrate through a coating chamber and then coating in which evaporation materials arranged in a crucible are evaporated by electron beam |
DE102009057486A1 (en) * | 2009-12-10 | 2011-06-16 | Ferrotec Gmbh | Electron beam deflection device, magnetic deflection unit for such a deflection device and device for vapor deposition of a planar substrate with such a deflection device |
DE102018100601B3 (en) | 2018-01-12 | 2019-02-21 | VON ARDENNE Asset GmbH & Co. KG | Method, processor, storage medium and control device |
DE102018100623A1 (en) * | 2018-01-12 | 2019-07-18 | VON ARDENNE Asset GmbH & Co. KG | Method, control device and electron beam gun |
-
1967
- 1967-10-02 DD DD12749467A patent/DD64635A1/en unknown
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4444538A1 (en) * | 1994-12-14 | 1996-06-20 | Ardenne Anlagentech Gmbh | Electron beam evapn. appts. esp. for wide strip coating |
DE4444538C2 (en) * | 1994-12-14 | 2001-02-01 | Ardenne Anlagentech Gmbh | Device for long-term stable evaporation of elements and compounds for the reactive deposition on moving substrates, preferably wide belts |
DE102007008674B4 (en) * | 2006-02-20 | 2010-03-25 | Von Ardenne Anlagentechnik Gmbh | Method and device for long-term stable coating of flat substrates |
DE102009005513A1 (en) | 2009-01-20 | 2010-07-22 | Von Ardenne Anlagentechnik Gmbh | Method for long-term stable coating of substrate, comprises moving the substrate through a coating chamber and then coating in which evaporation materials arranged in a crucible are evaporated by electron beam |
DE102009057486A1 (en) * | 2009-12-10 | 2011-06-16 | Ferrotec Gmbh | Electron beam deflection device, magnetic deflection unit for such a deflection device and device for vapor deposition of a planar substrate with such a deflection device |
DE102018100601B3 (en) | 2018-01-12 | 2019-02-21 | VON ARDENNE Asset GmbH & Co. KG | Method, processor, storage medium and control device |
DE102018100623A1 (en) * | 2018-01-12 | 2019-07-18 | VON ARDENNE Asset GmbH & Co. KG | Method, control device and electron beam gun |
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