CN114389566A - 具有可调谐振频率的机电装置 - Google Patents

具有可调谐振频率的机电装置 Download PDF

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Publication number
CN114389566A
CN114389566A CN202111213732.5A CN202111213732A CN114389566A CN 114389566 A CN114389566 A CN 114389566A CN 202111213732 A CN202111213732 A CN 202111213732A CN 114389566 A CN114389566 A CN 114389566A
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CN
China
Prior art keywords
electrode
transducer
electrodes
fingers
interface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202111213732.5A
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English (en)
Chinese (zh)
Inventor
亚历山大·莱因哈特
布鲁诺·雷格
阿克塞尔·索瓦吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Publication of CN114389566A publication Critical patent/CN114389566A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
    • H03H9/14514—Broad band transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6403—Programmable filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6426—Combinations of the characteristics of different transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6436—Coupled resonator filters having one acoustic track only
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H2009/02165—Tuning

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202111213732.5A 2020-10-19 2021-10-19 具有可调谐振频率的机电装置 Pending CN114389566A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2010704 2020-10-19
FR2010704A FR3115428A1 (fr) 2020-10-19 2020-10-19 Dispositif électromécanique à fréquence de résonance ajustable

Publications (1)

Publication Number Publication Date
CN114389566A true CN114389566A (zh) 2022-04-22

Family

ID=74205977

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111213732.5A Pending CN114389566A (zh) 2020-10-19 2021-10-19 具有可调谐振频率的机电装置

Country Status (5)

Country Link
US (1) US12418273B2 (https=)
EP (1) EP3996275B1 (https=)
JP (1) JP2022067077A (https=)
CN (1) CN114389566A (https=)
FR (1) FR3115428A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024029609A1 (ja) * 2022-08-03 2024-02-08 株式会社村田製作所 弾性波装置
CN119605083A (zh) * 2022-08-09 2025-03-11 株式会社村田制作所 弹性波装置
WO2024038831A1 (ja) * 2022-08-13 2024-02-22 株式会社村田製作所 弾性波装置
CN119497961A (zh) * 2022-08-17 2025-02-21 株式会社村田制作所 弹性波装置
CN119769026A (zh) * 2022-08-25 2025-04-04 株式会社村田制作所 弹性波装置
CN119605084A (zh) * 2022-08-26 2025-03-11 株式会社村田制作所 弹性波装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1529941A (en) * 1975-01-15 1978-10-25 Mullard Ltd Electrical filters including coupled resonators
US4028648A (en) * 1976-03-08 1977-06-07 Texas Instruments Incorporated Tunable surface wave device resonator
JPS59224910A (ja) * 1983-06-03 1984-12-17 Yokogawa Hokushin Electric Corp 表面弾性波装置
JPH0450652Y2 (https=) * 1986-12-05 1992-11-30
JPH01157109A (ja) * 1987-12-14 1989-06-20 Hitachi Ltd 弾性表面波共振器
DE3942148A1 (de) * 1989-12-20 1991-06-27 Siemens Ag Oberflaechenwellen-reflektorfilter
WO2004102797A1 (ja) * 1997-07-17 2004-11-25 Michiaki Takagi ２ポートsaw共振子
JP2005204042A (ja) * 2004-01-15 2005-07-28 Seiko Epson Corp 弾性表面波共振子および弾性表面波フィルタ
JP5278519B2 (ja) * 2011-10-06 2013-09-04 パナソニック株式会社 弾性表面波フィルタ及びそれを用いた通信機器
JP5950363B2 (ja) * 2013-12-28 2016-07-13 株式会社弾性波デバイスラボ 弾性表面波変換器
JP2015228638A (ja) * 2013-12-28 2015-12-17 株式会社弾性波デバイスラボ 可変周波数弾性波変換器とこれを用いた電子装置
JP6430974B2 (ja) * 2016-01-27 2018-11-28 太陽誘電株式会社 共振回路およびフィルタ回路
WO2018012367A1 (ja) * 2016-07-13 2018-01-18 京セラ株式会社 受信フィルタ、分波器および通信装置

Also Published As

Publication number Publication date
US12418273B2 (en) 2025-09-16
EP3996275A2 (fr) 2022-05-11
US20220123727A1 (en) 2022-04-21
FR3115428A1 (fr) 2022-04-22
EP3996275A3 (fr) 2022-08-17
EP3996275B1 (fr) 2026-03-25
JP2022067077A (ja) 2022-05-02

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