FR3122033B1 - Procédé de fabrication d’un groupe de motifs inclinés - Google Patents

Procédé de fabrication d’un groupe de motifs inclinés Download PDF

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Publication number
FR3122033B1
FR3122033B1 FR2104053A FR2104053A FR3122033B1 FR 3122033 B1 FR3122033 B1 FR 3122033B1 FR 2104053 A FR2104053 A FR 2104053A FR 2104053 A FR2104053 A FR 2104053A FR 3122033 B1 FR3122033 B1 FR 3122033B1
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FR
France
Prior art keywords
slices
patterns
lower level
pattern
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
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FR2104053A
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English (en)
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FR3122033A1 (fr
Inventor
Stefan Landis
Hubert Teyssedre
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Priority to FR2104053A priority Critical patent/FR3122033B1/fr
Publication of FR3122033A1 publication Critical patent/FR3122033A1/fr
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Publication of FR3122033B1 publication Critical patent/FR3122033B1/fr
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PROCÉDÉ DE FABRICATION D’UN GROUPE DE MOTIFS INCLINÉS Un aspect de l’invention concerne un procédé de fabrication d’un groupe de motifs inclinés, les motifs étant disposés sur un substrat (10) et espacés les uns des autres, le procédé comprenant les étapes suivantes : former des tranches de motif, dites tranches de niveau inférieur (201), sur le substrat (10) ; former une couche de remplissage (202) en dehors des tranches de niveau inférieur (201) ; former (S13) des tranches de motif additionnelles, dites tranches de niveau supérieur (203), sur les tranches de niveau inférieur (201), chaque tranche de niveau supérieur (203) d’un motif (20) présentant un désalignement (d) par rapport à la tranche de niveau inférieur (201) dudit motif, de sorte que la tranche de niveau supérieur (203) repose en partie sur la couche de remplissage (202) ; libérer les motifs en gravant la couche de remplissage (202) sélectivement par rapport aux tranches de niveau inférieur (201) et aux tranches de niveau supérieur (203). Figure à publier avec l’abrégé : Figure 2C
FR2104053A 2021-04-19 2021-04-19 Procédé de fabrication d’un groupe de motifs inclinés Active FR3122033B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR2104053A FR3122033B1 (fr) 2021-04-19 2021-04-19 Procédé de fabrication d’un groupe de motifs inclinés

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2104053 2021-04-19
FR2104053A FR3122033B1 (fr) 2021-04-19 2021-04-19 Procédé de fabrication d’un groupe de motifs inclinés

Publications (2)

Publication Number Publication Date
FR3122033A1 FR3122033A1 (fr) 2022-10-21
FR3122033B1 true FR3122033B1 (fr) 2023-04-14

Family

ID=76034841

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2104053A Active FR3122033B1 (fr) 2021-04-19 2021-04-19 Procédé de fabrication d’un groupe de motifs inclinés

Country Status (1)

Country Link
FR (1) FR3122033B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06201907A (ja) * 1992-12-29 1994-07-22 Olympus Optical Co Ltd ブレーズ格子製造方法
US6905618B2 (en) * 2002-07-30 2005-06-14 Agilent Technologies, Inc. Diffractive optical elements and methods of making the same
CN106457871B (zh) * 2014-05-16 2018-06-01 Ccl证券私人有限公司 用于安全证件或标记的混合安全装置

Also Published As

Publication number Publication date
FR3122033A1 (fr) 2022-10-21

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