DE1299088C2 - Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop - Google Patents

Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop

Info

Publication number
DE1299088C2
DE1299088C2 DE19661299088 DE1299088A DE1299088C2 DE 1299088 C2 DE1299088 C2 DE 1299088C2 DE 19661299088 DE19661299088 DE 19661299088 DE 1299088 A DE1299088 A DE 1299088A DE 1299088 C2 DE1299088 C2 DE 1299088C2
Authority
DE
Germany
Prior art keywords
deflection
coils
main
angle
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19661299088
Other languages
German (de)
English (en)
Other versions
DE1299088B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Dr. Otto; Krahl Dipl.-Phys. Dieter; 1000 Berlin Wolff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19661299088 priority Critical patent/DE1299088C2/de
Priority to NL676703637A priority patent/NL149324B/xx
Priority to US644650A priority patent/US3644733A/en
Priority to GB26737/67A priority patent/GB1171007A/en
Application granted granted Critical
Publication of DE1299088C2 publication Critical patent/DE1299088C2/de
Publication of DE1299088B publication Critical patent/DE1299088B/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
DE19661299088 1966-06-10 1966-06-10 Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop Expired DE1299088C2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19661299088 DE1299088C2 (de) 1966-06-10 1966-06-10 Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop
NL676703637A NL149324B (nl) 1966-06-10 1967-03-08 Afbuigsysteem voor de deeltjesbundel in een met een deeltjesbundel werkend toestel.
US644650A US3644733A (en) 1966-06-10 1967-06-08 Electron microscope deflection system for directing the beam at a predetermined angle and direction at the object
GB26737/67A GB1171007A (en) 1966-06-10 1967-06-09 Improvements in or relating to Corpuscular Beam Apparatus.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19661299088 DE1299088C2 (de) 1966-06-10 1966-06-10 Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop
DES0104241 1966-06-10

Publications (2)

Publication Number Publication Date
DE1299088C2 true DE1299088C2 (de) 1974-10-17
DE1299088B DE1299088B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-10-17

Family

ID=25751670

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19661299088 Expired DE1299088C2 (de) 1966-06-10 1966-06-10 Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop

Country Status (4)

Country Link
US (1) US3644733A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE1299088C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1171007A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL149324B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4090077A (en) * 1969-03-05 1978-05-16 Siemens Aktiengesellschaft Particle beam device with a deflection system and a stigmator
JPS4922351B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1969-12-25 1974-06-07
NL7012671A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1970-08-27 1972-02-29
US3857034A (en) * 1970-08-31 1974-12-24 Max Planck Gesellschaft Scanning charged beam particle beam microscope
USRE29500E (en) * 1970-08-31 1977-12-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Scanning charged beam particle beam microscope
US3801784A (en) * 1972-04-14 1974-04-02 Research Corp Scanning electron microscope operating in area scan and angle scan modes
US3932749A (en) * 1974-03-22 1976-01-13 Varian Associates Electron gun
US4095104A (en) * 1975-09-01 1978-06-13 U.S. Philips Corporation Electron microscope
US4795912A (en) * 1987-02-17 1989-01-03 Trw Inc. Method and apparatus for correcting chromatic aberration in charged particle beams

Also Published As

Publication number Publication date
US3644733A (en) 1972-02-22
GB1171007A (en) 1969-11-19
NL149324B (nl) 1976-04-15
NL6703637A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1967-12-11
DE1299088B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-10-17

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Legal Events

Date Code Title Description
EF Willingness to grant licences
EHJ Ceased/non-payment of the annual fee