FR3112797B1 - Procédé de traitement d’une phase gazeuse résiduelle issue d’une technique CVI - Google Patents

Procédé de traitement d’une phase gazeuse résiduelle issue d’une technique CVI Download PDF

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Publication number
FR3112797B1
FR3112797B1 FR2007823A FR2007823A FR3112797B1 FR 3112797 B1 FR3112797 B1 FR 3112797B1 FR 2007823 A FR2007823 A FR 2007823A FR 2007823 A FR2007823 A FR 2007823A FR 3112797 B1 FR3112797 B1 FR 3112797B1
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FR
France
Prior art keywords
gaseous phase
treating
phase resulting
residual gaseous
cvi technique
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2007823A
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English (en)
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FR3112797A1 (fr
Inventor
Benjamin Cossou
Adrien Delcamp
Patrick Pons
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Ceramics SA
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Safran Ceramics SA
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Priority to FR2007823A priority Critical patent/FR3112797B1/fr
Publication of FR3112797A1 publication Critical patent/FR3112797A1/fr
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B17/00—Methods preventing fouling
    • B08B17/02—Preventing deposition of fouling or of dust
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Procédé de traitement d’une phase gazeuse résiduelle issue d’une technique CVI L’invention concerne le traitement d’une phase gazeuse résiduelle issue d’une technique CVI comprenant des chlorosilanes radicalaires par passage au travers d’un substrat poreux de haute surface spécifique et de température maîtrisée afin d’éviter le dépôt d’espèces pyrophoriques à l’extérieur de l’enceinte réactionnelle. Figure pour l’abrégé : Fig. 1.
FR2007823A 2020-07-24 2020-07-24 Procédé de traitement d’une phase gazeuse résiduelle issue d’une technique CVI Active FR3112797B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR2007823A FR3112797B1 (fr) 2020-07-24 2020-07-24 Procédé de traitement d’une phase gazeuse résiduelle issue d’une technique CVI

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2007823 2020-07-24
FR2007823A FR3112797B1 (fr) 2020-07-24 2020-07-24 Procédé de traitement d’une phase gazeuse résiduelle issue d’une technique CVI

Publications (2)

Publication Number Publication Date
FR3112797A1 FR3112797A1 (fr) 2022-01-28
FR3112797B1 true FR3112797B1 (fr) 2022-12-02

Family

ID=73793300

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2007823A Active FR3112797B1 (fr) 2020-07-24 2020-07-24 Procédé de traitement d’une phase gazeuse résiduelle issue d’une technique CVI

Country Status (1)

Country Link
FR (1) FR3112797B1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2711645B1 (fr) * 1993-10-27 1996-01-26 Europ Propulsion Procédé d'infiltration chimique en phase vapeur d'un matériau au sein d'un substrat fibreux avec établissement d'un gradient de température dans celui-ci.
FR2714076B1 (fr) * 1993-12-16 1996-03-15 Europ Propulsion Procédé de densification de substrats poreux par infiltration chimique en phase vapeur de carbure de silicium.
EP3527691A4 (fr) * 2016-10-14 2020-06-24 IHI Corporation Dispositif de collecte avec réchauffage pour procédé en phase gazeuse
FR3059679B1 (fr) * 2016-12-07 2021-03-12 Safran Ceram Outillage de conformation et installation pour l'infiltration chimique en phase gazeuse de preformes fibreuses

Also Published As

Publication number Publication date
FR3112797A1 (fr) 2022-01-28

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