FR2980379A1 - Structure transductrice pour sonde transductrice et procedes de fabrication de celle-ci - Google Patents
Structure transductrice pour sonde transductrice et procedes de fabrication de celle-ci Download PDFInfo
- Publication number
- FR2980379A1 FR2980379A1 FR1258773A FR1258773A FR2980379A1 FR 2980379 A1 FR2980379 A1 FR 2980379A1 FR 1258773 A FR1258773 A FR 1258773A FR 1258773 A FR1258773 A FR 1258773A FR 2980379 A1 FR2980379 A1 FR 2980379A1
- Authority
- FR
- France
- Prior art keywords
- transducer
- columns
- piezoelectric
- substrate
- piezoelectric transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000004519 manufacturing process Methods 0.000 title description 20
- 238000000034 method Methods 0.000 title description 20
- 239000000523 sample Substances 0.000 claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 239000002131 composite material Substances 0.000 claims abstract description 19
- 239000000919 ceramic Substances 0.000 claims abstract description 14
- 238000002604 ultrasonography Methods 0.000 claims abstract description 6
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 238000010276 construction Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 35
- 239000011159 matrix material Substances 0.000 description 32
- 239000000463 material Substances 0.000 description 21
- 239000002002 slurry Substances 0.000 description 8
- 238000009826 distribution Methods 0.000 description 6
- 230000001902 propagating effect Effects 0.000 description 6
- 239000000945 filler Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000002346 layers by function Substances 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000005429 filling process Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 239000012814 acoustic material Substances 0.000 description 1
- 230000005534 acoustic noise Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910002115 bismuth titanate Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- RPEUFVJJAJYJSS-UHFFFAOYSA-N zinc;oxido(dioxo)niobium Chemical compound [Zn+2].[O-][Nb](=O)=O.[O-][Nb](=O)=O RPEUFVJJAJYJSS-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
- G01N29/245—Ceramic probes, e.g. lead zirconate titanate [PZT] probes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/092—Forming composite materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Composite Materials (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/240,754 US8853918B2 (en) | 2011-09-22 | 2011-09-22 | Transducer structure for a transducer probe and methods of fabricating same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2980379A1 true FR2980379A1 (fr) | 2013-03-29 |
Family
ID=47828053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1258773A Ceased FR2980379A1 (fr) | 2011-09-22 | 2012-09-19 | Structure transductrice pour sonde transductrice et procedes de fabrication de celle-ci |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8853918B2 (OSRAM) |
| JP (1) | JP6208933B2 (OSRAM) |
| CN (1) | CN103008218B (OSRAM) |
| CA (1) | CA2790266C (OSRAM) |
| DE (1) | DE102012108796B4 (OSRAM) |
| FR (1) | FR2980379A1 (OSRAM) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9282945B2 (en) | 2009-04-14 | 2016-03-15 | Maui Imaging, Inc. | Calibration of ultrasound probes |
| US9339256B2 (en) | 2007-10-01 | 2016-05-17 | Maui Imaging, Inc. | Determining material stiffness using multiple aperture ultrasound |
| JP6092109B2 (ja) | 2010-10-13 | 2017-03-08 | マウイ イマギング，インコーポレーテッド | 凹面超音波トランスデューサ及び３ｄアレイ |
| EP2785253B1 (en) | 2011-12-01 | 2023-11-15 | Maui Imaging, Inc. | Motion detection using ping-based and multiple aperture doppler ultrasound |
| CN104080407B (zh) | 2011-12-29 | 2017-03-01 | 毛伊图像公司 | 任意路径的m模式超声成像 |
| IN2014DN07243A (OSRAM) | 2012-03-26 | 2015-04-24 | Maui Imaging Inc | |
| KR102176193B1 (ko) | 2012-08-10 | 2020-11-09 | 마우이 이미징, 인코포레이티드 | 다중 어퍼처 초음파 프로브들의 교정 |
| CN104582582B (zh) | 2012-08-21 | 2017-12-15 | 毛伊图像公司 | 超声成像系统存储器架构 |
| US20140064513A1 (en) | 2012-09-06 | 2014-03-06 | MUSIC Group IP Ltd. | System and method for remotely controlling audio equipment |
