GB1045429A - Transistors - Google Patents
TransistorsInfo
- Publication number
- GB1045429A GB1045429A GB13629/65A GB1362965A GB1045429A GB 1045429 A GB1045429 A GB 1045429A GB 13629/65 A GB13629/65 A GB 13629/65A GB 1362965 A GB1362965 A GB 1362965A GB 1045429 A GB1045429 A GB 1045429A
- Authority
- GB
- United Kingdom
- Prior art keywords
- ohm
- type
- hole
- silicon
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 230000005669 field effect Effects 0.000 abstract 1
- 229910052732 germanium Inorganic materials 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 abstract 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/01—Manufacture or treatment
- H10D62/021—Forming source or drain recesses by etching e.g. recessing by etching and then refilling
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/0221—Manufacture or treatment of FETs having insulated gates [IGFET] having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended-drain MOSFETs [EDMOS]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/028—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/213—Channel regions of field-effect devices
- H10D62/221—Channel regions of field-effect devices of FETs
- H10D62/235—Channel regions of field-effect devices of FETs of IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/213—Channel regions of field-effect devices
- H10D62/221—Channel regions of field-effect devices of FETs
- H10D62/235—Channel regions of field-effect devices of FETs of IGFETs
- H10D62/314—Channel regions of field-effect devices of FETs of IGFETs having vertical doping variations
Landscapes
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB13629/65A GB1045429A (en) | 1965-03-31 | 1965-03-31 | Transistors |
| NL6603633A NL6603633A (enrdf_load_stackoverflow) | 1965-03-31 | 1966-03-18 | |
| DE19661564139 DE1564139C (de) | 1965-03-31 | 1966-03-30 | Feldeffekttransistor mit isolierter Steuerelektrode |
| FR55778A FR1473633A (fr) | 1965-03-31 | 1966-03-31 | Transistor à effet de champ |
| BE678737D BE678737A (enrdf_load_stackoverflow) | 1965-03-31 | 1966-03-31 | |
| GB27106/66A GB1084937A (en) | 1965-03-31 | 1966-06-17 | Transistors |
| DE1589687A DE1589687C3 (de) | 1965-03-31 | 1967-06-01 | Festkörperschaltung mit isolierten Feldeffekttransistoren und Verfahren zu ihrer Herstellung |
| BE700017D BE700017A (enrdf_load_stackoverflow) | 1965-03-31 | 1967-06-16 | |
| FR110769A FR93427E (fr) | 1965-03-31 | 1967-06-16 | Transistors a effet de champ. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB13629/65A GB1045429A (en) | 1965-03-31 | 1965-03-31 | Transistors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1045429A true GB1045429A (en) | 1966-10-12 |
Family
ID=10026500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB13629/65A Expired GB1045429A (en) | 1965-03-31 | 1965-03-31 | Transistors |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE678737A (enrdf_load_stackoverflow) |
| FR (1) | FR1473633A (enrdf_load_stackoverflow) |
| GB (1) | GB1045429A (enrdf_load_stackoverflow) |
| NL (1) | NL6603633A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3528168A (en) * | 1967-09-26 | 1970-09-15 | Texas Instruments Inc | Method of making a semiconductor device |
| US3600642A (en) * | 1968-11-15 | 1971-08-17 | David F Allison | Mos structure with precisely controlled channel length and method |
| US3853644A (en) * | 1969-09-18 | 1974-12-10 | Kogyo Gijutsuin | Transistor for super-high frequency and method of manufacturing it |
| EP0271247A3 (en) * | 1986-12-04 | 1989-02-01 | Seiko Instruments Inc. | A mos field effect transistor and a process for fabricating the same |
-
1965
- 1965-03-31 GB GB13629/65A patent/GB1045429A/en not_active Expired
-
1966
- 1966-03-18 NL NL6603633A patent/NL6603633A/xx unknown
- 1966-03-31 BE BE678737D patent/BE678737A/xx unknown
- 1966-03-31 FR FR55778A patent/FR1473633A/fr not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3528168A (en) * | 1967-09-26 | 1970-09-15 | Texas Instruments Inc | Method of making a semiconductor device |
| US3600642A (en) * | 1968-11-15 | 1971-08-17 | David F Allison | Mos structure with precisely controlled channel length and method |
| US3853644A (en) * | 1969-09-18 | 1974-12-10 | Kogyo Gijutsuin | Transistor for super-high frequency and method of manufacturing it |
| EP0271247A3 (en) * | 1986-12-04 | 1989-02-01 | Seiko Instruments Inc. | A mos field effect transistor and a process for fabricating the same |
Also Published As
| Publication number | Publication date |
|---|---|
| NL6603633A (enrdf_load_stackoverflow) | 1966-10-03 |
| DE1564139A1 (de) | 1969-12-18 |
| BE678737A (enrdf_load_stackoverflow) | 1966-09-30 |
| DE1564139B2 (de) | 1970-09-10 |
| FR1473633A (fr) | 1967-03-17 |
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