GB1171007A - Improvements in or relating to Corpuscular Beam Apparatus. - Google Patents

Improvements in or relating to Corpuscular Beam Apparatus.

Info

Publication number
GB1171007A
GB1171007A GB26737/67A GB2673767A GB1171007A GB 1171007 A GB1171007 A GB 1171007A GB 26737/67 A GB26737/67 A GB 26737/67A GB 2673767 A GB2673767 A GB 2673767A GB 1171007 A GB1171007 A GB 1171007A
Authority
GB
United Kingdom
Prior art keywords
deflection
stage
coils
arrangement
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB26737/67A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1171007A publication Critical patent/GB1171007A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
GB26737/67A 1966-06-10 1967-06-09 Improvements in or relating to Corpuscular Beam Apparatus. Expired GB1171007A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19661299088 DE1299088C2 (de) 1966-06-10 1966-06-10 Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop
DES0104241 1966-06-10

Publications (1)

Publication Number Publication Date
GB1171007A true GB1171007A (en) 1969-11-19

Family

ID=25751670

Family Applications (1)

Application Number Title Priority Date Filing Date
GB26737/67A Expired GB1171007A (en) 1966-06-10 1967-06-09 Improvements in or relating to Corpuscular Beam Apparatus.

Country Status (4)

Country Link
US (1) US3644733A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE1299088C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1171007A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL149324B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4090077A (en) * 1969-03-05 1978-05-16 Siemens Aktiengesellschaft Particle beam device with a deflection system and a stigmator
JPS4922351B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1969-12-25 1974-06-07
NL7012671A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1970-08-27 1972-02-29
US3857034A (en) * 1970-08-31 1974-12-24 Max Planck Gesellschaft Scanning charged beam particle beam microscope
USRE29500E (en) * 1970-08-31 1977-12-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Scanning charged beam particle beam microscope
US3801784A (en) * 1972-04-14 1974-04-02 Research Corp Scanning electron microscope operating in area scan and angle scan modes
US3932749A (en) * 1974-03-22 1976-01-13 Varian Associates Electron gun
US4095104A (en) * 1975-09-01 1978-06-13 U.S. Philips Corporation Electron microscope
US4795912A (en) * 1987-02-17 1989-01-03 Trw Inc. Method and apparatus for correcting chromatic aberration in charged particle beams

Also Published As

Publication number Publication date
US3644733A (en) 1972-02-22
NL149324B (nl) 1976-04-15
DE1299088C2 (de) 1974-10-17
NL6703637A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1967-12-11
DE1299088B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-10-17

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