GB1132536A - Nonthermionic electron gun assembly - Google Patents

Nonthermionic electron gun assembly

Info

Publication number
GB1132536A
GB1132536A GB12282/66A GB1228266A GB1132536A GB 1132536 A GB1132536 A GB 1132536A GB 12282/66 A GB12282/66 A GB 12282/66A GB 1228266 A GB1228266 A GB 1228266A GB 1132536 A GB1132536 A GB 1132536A
Authority
GB
United Kingdom
Prior art keywords
cathode
aperture
electrode
potential
auxiliary electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB12282/66A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB1132536A publication Critical patent/GB1132536A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB12282/66A 1965-05-28 1966-03-21 Nonthermionic electron gun assembly Expired GB1132536A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US459650A US3414702A (en) 1965-05-28 1965-05-28 Nonthermionic electron beam apparatus

Publications (1)

Publication Number Publication Date
GB1132536A true GB1132536A (en) 1968-11-06

Family

ID=23825643

Family Applications (1)

Application Number Title Priority Date Filing Date
GB12282/66A Expired GB1132536A (en) 1965-05-28 1966-03-21 Nonthermionic electron gun assembly

Country Status (3)

Country Link
US (1) US3414702A (de)
DE (1) DE1539998A1 (de)
GB (1) GB1132536A (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1275261A (en) * 1968-06-04 1972-05-24 Atomic Energy Authority Uk Improvements in or relating to non thermionic cathode slow discharge devices
GB1287262A (en) * 1968-09-05 1972-08-31 Atomic Energy Authority Uk Improvements in or relating to non-thermionic glow discharge devices
US4129772A (en) * 1976-10-12 1978-12-12 Wisconsin Alumni Research Foundation Electrode structures for high energy high temperature plasmas
US4084076A (en) * 1977-05-10 1978-04-11 Evgeny Ivanovich Istomin Electron beam welding gun
US4492843A (en) * 1982-09-01 1985-01-08 Westinghouse Electric Corp. Apparatus and method for laser machining in a non-reactive environment
US4633129A (en) * 1985-04-30 1986-12-30 International Business Machines Corporation Hollow cathode
FR2639756B1 (fr) * 1988-11-30 1994-05-13 Centre Nal Recherc Scientifique Source de vapeurs et d'ions
US5190703A (en) * 1990-12-24 1993-03-02 Himont, Incorporated Plasma reactor chamber
US5079482A (en) * 1991-02-25 1992-01-07 Villecco Roger A Directed electric discharge generator
DE9113374U1 (de) * 1991-10-28 1991-12-19 Vtd-Vakuumtechnik Dresden Gmbh, O-8017 Dresden, De
US7675046B2 (en) * 2006-09-27 2010-03-09 Varian Semiconductor Equipment Associates, Inc Terminal structure of an ion implanter

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH349247A (de) * 1956-07-14 1960-10-15 Berghaus Elektrophysik Anst Verfahren und Einrichtung zur Durchführung von Glimmentladungsprozessen
US3312858A (en) * 1961-08-31 1967-04-04 Heraeus Gmbh W C Deflecting system for charge carrier beams
US3262013A (en) * 1962-02-02 1966-07-19 Martin Marietta Corp Perforated hollow cathode discharge device
US3308325A (en) * 1962-09-08 1967-03-07 Bendix Balzers Vacuum Inc Electron beam tube with ion shield
US3210518A (en) * 1962-12-21 1965-10-05 Alloyd Electronics Corp Hollow cathode device
US3218431A (en) * 1962-12-27 1965-11-16 Gen Electric Self-focusing electron beam apparatus
US3223885A (en) * 1963-04-29 1965-12-14 Gen Electric Stabilization circuit for electron beam apparatus
US3243570A (en) * 1963-04-30 1966-03-29 Gen Electric Automatic gas pressure control for electron beam apparatus
US3320475A (en) * 1963-04-30 1967-05-16 Gen Electric Nonthermionic hollow cathode electron beam apparatus
US3327090A (en) * 1964-05-11 1967-06-20 Air Reduction Dichromatic electron beam device

Also Published As

Publication number Publication date
DE1539998A1 (de) 1970-01-22
US3414702A (en) 1968-12-03

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