GB1164268A - Improvements in or relating to Electron Beam Apparatus. - Google Patents
Improvements in or relating to Electron Beam Apparatus.Info
- Publication number
- GB1164268A GB1164268A GB5579766A GB5579766A GB1164268A GB 1164268 A GB1164268 A GB 1164268A GB 5579766 A GB5579766 A GB 5579766A GB 5579766 A GB5579766 A GB 5579766A GB 1164268 A GB1164268 A GB 1164268A
- Authority
- GB
- United Kingdom
- Prior art keywords
- apertures
- chambers
- electron beam
- gun
- beam apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/301—Arrangements enabling beams to pass between regions of different pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Manufacturing Of Steel Electrode Plates (AREA)
Abstract
1,164,268. Electron beam apparatus. AIR REDUCTION CO. Inc. 13 Dec., 1966, No. 55797/66. Heading H1D. Electron beam apparatus for treating material 24 comprises an air-tight enclosure 10 divided into chambers 12, 14 and 16 by barriers 18 and 20 with apertures 26 and 28 of the same size and shape as emitting surface 22 (preferably a Pierce type gun with a directly or indirectly heated cathode, Fig. 2 (not shown). A uniform magnetic field provided by ironcored coils 42, 46 or Helmholtz coils (60), (62) and (64) (Fig. 3, not shown) for instance, cause electrons from surface 22 to follow a helical path to the aperture 26 and between apertures 26 and 28, the distances between the apertures and the emitting surface being equal to an integral number of revolutions of the helical path. The apertures are preferably rectangular to promote molecular rather than viscous flow between the pressure graded chambers. The pressure difference on the opposite sides of each barrier may be in the ratio of between 10: 1 to 100: 1. The gun chamber may be evacuated to 0À6 or higher than 0À1 Á Hg. the transition chamber to 17 Á Hg. and the treating chamber to 100 Á Hg. Polepieces 38, 40 and 44 may be a ferromagnetic such as steel, or the barriers (18a) and (20a) (Fig. 3, not shown) may be of watercooled copper. To minimize contamination of chambers 12 and 14, target 24 may not be in alignment with the apertures, a transverse magnetic field effecting curvature of the electron beam after aperture 28. More than one gun 22 may be included with associated apertures and only two or more than three chambers may be provided. Reference is made to melting, annealing, cleaning and vapour-plating.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5579766A GB1164268A (en) | 1966-12-13 | 1966-12-13 | Improvements in or relating to Electron Beam Apparatus. |
BE692026D BE692026A (en) | 1966-12-13 | 1966-12-30 | |
DE19671615448 DE1615448B1 (en) | 1966-12-13 | 1967-01-02 | Device for processing materials by means of an electron beam |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5579766A GB1164268A (en) | 1966-12-13 | 1966-12-13 | Improvements in or relating to Electron Beam Apparatus. |
BE692026 | 1966-12-30 | ||
DET0023914 | 1967-01-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1164268A true GB1164268A (en) | 1969-09-17 |
Family
ID=27159206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5579766A Expired GB1164268A (en) | 1966-12-13 | 1966-12-13 | Improvements in or relating to Electron Beam Apparatus. |
Country Status (3)
Country | Link |
---|---|
BE (1) | BE692026A (en) |
DE (1) | DE1615448B1 (en) |
GB (1) | GB1164268A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2170490A (en) * | 1985-01-16 | 1986-08-06 | Leybold Heraeus Gmbh & Co Kg | Method and apparatus for cleaning sulphur- and nitrogen-containing flue gases |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE764927C (en) * | 1939-02-22 | 1951-08-06 | Bosch Gmbh Robert | Process for evaporation in a vacuum |
US3005859A (en) * | 1958-04-24 | 1961-10-24 | Nat Res Corp | Production of metals |
NL279385A (en) * | 1961-06-09 | |||
DE1140299B (en) * | 1961-07-20 | 1962-11-29 | Borsig Ag | Process for the continuous welding of pipes or similar hollow bodies made of strips |
-
1966
- 1966-12-13 GB GB5579766A patent/GB1164268A/en not_active Expired
- 1966-12-30 BE BE692026D patent/BE692026A/xx unknown
-
1967
- 1967-01-02 DE DE19671615448 patent/DE1615448B1/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2170490A (en) * | 1985-01-16 | 1986-08-06 | Leybold Heraeus Gmbh & Co Kg | Method and apparatus for cleaning sulphur- and nitrogen-containing flue gases |
Also Published As
Publication number | Publication date |
---|---|
BE692026A (en) | 1967-05-29 |
DE1615448B1 (en) | 1970-12-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB1430180A (en) | Method and apparatus for depositing film on a substrate and products produced thereby | |
KR920000912B1 (en) | Magnetron cathode for sputtering ferromagnetic targets | |
GB1123563A (en) | Improvements in or relating to sputtering apparatus | |
GB1464039A (en) | Electron bearm gun system | |
GB1196787A (en) | Electron Beam Apparatus. | |
US2797360A (en) | Travelling wave amplifiers | |
GB1154237A (en) | Electron Beam Vapourisation Furnace | |
US2887583A (en) | Electron accelerator for irradiation | |
GB726823A (en) | Improvements in or relating to magnetic circuits for travelling wave apparatus | |
GB1164268A (en) | Improvements in or relating to Electron Beam Apparatus. | |
GB1141594A (en) | Improved high vacuum electron beam apparatus and method of operating same | |
ES318075A1 (en) | An electronic ray convergence apparatus. (Machine-translation by Google Translate, not legally binding) | |
GB764337A (en) | Improvements relating to the treatment of materials by electronic bombardment | |
US2842710A (en) | Device and cathode-ray tubes for stabilising high voltages | |
US3299308A (en) | Electron beam traverse of narrow aperture in barrier separating regions of differentpressure | |
US3516037A (en) | Nondispersive magnetic deflection method | |
US3475315A (en) | Cathodic sputtering apparatus wherein the sputtering plasma is generated by a plurality of electrically isolated circuits | |
GB978839A (en) | Improvements in linear accelerators | |
GB1298940A (en) | Improvements in or relating to ion sources | |
US3857035A (en) | Infrared vidicon with off-axis electron gun | |
GB1231955A (en) | ||
GB1179805A (en) | Improvements in and relating to the zone-melting of rod-shaped materials in vacuo by electron bombardment | |
US3533031A (en) | Blue beam correcting devices for color television receiving tubes | |
GB1153773A (en) | Apparatus for Producing Phosphor Screens in Color Television Tubes | |
US3593058A (en) | Crossed-field electron injector for an electron accelerator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |