FR3115428A1 - Dispositif électromécanique à fréquence de résonance ajustable - Google Patents

Dispositif électromécanique à fréquence de résonance ajustable Download PDF

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Publication number
FR3115428A1
FR3115428A1 FR2010704A FR2010704A FR3115428A1 FR 3115428 A1 FR3115428 A1 FR 3115428A1 FR 2010704 A FR2010704 A FR 2010704A FR 2010704 A FR2010704 A FR 2010704A FR 3115428 A1 FR3115428 A1 FR 3115428A1
Authority
FR
France
Prior art keywords
transducers
electrodes
fingers
electrode
interfacing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR2010704A
Other languages
English (en)
French (fr)
Inventor
Alexandre Reinhardt
Bruno Reig
Axel SAUVAGE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR2010704A priority Critical patent/FR3115428A1/fr
Priority to EP21202238.8A priority patent/EP3996275B1/fr
Priority to JP2021168587A priority patent/JP2022067077A/ja
Priority to US17/501,373 priority patent/US12418273B2/en
Priority to CN202111213732.5A priority patent/CN114389566A/zh
Publication of FR3115428A1 publication Critical patent/FR3115428A1/fr
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
    • H03H9/14514—Broad band transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6403—Programmable filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6426—Combinations of the characteristics of different transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6436—Coupled resonator filters having one acoustic track only
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H2009/02165—Tuning

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
FR2010704A 2020-10-19 2020-10-19 Dispositif électromécanique à fréquence de résonance ajustable Pending FR3115428A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2010704A FR3115428A1 (fr) 2020-10-19 2020-10-19 Dispositif électromécanique à fréquence de résonance ajustable
EP21202238.8A EP3996275B1 (fr) 2020-10-19 2021-10-12 Dispositif électromécanique à fréquence de résonance ajustable
JP2021168587A JP2022067077A (ja) 2020-10-19 2021-10-14 調整可能共振周波数を有する電気機械デバイス
US17/501,373 US12418273B2 (en) 2020-10-19 2021-10-14 Electromechanical device with adjustable resonance frequency
CN202111213732.5A CN114389566A (zh) 2020-10-19 2021-10-19 具有可调谐振频率的机电装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2010704 2020-10-19
FR2010704A FR3115428A1 (fr) 2020-10-19 2020-10-19 Dispositif électromécanique à fréquence de résonance ajustable

Publications (1)

Publication Number Publication Date
FR3115428A1 true FR3115428A1 (fr) 2022-04-22

Family

ID=74205977

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2010704A Pending FR3115428A1 (fr) 2020-10-19 2020-10-19 Dispositif électromécanique à fréquence de résonance ajustable

Country Status (5)

Country Link
US (1) US12418273B2 (https=)
EP (1) EP3996275B1 (https=)
JP (1) JP2022067077A (https=)
CN (1) CN114389566A (https=)
FR (1) FR3115428A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024029609A1 (ja) * 2022-08-03 2024-02-08 株式会社村田製作所 弾性波装置
CN119605083A (zh) * 2022-08-09 2025-03-11 株式会社村田制作所 弹性波装置
WO2024038831A1 (ja) * 2022-08-13 2024-02-22 株式会社村田製作所 弾性波装置
CN119497961A (zh) * 2022-08-17 2025-02-21 株式会社村田制作所 弹性波装置
CN119769026A (zh) * 2022-08-25 2025-04-04 株式会社村田制作所 弹性波装置
CN119605084A (zh) * 2022-08-26 2025-03-11 株式会社村田制作所 弹性波装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6392421U (https=) * 1986-12-05 1988-06-15
US5010269A (en) * 1987-12-14 1991-04-23 Hitachi, Ltd. SAW resonator having a broad bandwidth
JP2011259516A (ja) * 2011-10-06 2011-12-22 Panasonic Corp 弾性表面波フィルタ及びそれを用いた通信機器
US20190305756A1 (en) * 2016-07-13 2019-10-03 Kyocera Corporation Receiving filter, multiplexer, and communication apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1529941A (en) * 1975-01-15 1978-10-25 Mullard Ltd Electrical filters including coupled resonators
US4028648A (en) * 1976-03-08 1977-06-07 Texas Instruments Incorporated Tunable surface wave device resonator
JPS59224910A (ja) * 1983-06-03 1984-12-17 Yokogawa Hokushin Electric Corp 表面弾性波装置
DE3942148A1 (de) * 1989-12-20 1991-06-27 Siemens Ag Oberflaechenwellen-reflektorfilter
WO2004102797A1 (ja) * 1997-07-17 2004-11-25 Michiaki Takagi ２ポートsaw共振子
JP2005204042A (ja) * 2004-01-15 2005-07-28 Seiko Epson Corp 弾性表面波共振子および弾性表面波フィルタ
JP5950363B2 (ja) * 2013-12-28 2016-07-13 株式会社弾性波デバイスラボ 弾性表面波変換器
JP2015228638A (ja) * 2013-12-28 2015-12-17 株式会社弾性波デバイスラボ 可変周波数弾性波変換器とこれを用いた電子装置
JP6430974B2 (ja) * 2016-01-27 2018-11-28 太陽誘電株式会社 共振回路およびフィルタ回路

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6392421U (https=) * 1986-12-05 1988-06-15
US5010269A (en) * 1987-12-14 1991-04-23 Hitachi, Ltd. SAW resonator having a broad bandwidth
JP2011259516A (ja) * 2011-10-06 2011-12-22 Panasonic Corp 弾性表面波フィルタ及びそれを用いた通信機器
US20190305756A1 (en) * 2016-07-13 2019-10-03 Kyocera Corporation Receiving filter, multiplexer, and communication apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
P.S. CROSS ET AL.: "Electronically variable surface-acoustic-wave velocity and tunable SAW re-sonators", APPL. PHYS. LETT., vol. 28, 1976, pages 1, XP009134302, DOI: 10.1063/1.88564

Also Published As

Publication number Publication date
US12418273B2 (en) 2025-09-16
EP3996275A2 (fr) 2022-05-11
US20220123727A1 (en) 2022-04-21
EP3996275A3 (fr) 2022-08-17
CN114389566A (zh) 2022-04-22
EP3996275B1 (fr) 2026-03-25
JP2022067077A (ja) 2022-05-02

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