FR3100331B1 - Procede et systeme de test pour l’evaluation de la qualite d'une unite de projection micro-optique et/ou de projection optique sub-longueur d’onde a canaux multiples - Google Patents
Procede et systeme de test pour l’evaluation de la qualite d'une unite de projection micro-optique et/ou de projection optique sub-longueur d’onde a canaux multiples Download PDFInfo
- Publication number
- FR3100331B1 FR3100331B1 FR2008823A FR2008823A FR3100331B1 FR 3100331 B1 FR3100331 B1 FR 3100331B1 FR 2008823 A FR2008823 A FR 2008823A FR 2008823 A FR2008823 A FR 2008823A FR 3100331 B1 FR3100331 B1 FR 3100331B1
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- Prior art keywords
- projection unit
- quality
- optical projection
- micro
- wavelength optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000003287 optical effect Effects 0.000 title abstract 5
- 238000010998 test method Methods 0.000 title 1
- 230000007547 defect Effects 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 238000004590 computer program Methods 0.000 abstract 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0285—Testing optical properties by measuring material or chromatic transmission properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F18/00—Pattern recognition
- G06F18/20—Analysing
- G06F18/24—Classification techniques
- G06F18/243—Classification techniques relating to the number of classes
- G06F18/2431—Multiple classes
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/04—Architecture, e.g. interconnection topology
- G06N3/045—Combinations of networks
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/08—Learning methods
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
- G01N2021/9583—Lenses
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20081—Training; Learning
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20084—Artificial neural networks [ANN]
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30168—Image quality inspection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geometry (AREA)
- Theoretical Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Data Mining & Analysis (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Evolutionary Computation (AREA)
- General Engineering & Computer Science (AREA)
- Artificial Intelligence (AREA)
- Optics & Photonics (AREA)
- Biophysics (AREA)
- Molecular Biology (AREA)
- Computing Systems (AREA)
- Mathematical Physics (AREA)
- Software Systems (AREA)
- Biomedical Technology (AREA)
- Computational Linguistics (AREA)
- Textile Engineering (AREA)
- Signal Processing (AREA)
- Evolutionary Biology (AREA)
- Quality & Reliability (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Bioinformatics & Computational Biology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Un procédé pour l’évaluation de la qualité d'une unité de projection micro-optique et/ou de projection optique sub-longueur d’onde à canaux multiples (28) est divulgué. Le procédé comprend les étapes suivantes : au moins une partie prédéfinie de l'unité de projection optique (28) est illuminée de sorte qu'une image est générée par au moins deux canaux de la partie prédéfinie de l'unité de projection optique à canaux multiples (28). Au moins une grandeur caractéristique est déterminée sur la base de l'analyse de l'image, une valeur de la grandeur caractéristique étant associée à une particularité caractéristique de l'unité de projection (28), à un défaut de l'unité de projection (28) et/ou à une classe de défauts de l'unité de projection (28). La qualité de l'unité de projection (28) est évaluée sur la base de ladite au moins une grandeur caractéristique. Un système de test (10) pour l’évaluation de la qualité d'une unité de projection micro-optique et/ou de projection optique sub-longueur d’onde à canaux multiples (28) et un programme informatique sont en outre divulgués. Fig. 1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2023747 | 2019-09-02 | ||
NL2023747A NL2023747B1 (en) | 2019-09-02 | 2019-09-02 | Method and test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3100331A1 FR3100331A1 (fr) | 2021-03-05 |
FR3100331B1 true FR3100331B1 (fr) | 2023-04-21 |
Family
ID=68582293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2008823A Active FR3100331B1 (fr) | 2019-09-02 | 2020-08-31 | Procede et systeme de test pour l’evaluation de la qualite d'une unite de projection micro-optique et/ou de projection optique sub-longueur d’onde a canaux multiples |
Country Status (11)
Country | Link |
---|---|
US (1) | US11630026B2 (fr) |
