GB1023532A - - Google Patents

Info

Publication number
GB1023532A
GB1023532A GB1023532DA GB1023532A GB 1023532 A GB1023532 A GB 1023532A GB 1023532D A GB1023532D A GB 1023532DA GB 1023532 A GB1023532 A GB 1023532A
Authority
GB
United Kingdom
Prior art keywords
layers
chromium
etching
rich
hydrochloric acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of GB1023532A publication Critical patent/GB1023532A/en
Active legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
GB1023532D 1964-01-07 Active GB1023532A (US07223432-20070529-C00017.png)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB70564 1964-01-07

Publications (1)

Publication Number Publication Date
GB1023532A true GB1023532A (US07223432-20070529-C00017.png)

Family

ID=9709108

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1023532D Active GB1023532A (US07223432-20070529-C00017.png) 1964-01-07

Country Status (6)

Country Link
US (1) US3367806A (US07223432-20070529-C00017.png)
BE (1) BE657987A (US07223432-20070529-C00017.png)
DE (1) DE1546014A1 (US07223432-20070529-C00017.png)
FR (1) FR87277E (US07223432-20070529-C00017.png)
GB (1) GB1023532A (US07223432-20070529-C00017.png)
NL (1) NL6500171A (US07223432-20070529-C00017.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3367806A (en) * 1964-01-07 1968-02-06 Int Standard Electric Corp Method of etching a graded metallic film

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480841A (en) * 1967-01-13 1969-11-25 Ibm Solderable backside ohmic contact metal system for semiconductor devices and fabrication process therefor
US3529350A (en) * 1968-12-09 1970-09-22 Gen Electric Thin film resistor-conductor system employing beta-tungsten resistor films
US3657029A (en) * 1968-12-31 1972-04-18 Texas Instruments Inc Platinum thin-film metallization method
US3642548A (en) * 1969-08-20 1972-02-15 Siemens Ag Method of producing integrated circuits
US3653999A (en) * 1970-09-25 1972-04-04 Texas Instruments Inc Method of forming beam leads on semiconductor devices and integrated circuits
US3961982A (en) * 1974-01-04 1976-06-08 Itek Corporation Method of removing silver images from aluminum lithographic plates

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1277057A (fr) * 1959-12-31 1961-11-24 Siemens Ag Procédé d'apport de couches soudables sur des métaux ou des semi-conducteurs difficiles à souder, notamment sur des branches de couples thermo-électriques en tellurure de bismuth
US3256588A (en) * 1962-10-23 1966-06-21 Philco Corp Method of fabricating thin film r-c circuits on single substrate
GB1023532A (US07223432-20070529-C00017.png) * 1964-01-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3367806A (en) * 1964-01-07 1968-02-06 Int Standard Electric Corp Method of etching a graded metallic film

Also Published As

Publication number Publication date
US3367806A (en) 1968-02-06
DE1546014A1 (de) 1970-02-05
FR87277E (fr) 1966-07-08
BE657987A (US07223432-20070529-C00017.png) 1965-07-07
NL6500171A (US07223432-20070529-C00017.png) 1965-07-08

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