GB1172159A - Improvements in Low Voltage Electron Beam Apparatus - Google Patents

Improvements in Low Voltage Electron Beam Apparatus

Info

Publication number
GB1172159A
GB1172159A GB03849/67A GB1384967A GB1172159A GB 1172159 A GB1172159 A GB 1172159A GB 03849/67 A GB03849/67 A GB 03849/67A GB 1384967 A GB1384967 A GB 1384967A GB 1172159 A GB1172159 A GB 1172159A
Authority
GB
United Kingdom
Prior art keywords
cathode
chambers
partition
voltages
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB03849/67A
Inventor
William Charles Necker
Charles Irving Mcvey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB1172159A publication Critical patent/GB1172159A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/077Electron guns using discharge in gases or vapours as electron sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)

Abstract

1,172,159. Electron guns. GENERAL ELECTRIC CO. 23 March, 1967 [31 May, 1966], No. 13849/67. Heading H1D. A hollow cathode electron beam source, e.g. in apparatus for welding, heating or processing materials, comprises a perforated or solid wall cathode structure 7 divided by a partition 27 into at least two cathode chambers interconnected through an aperture 28 in the partition. With suitable gases, e.g. He, A, N or H, gas pressures, voltages and dimensions, a plasma body is formed in each cathode chamber, the plasma bodies being coupled together through the aperture. Insulation may be interposed between the two cathode chambers and the chambers biased to different voltages (Figs. 4 and 5). In one variation, Fig. 6, the insulation 40, e.g. of ceramic, also envelops the side walls of the cathode structure. The ceramic sheath may comprise secondary electron emissive material such as magnesium oxide to act as a further source of electrons for the plasmas due to ion bombardment. The cathode structure may be surrounded by a metal shield (Fig. 3). In other variations the partition 27 need not be perpendicular to the side walls, Fig. 7, or two or more partitions may be provided to form a three- or multiple-stage cathode, Fig. 8. In a further embodiment six or more cathode chambers are interconnected in a series-parallel arrangement (Figs. 9a, 9b). The cathode chambers may be cylindrical, rectangular or square in shape and the beam exit aperture circular or rectangular. The source may be operated with D.C. or A.C. voltages and may produce a pulsating beam.
GB03849/67A 1966-05-31 1967-03-23 Improvements in Low Voltage Electron Beam Apparatus Expired GB1172159A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US554007A US3411035A (en) 1966-05-31 1966-05-31 Multi-chamber hollow cathode low voltage electron beam apparatus

Publications (1)

Publication Number Publication Date
GB1172159A true GB1172159A (en) 1969-11-26

Family

ID=24211681

Family Applications (1)

Application Number Title Priority Date Filing Date
GB03849/67A Expired GB1172159A (en) 1966-05-31 1967-03-23 Improvements in Low Voltage Electron Beam Apparatus

Country Status (3)

Country Link
US (1) US3411035A (en)
DE (1) DE1589829A1 (en)
GB (1) GB1172159A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2140199A (en) * 1983-04-19 1984-11-21 Balzers Hochvakuum A method of heating products
DE4391006C2 (en) * 1992-03-11 2002-10-17 Charles W Hanks electron beam gun

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1287262A (en) * 1968-09-05 1972-08-31 Atomic Energy Authority Uk Improvements in or relating to non-thermionic glow discharge devices
US3816790A (en) * 1970-06-08 1974-06-11 Matsushita Electric Ind Co Ltd Linear cathode high-energy electron beam apparatus
US3831052A (en) * 1973-05-25 1974-08-20 Hughes Aircraft Co Hollow cathode gas discharge device
GB1488657A (en) * 1973-09-24 1977-10-12 Ion Tech Ltd Ion sources
US4163130A (en) * 1975-07-25 1979-07-31 Hitachi, Ltd. Vacuum interrupter with pressure monitoring means
NL7902620A (en) * 1978-04-05 1979-10-09 Atomic Energy Authority Uk ION SOURCE.
US4380720A (en) * 1979-11-20 1983-04-19 Fleck Carl M Apparatus for producing a directed flow of a gaseous medium utilizing the electric wind principle
DE3218728A1 (en) * 1982-05-18 1984-03-01 Telefunken electronic GmbH, 7100 Heilbronn Ion-beam etching appliance
US4694222A (en) * 1984-04-02 1987-09-15 Rpc Industries Ion plasma electron gun
US4755722A (en) * 1984-04-02 1988-07-05 Rpc Industries Ion plasma electron gun
US4647818A (en) * 1984-04-16 1987-03-03 Sfe Technologies Nonthermionic hollow anode gas discharge electron beam source
US4707637A (en) * 1986-03-24 1987-11-17 Hughes Aircraft Company Plasma-anode electron gun
YU46728B (en) * 1986-10-23 1994-04-05 VUJO dr. MILJEVIĆ ION-ELECTRONIC SOURCE WITH HOLLOW ANODE
US4786844A (en) * 1987-03-30 1988-11-22 Rpc Industries Wire ion plasma gun
US4749911A (en) * 1987-03-30 1988-06-07 Rpc Industries Ion plasma electron gun with dose rate control via amplitude modulation of the plasma discharge
US4942339A (en) * 1988-09-27 1990-07-17 The United States Of America As Represented By The United States Department Of Energy Intense steady state electron beam generator
FR2639756B1 (en) * 1988-11-30 1994-05-13 Centre Nal Recherc Scientifique SOURCE OF VAPORS AND IONS

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3262013A (en) * 1962-02-02 1966-07-19 Martin Marietta Corp Perforated hollow cathode discharge device
US3320475A (en) * 1963-04-30 1967-05-16 Gen Electric Nonthermionic hollow cathode electron beam apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2140199A (en) * 1983-04-19 1984-11-21 Balzers Hochvakuum A method of heating products
DE4391006C2 (en) * 1992-03-11 2002-10-17 Charles W Hanks electron beam gun

Also Published As

Publication number Publication date
US3411035A (en) 1968-11-12
DE1589829A1 (en) 1970-05-06

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees