DE9113374U1 - - Google Patents

Info

Publication number
DE9113374U1
DE9113374U1 DE9113374U DE9113374U DE9113374U1 DE 9113374 U1 DE9113374 U1 DE 9113374U1 DE 9113374 U DE9113374 U DE 9113374U DE 9113374 U DE9113374 U DE 9113374U DE 9113374 U1 DE9113374 U1 DE 9113374U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9113374U
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VTD Vakuumtechnik Dresden GmbH
Original Assignee
VTD Vakuumtechnik Dresden GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VTD Vakuumtechnik Dresden GmbH filed Critical VTD Vakuumtechnik Dresden GmbH
Priority to DE9113374U priority Critical patent/DE9113374U1/de
Publication of DE9113374U1 publication Critical patent/DE9113374U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/025—Hollow cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3436—Hollow cathodes with internal coolant flow

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
DE9113374U 1991-10-28 1991-10-28 Expired - Lifetime DE9113374U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9113374U DE9113374U1 (de) 1991-10-28 1991-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9113374U DE9113374U1 (de) 1991-10-28 1991-10-28

Publications (1)

Publication Number Publication Date
DE9113374U1 true DE9113374U1 (de) 1991-12-19

Family

ID=6872671

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9113374U Expired - Lifetime DE9113374U1 (de) 1991-10-28 1991-10-28

Country Status (1)

Country Link
DE (1) DE9113374U1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0597412A1 (de) * 1992-11-10 1994-05-18 VTD Vakuumtechnik Dresden GmbH Drahtwendel-Hohlkatode und Verfahren zu ihrer Herstellung
WO2004003954A1 (en) * 2002-06-27 2004-01-08 Kaufman & Robinson, Inc. Industrial hollow cathode
EP2164309A1 (de) 2008-09-15 2010-03-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Betreiben einer Hohlkathoden-Bogenentladung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1539998A1 (de) * 1965-05-28 1970-01-22 Gen Electric Elektronenstrahlerzeuger

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1539998A1 (de) * 1965-05-28 1970-01-22 Gen Electric Elektronenstrahlerzeuger

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP 58-66242 A., In: Patents Abstracts of Japan, E-186, July 12, 1983, Vol.7, No.158 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0597412A1 (de) * 1992-11-10 1994-05-18 VTD Vakuumtechnik Dresden GmbH Drahtwendel-Hohlkatode und Verfahren zu ihrer Herstellung
WO2004003954A1 (en) * 2002-06-27 2004-01-08 Kaufman & Robinson, Inc. Industrial hollow cathode
EP2164309A1 (de) 2008-09-15 2010-03-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Betreiben einer Hohlkathoden-Bogenentladung
DE102008047198A1 (de) 2008-09-15 2010-04-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Betreiben einer Hohlkathoden-Bogenentladung
DE102008047198B4 (de) * 2008-09-15 2012-11-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Betreiben einer Hohlkathoden-Bogenentladung

Similar Documents

Publication Publication Date Title
DE4290571T1 (de)
DE9101386U1 (de)
DE9102011U1 (de)
DE9101242U1 (de)
DE9103315U1 (de)
DE9104747U1 (de)
DE4290105T1 (de)
DE9100607U1 (de)
DE9103807U1 (de)
DE9103272U1 (de)
DE9100786U1 (de)
DE9103378U1 (de)
DE9104002U1 (de)
DE9103008U1 (de)
DE9103911U1 (de)
DE9100175U1 (de)
DE9100996U1 (de)
DE9100181U1 (de)
DE9104701U1 (de)
DE9100690U1 (de)
DE9100980U1 (de)
DE9103705U1 (de)
DE9100069U1 (de)
DE9102228U1 (de)
DE9100853U1 (de)