JP (1) | JP2021047179A (fr) |
KR (1) | KR20210028119A (fr) |
CN (1) | CN112525490A (fr) |
AT (1) | AT522945B1 (fr) |
BE (1) | BE1027491B1 (fr) |
DE (1) | DE102020122666A1 (fr) |
FR (1) | FR3100331B1 (fr) |
NL (1) | NL2023747B1 (fr) |
SG (1) | SG10202008528YA (fr) |
TW (1) | TW202122773A (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021139718A (ja) * | 2020-03-04 | 2021-09-16 | 日本発條株式会社 | 検査システムの点検方法、検査システム、およびコンピュータプログラム。 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59224537A (ja) * | 1983-06-03 | 1984-12-17 | Matsushita Electric Ind Co Ltd | 投影試験装置 |
US5286338A (en) * | 1993-03-01 | 1994-02-15 | At&T Bell Laboratories | Methods for making microlens arrays |
US7289655B2 (en) * | 2001-08-29 | 2007-10-30 | Seiko Epson Corporation | Device for inspecting illumination optical device and method for inspecting illumination optical device |
DE10348509A1 (de) * | 2003-10-18 | 2005-05-19 | Carl Zeiss Jena Gmbh | Wellenfrontsensor |
JP4882529B2 (ja) * | 2005-08-26 | 2012-02-22 | セイコーエプソン株式会社 | 欠陥検出方法および欠陥検出装置 |
JP4539650B2 (ja) * | 2006-12-26 | 2010-09-08 | セイコーエプソン株式会社 | 光学系の光学特性評価方法、プロジェクタの光学特性評価方法、光学特性評価装置、およびスクリーン |
JP2008171142A (ja) * | 2007-01-10 | 2008-07-24 | Seiko Epson Corp | シミ欠陥検出方法及び装置 |
JP2008170325A (ja) * | 2007-01-12 | 2008-07-24 | Seiko Epson Corp | シミ欠陥検出方法およびシミ欠陥検出装置 |
TWI361269B (en) * | 2008-04-02 | 2012-04-01 | Univ Nat Taiwan | Lens measurement device and method for measuring lens |
JP5256899B2 (ja) * | 2008-07-18 | 2013-08-07 | セイコーエプソン株式会社 | 画像補正装置、画像補正方法、プロジェクタおよびプロジェクションシステム |
TWI439788B (zh) * | 2010-01-04 | 2014-06-01 | Ind Tech Res Inst | 投影校正系統及方法 |
JP5604909B2 (ja) * | 2010-02-26 | 2014-10-15 | セイコーエプソン株式会社 | 補正情報算出装置、画像処理装置、画像表示システム、および画像補正方法 |
JP5338718B2 (ja) * | 2010-02-26 | 2013-11-13 | セイコーエプソン株式会社 | 補正情報算出装置、画像処理装置、画像表示システム、および画像補正方法 |
CN102494873B (zh) * | 2011-11-20 | 2014-05-07 | 中国科学院光电技术研究所 | 一种微透镜阵列焦距的测量方法 |
KR101396959B1 (ko) * | 2013-04-23 | 2014-05-19 | 아이리얼 주식회사 | 렌즈 어레이 검사시스템 및 그를 이용한 성능분석방법 |
KR101704859B1 (ko) * | 2013-06-18 | 2017-02-08 | 주식회사 엘지화학 | 마이크로렌즈의 초점 거리 측정 방법 및 초점 거리 측정 장치 |
JP6289003B2 (ja) * | 2013-09-26 | 2018-03-07 | キヤノン株式会社 | 情報処理装置及びその制御方法、プログラム |
KR20150099956A (ko) * | 2014-02-24 | 2015-09-02 | 라온피플 주식회사 | 렌즈 검사 장치 |
KR20160149883A (ko) * | 2015-06-19 | 2016-12-28 | 티클로버(주) | 렌즈 결함 검사 장치 |
WO2016207703A1 (fr) * | 2015-06-23 | 2016-12-29 | Bosch Car Multimedia Portugal, S.A. | Appareil et procédé pour détection de défauts fonctionnels de pixels ou de sous-pixels d'un dispositif d'affichage d'image |
KR20180030297A (ko) * | 2016-09-12 | 2018-03-22 | 삼성디스플레이 주식회사 | 마이크로 렌즈 어레이의 특성 측정 장치 및 그 장치를 이용한 마이크로 렌즈 어레이의 특성 측정 방법 |
TWI644098B (zh) * | 2017-01-05 | 2018-12-11 | 國立臺灣師範大學 | 透明基板之瑕疵檢測方法與裝置 |
JP2018124441A (ja) * | 2017-02-01 | 2018-08-09 | キヤノン株式会社 | システム、情報処理装置、情報処理方法及びプログラム |
DE102017118355A1 (de) * | 2017-08-11 | 2019-02-14 | Gom Gmbh | Vorrichtung und Verfahren für die flächenhafte optische 3D-Messtechnik |
JP2019120749A (ja) * | 2017-12-28 | 2019-07-22 | キヤノン株式会社 | 表示制御装置、画像投影システム、制御方法およびプログラム |
JP7228966B2 (ja) * | 2018-06-29 | 2023-02-27 | キヤノン株式会社 | 画像処理装置及びその制御方法及びプログラム |
CN111816103A (zh) * | 2019-04-10 | 2020-10-23 | 中强光电股份有限公司 | 投影装置及影像调整方法 |
-
2019
- 2019-09-02 NL NL2023747A patent/NL2023747B1/en active
-
2020
- 2020-08-27 AT ATA50724/2020A patent/AT522945B1/de active
- 2020-08-28 KR KR1020200109234A patent/KR20210028119A/ko active Search and Examination
- 2020-08-31 DE DE102020122666.7A patent/DE102020122666A1/de active Pending
- 2020-08-31 FR FR2008823A patent/FR3100331B1/fr active Active
- 2020-08-31 TW TW109129782A patent/TW202122773A/zh unknown
- 2020-09-01 JP JP2020147060A patent/JP2021047179A/ja active Pending
- 2020-09-01 BE BE20205601A patent/BE1027491B1/de active IP Right Grant
- 2020-09-02 SG SG10202008528YA patent/SG10202008528YA/en unknown
- 2020-09-02 US US17/010,553 patent/US11630026B2/en active Active
- 2020-09-02 CN CN202010909823.1A patent/CN112525490A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN112525490A (zh) | 2021-03-19 |
AT522945B1 (de) | 2021-08-15 |
SG10202008528YA (en) | 2021-04-29 |
AT522945A2 (de) | 2021-03-15 |
US11630026B2 (en) | 2023-04-18 |
JP2021047179A (ja) | 2021-03-25 |
AT522945A3 (de) | 2021-06-15 |
FR3100331A1 (fr) | 2021-03-05 |
US20210063863A1 (en) | 2021-03-04 |
NL2023747B1 (en) | 2021-05-12 |
TW202122773A (zh) | 2021-06-16 |
KR20210028119A (ko) | 2021-03-11 |
BE1027491B1 (de) | 2021-10-01 |
BE1027491A1 (de) | 2021-03-05 |
DE102020122666A1 (de) | 2021-03-04 |
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