FR3068994B1 - Procede de realisation d'une couche cristalline en un compose iii-n par epitaxie van der waals a partir de graphene - Google Patents

Procede de realisation d'une couche cristalline en un compose iii-n par epitaxie van der waals a partir de graphene Download PDF

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Publication number
FR3068994B1
FR3068994B1 FR1756556A FR1756556A FR3068994B1 FR 3068994 B1 FR3068994 B1 FR 3068994B1 FR 1756556 A FR1756556 A FR 1756556A FR 1756556 A FR1756556 A FR 1756556A FR 3068994 B1 FR3068994 B1 FR 3068994B1
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Prior art keywords
graphene
epitaxy
compound
iii
making
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FR1756556A
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English (en)
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FR3068994A1 (fr
Inventor
Timotee Journot
Berangere Hyot
Armelle Even
Amelie Dussaigne
Bruno-Jules Daudin
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1756556A priority Critical patent/FR3068994B1/fr
Priority to US16/629,467 priority patent/US11162188B2/en
Priority to PCT/FR2018/051723 priority patent/WO2019012215A1/fr
Priority to EP18752572.0A priority patent/EP3652365A1/fr
Publication of FR3068994A1 publication Critical patent/FR3068994A1/fr
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate
    • C30B25/183—Epitaxial-layer growth characterised by the substrate being provided with a buffer layer, e.g. a lattice matching layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C23C16/303—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403—AIII-nitrides

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  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Led Devices (AREA)
  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

L'invention porte sur un procédé de fabrication d'une couche d'intérêt (3) en un composé cristallin III-N par épitaxie à partir d'une couche de graphène (2), caractérisée en ce qu'il comporte, préalablement à une phase de nucléation de la couche d'intérêt (3), une étape de traitement thermique de la couche de graphène (2) dans laquelle celle-ci est soumise à une première température (Ttt) supérieure ou égale à 1050°C et à un flux d'ammoniac.
FR1756556A 2017-07-11 2017-07-11 Procede de realisation d'une couche cristalline en un compose iii-n par epitaxie van der waals a partir de graphene Active FR3068994B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1756556A FR3068994B1 (fr) 2017-07-11 2017-07-11 Procede de realisation d'une couche cristalline en un compose iii-n par epitaxie van der waals a partir de graphene
US16/629,467 US11162188B2 (en) 2017-07-11 2018-07-09 Method for producing a crystalline layer in a III-N compound by van der Waals epitaxy from graphene
PCT/FR2018/051723 WO2019012215A1 (fr) 2017-07-11 2018-07-09 Procede de realisation d'une couche cristalline en un compose iii-n par epitaxie van der waals a partir de graphene
EP18752572.0A EP3652365A1 (fr) 2017-07-11 2018-07-09 Procede de realisation d'une couche cristalline en un compose iii-n par epitaxie van der waals a partir de graphene

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1756556A FR3068994B1 (fr) 2017-07-11 2017-07-11 Procede de realisation d'une couche cristalline en un compose iii-n par epitaxie van der waals a partir de graphene
FR1756556 2017-07-11

Publications (2)

Publication Number Publication Date
FR3068994A1 FR3068994A1 (fr) 2019-01-18
FR3068994B1 true FR3068994B1 (fr) 2021-12-10

Family

ID=60515469

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1756556A Active FR3068994B1 (fr) 2017-07-11 2017-07-11 Procede de realisation d'une couche cristalline en un compose iii-n par epitaxie van der waals a partir de graphene

Country Status (4)

Country Link
US (1) US11162188B2 (fr)
EP (1) EP3652365A1 (fr)
FR (1) FR3068994B1 (fr)
WO (1) WO2019012215A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109650354B (zh) * 2019-01-22 2022-09-20 中国科学院苏州纳米技术与纳米仿生研究所 一种二维碲化铅纳米片的制备方法、应用和一种纳米材料
CN110010729A (zh) * 2019-03-28 2019-07-12 王晓靁 RGB全彩InGaN基LED及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8652948B2 (en) * 2007-11-21 2014-02-18 Mitsubishi Chemical Corporation Nitride semiconductor, nitride semiconductor crystal growth method, and nitride semiconductor light emitting element
US20110263111A1 (en) * 2010-04-21 2011-10-27 Yuriy Melnik Group iii-nitride n-type doping
EP2815004B1 (fr) * 2012-03-21 2018-01-10 Freiberger Compound Materials GmbH Procédé de production de monocristaux de iii-n, et monocristaux de iii-n
WO2016085890A1 (fr) * 2014-11-24 2016-06-02 Innosys, Inc. Croissance de nitrure de gallium sur silicium

Also Published As

Publication number Publication date
US11162188B2 (en) 2021-11-02
WO2019012215A1 (fr) 2019-01-17
EP3652365A1 (fr) 2020-05-20
US20210115589A1 (en) 2021-04-22
FR3068994A1 (fr) 2019-01-18

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