GB1172159A - Improvements in Low Voltage Electron Beam Apparatus - Google Patents
Improvements in Low Voltage Electron Beam ApparatusInfo
- Publication number
- GB1172159A GB1172159A GB03849/67A GB1384967A GB1172159A GB 1172159 A GB1172159 A GB 1172159A GB 03849/67 A GB03849/67 A GB 03849/67A GB 1384967 A GB1384967 A GB 1384967A GB 1172159 A GB1172159 A GB 1172159A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- chambers
- partition
- voltages
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 2
- 238000005192 partition Methods 0.000 abstract 4
- 210000002381 plasma Anatomy 0.000 abstract 3
- 239000000919 ceramic Substances 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 238000009413 insulation Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000010849 ion bombardment Methods 0.000 abstract 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract 1
- 239000000395 magnesium oxide Substances 0.000 abstract 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000012545 processing Methods 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 238000003466 welding Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Plasma Technology (AREA)
Abstract
1,172,159. Electron guns. GENERAL ELECTRIC CO. 23 March, 1967 [31 May, 1966], No. 13849/67. Heading H1D. A hollow cathode electron beam source, e.g. in apparatus for welding, heating or processing materials, comprises a perforated or solid wall cathode structure 7 divided by a partition 27 into at least two cathode chambers interconnected through an aperture 28 in the partition. With suitable gases, e.g. He, A, N or H, gas pressures, voltages and dimensions, a plasma body is formed in each cathode chamber, the plasma bodies being coupled together through the aperture. Insulation may be interposed between the two cathode chambers and the chambers biased to different voltages (Figs. 4 and 5). In one variation, Fig. 6, the insulation 40, e.g. of ceramic, also envelops the side walls of the cathode structure. The ceramic sheath may comprise secondary electron emissive material such as magnesium oxide to act as a further source of electrons for the plasmas due to ion bombardment. The cathode structure may be surrounded by a metal shield (Fig. 3). In other variations the partition 27 need not be perpendicular to the side walls, Fig. 7, or two or more partitions may be provided to form a three- or multiple-stage cathode, Fig. 8. In a further embodiment six or more cathode chambers are interconnected in a series-parallel arrangement (Figs. 9a, 9b). The cathode chambers may be cylindrical, rectangular or square in shape and the beam exit aperture circular or rectangular. The source may be operated with D.C. or A.C. voltages and may produce a pulsating beam.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US554007A US3411035A (en) | 1966-05-31 | 1966-05-31 | Multi-chamber hollow cathode low voltage electron beam apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1172159A true GB1172159A (en) | 1969-11-26 |
Family
ID=24211681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB03849/67A Expired GB1172159A (en) | 1966-05-31 | 1967-03-23 | Improvements in Low Voltage Electron Beam Apparatus |
Country Status (3)
Country | Link |
---|---|
US (1) | US3411035A (en) |
DE (1) | DE1589829A1 (en) |
GB (1) | GB1172159A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2140199A (en) * | 1983-04-19 | 1984-11-21 | Balzers Hochvakuum | A method of heating products |
DE4391006C2 (en) * | 1992-03-11 | 2002-10-17 | Charles W Hanks | electron beam gun |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1287262A (en) * | 1968-09-05 | 1972-08-31 | Atomic Energy Authority Uk | Improvements in or relating to non-thermionic glow discharge devices |
US3816790A (en) * | 1970-06-08 | 1974-06-11 | Matsushita Electric Ind Co Ltd | Linear cathode high-energy electron beam apparatus |
US3831052A (en) * | 1973-05-25 | 1974-08-20 | Hughes Aircraft Co | Hollow cathode gas discharge device |
GB1488657A (en) * | 1973-09-24 | 1977-10-12 | Ion Tech Ltd | Ion sources |
US4163130A (en) * | 1975-07-25 | 1979-07-31 | Hitachi, Ltd. | Vacuum interrupter with pressure monitoring means |
NL7902620A (en) * | 1978-04-05 | 1979-10-09 | Atomic Energy Authority Uk | ION SOURCE. |
US4380720A (en) * | 1979-11-20 | 1983-04-19 | Fleck Carl M | Apparatus for producing a directed flow of a gaseous medium utilizing the electric wind principle |
DE3218728A1 (en) * | 1982-05-18 | 1984-03-01 | Telefunken electronic GmbH, 7100 Heilbronn | Ion-beam etching appliance |
US4694222A (en) * | 1984-04-02 | 1987-09-15 | Rpc Industries | Ion plasma electron gun |
US4755722A (en) * | 1984-04-02 | 1988-07-05 | Rpc Industries | Ion plasma electron gun |
US4647818A (en) * | 1984-04-16 | 1987-03-03 | Sfe Technologies | Nonthermionic hollow anode gas discharge electron beam source |
US4707637A (en) * | 1986-03-24 | 1987-11-17 | Hughes Aircraft Company | Plasma-anode electron gun |
YU46728B (en) * | 1986-10-23 | 1994-04-05 | VUJO dr. MILJEVIĆ | ION-ELECTRONIC SOURCE WITH HOLLOW ANODE |
US4749911A (en) * | 1987-03-30 | 1988-06-07 | Rpc Industries | Ion plasma electron gun with dose rate control via amplitude modulation of the plasma discharge |
US4786844A (en) * | 1987-03-30 | 1988-11-22 | Rpc Industries | Wire ion plasma gun |
US4942339A (en) * | 1988-09-27 | 1990-07-17 | The United States Of America As Represented By The United States Department Of Energy | Intense steady state electron beam generator |
FR2639756B1 (en) * | 1988-11-30 | 1994-05-13 | Centre Nal Recherc Scientifique | SOURCE OF VAPORS AND IONS |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3262013A (en) * | 1962-02-02 | 1966-07-19 | Martin Marietta Corp | Perforated hollow cathode discharge device |
US3320475A (en) * | 1963-04-30 | 1967-05-16 | Gen Electric | Nonthermionic hollow cathode electron beam apparatus |
-
1966
- 1966-05-31 US US554007A patent/US3411035A/en not_active Expired - Lifetime
-
1967
- 1967-03-23 GB GB03849/67A patent/GB1172159A/en not_active Expired
- 1967-05-18 DE DE19671589829 patent/DE1589829A1/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2140199A (en) * | 1983-04-19 | 1984-11-21 | Balzers Hochvakuum | A method of heating products |
DE4391006C2 (en) * | 1992-03-11 | 2002-10-17 | Charles W Hanks | electron beam gun |
Also Published As
Publication number | Publication date |
---|---|
DE1589829A1 (en) | 1970-05-06 |
US3411035A (en) | 1968-11-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PLNP | Patent lapsed through nonpayment of renewal fees |