GB1143325A - Improvements in and relating to apparatus for raising and lowering an article - Google Patents

Improvements in and relating to apparatus for raising and lowering an article

Info

Publication number
GB1143325A
GB1143325A GB23287/67A GB2328767A GB1143325A GB 1143325 A GB1143325 A GB 1143325A GB 23287/67 A GB23287/67 A GB 23287/67A GB 2328767 A GB2328767 A GB 2328767A GB 1143325 A GB1143325 A GB 1143325A
Authority
GB
United Kingdom
Prior art keywords
crucible
tank
shaft
pulling
raising
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB23287/67A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1143325A publication Critical patent/GB1143325A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7287—Liquid level responsive or maintaining systems
    • Y10T137/7339—By weight of accumulated fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

1,143,325. Crystal - pulling. INTERNATIONAL BUSINESS MACHINES CORP. 19 May, 1967 [1 July, 1966], No. 23287/67. Heading B1S. In the pulling of a silicon crystal 20 from a melt 10 in a crucible 12 heated by a resistance coil 14, the height of the solid/liquid interface with respect to the resistance heater is maintained constant as pulling proceeds by raising crucible 12 by means of a buoyancy device comprising a float 32 connected to crucible 12 by a shaft 16. Float 32 floats in a liquid 34 in a tank 36 and is also supported by a flat coil constant force springs 40. Tank 36 is surrounded by a cooling water jacket 60. Crucible 12, shaft 16 and the buoyancy device are rotated by means 50. The upper limit of travel of shaft 16 is sensed by a device 65. The cross-sectional area of tank 36 may be varied by the addition or removal of rods 70.
GB23287/67A 1966-07-01 1967-05-19 Improvements in and relating to apparatus for raising and lowering an article Expired GB1143325A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US56221466A 1966-07-01 1966-07-01

Publications (1)

Publication Number Publication Date
GB1143325A true GB1143325A (en) 1969-02-19

Family

ID=24245296

Family Applications (1)

Application Number Title Priority Date Filing Date
GB23287/67A Expired GB1143325A (en) 1966-07-01 1967-05-19 Improvements in and relating to apparatus for raising and lowering an article

Country Status (4)

Country Link
US (1) US3493348A (en)
DE (1) DE1619774A1 (en)
FR (1) FR1526560A (en)
GB (1) GB1143325A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA971085A (en) * 1971-02-25 1975-07-15 Yasuo Tamate Apparatus for pulling up semiconductor crystals
FR2235458B1 (en) * 1973-06-28 1977-05-13 Labo Electronique Physique
US7959732B1 (en) * 2005-06-17 2011-06-14 Saint-Gobain Ceramics & Plastics, Inc. Apparatus and method for monitoring and controlling crystal growth

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR906152A (en) * 1942-12-29 1945-12-26 Grinten Chem L V D Liquid supply device
US2728123A (en) * 1953-01-22 1955-12-27 Abigail Jordan Apparatus for feeding raw molten iron at a constant rate
US2944875A (en) * 1953-07-13 1960-07-12 Raytheon Co Crystal-growing apparatus and methods
US2872299A (en) * 1954-11-30 1959-02-03 Rca Corp Preparation of reactive materials in a molten non-reactive lined crucible
US2979386A (en) * 1956-08-02 1961-04-11 Shockley William Crystal growing apparatus
US2934409A (en) * 1957-10-04 1960-04-26 Melvin L Biehl Chemical dispenser for swimming pools
DE1080071B (en) * 1959-02-03 1960-04-21 Paul Lucas Dipl Chem Device for pulling single crystals from a melt
NL238924A (en) * 1959-05-05
US2976129A (en) * 1959-05-28 1961-03-21 Edward G Buehler Chlorinators for swimming pools
US3246504A (en) * 1962-03-19 1966-04-19 Albert H Halff Direct determination of density of solids
US3340016A (en) * 1963-09-26 1967-09-05 Consortium Elektrochem Ind Producing and regulating translatory movement in the manufacture of semiconductor bodies
US3268297A (en) * 1963-10-10 1966-08-23 Albrecht G Fischer Crystal pulling apparatus
US3359077A (en) * 1964-05-25 1967-12-19 Globe Union Inc Method of growing a crystal

Also Published As

Publication number Publication date
FR1526560A (en) 1968-05-24
US3493348A (en) 1970-02-03
DE1619774A1 (en) 1971-06-16

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