| WO2014160291A1 (en) | 2013-03-13 | 2014-10-02 | Maui Imaging, Inc. | Alignment of ultrasound transducer arrays and multiple aperture probe assembly |
| DE102013213493A1 (de) * | 2013-07-10 | 2015-01-15 | Robert Bosch Gmbh | Schallwandleranordnung |
| US9883848B2 (en) | 2013-09-13 | 2018-02-06 | Maui Imaging, Inc. | Ultrasound imaging using apparent point-source transmit transducer |
| US10401493B2 (en) | 2014-08-18 | 2019-09-03 | Maui Imaging, Inc. | Network-based ultrasound imaging system |
| CN105810258B (zh) * | 2014-12-30 | 2018-11-02 | 中核武汉核电运行技术股份有限公司 | 一种用于压水堆燃料组件超声检查的探头及其制造工艺 |
| JP6770973B2 (ja) | 2015-03-30 | 2020-10-21 | マウイ イマギング，インコーポレーテッド | 物体の動きを検出するための超音波イメージングシステム及び方法 |
| CN108778530B (zh) | 2016-01-27 | 2021-07-27 | 毛伊图像公司 | 具有稀疏阵列探测器的超声成像 |
| RU2649061C1 (ru) * | 2016-12-22 | 2018-03-29 | федеральное государственное бюджетное образовательное учреждение высшего образования "Национальный исследовательский университет "МЭИ" (ФГБОУ ВО "НИУ "МЭИ") | Широкополосный ультразвуковой преобразователь |
| KR102394585B1 (ko) * | 2017-12-19 | 2022-05-04 | 현대자동차 주식회사 | 음향센서 및 이의 제조방법 |
| KR102721452B1 (ko) * | 2019-03-29 | 2024-10-23 | 엘지디스플레이 주식회사 | 플렉서블 진동 모듈 및 이를 포함하는 표시 장치 |
| US12409474B2 (en) * | 2019-08-28 | 2025-09-09 | S.C.R. (Engineers) Limited | Devices for analysis of a fluid |
| US12414474B2 (en) * | 2021-10-21 | 2025-09-09 | Baker Hughes Oilfield Operations Llc | Methods of forming piezoelectric materials, piezoelectric devices, and associated tooling and systems |
| CN116293473B (zh) * | 2022-12-08 | 2025-08-01 | 海鹰企业集团有限责任公司 | 一种改进型管道声纳湿端处理装置 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4518889A (en) * | 1982-09-22 | 1985-05-21 | North American Philips Corporation | Piezoelectric apodized ultrasound transducers |
| US4658176A (en) * | 1984-07-25 | 1987-04-14 | Hitachi, Ltd. | Ultrasonic transducer using piezoelectric composite |
| US4828961A (en) * | 1986-07-02 | 1989-05-09 | W. R. Grace & Co.-Conn. | Imaging process for forming ceramic electronic circuits |
| DE59008863D1 (de) * | 1990-06-21 | 1995-05-11 | Siemens Ag | Verbund-Ultraschallwandler und Verfahren zur Herstellung eines strukturierten Bauelementes aus piezoelektrischer Keramik. |
| US6117612A (en) | 1995-04-24 | 2000-09-12 | Regents Of The University Of Michigan | Stereolithography resin for rapid prototyping of ceramics and metals |
| US5648942A (en) | 1995-10-13 | 1997-07-15 | Advanced Technology Laboratories, Inc. | Acoustic backing with integral conductors for an ultrasonic transducer |
| JPH11112048A (ja) * | 1997-10-02 | 1999-04-23 | Seiko Epson Corp | 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法 |
| JP4234846B2 (ja) * | 1999-05-12 | 2009-03-04 | 上田日本無線株式会社 | 複合圧電体及び角柱状圧電セラミック焼結体 |
| JP2001326999A (ja) * | 2000-05-18 | 2001-11-22 | Olympus Optical Co Ltd | 圧電構造体の加工方法および複合圧電体の製造方法 |
| WO2002027408A2 (en) * | 2000-09-27 | 2002-04-04 | The Regents Of The University Of California | Dynamic mask projection stereo micro lithography |
| US6571444B2 (en) * | 2001-03-20 | 2003-06-03 | Vermon | Method of manufacturing an ultrasonic transducer |
| US6984922B1 (en) * | 2002-07-22 | 2006-01-10 | Matsushita Electric Industrial Co., Ltd. | Composite piezoelectric transducer and method of fabricating the same |
| EP1591067A4 (en) * | 2003-01-23 | 2012-02-29 | Hitachi Medical Corp | ULTRASONIC PROBE AND ULTRASONIC DIAGNOSTIC DEVICE |
| JP2005342337A (ja) * | 2004-06-04 | 2005-12-15 | Matsushita Electric Ind Co Ltd | 超音波探触子 |
| US7449821B2 (en) | 2005-03-02 | 2008-11-11 | Research Triangle Institute | Piezoelectric micromachined ultrasonic transducer with air-backed cavities |
| WO2006100807A1 (ja) * | 2005-03-24 | 2006-09-28 | Murata Manufacturing Co., Ltd | 圧電素子、及び圧電素子の製造方法 |
| WO2006134754A1 (ja) * | 2005-06-13 | 2006-12-21 | Takayuki Saguchi | 治療用超音波発射装置 |
| US7652410B2 (en) * | 2006-08-01 | 2010-01-26 | Insightec Ltd | Ultrasound transducer with non-uniform elements |
| US20090199392A1 (en) * | 2008-02-11 | 2009-08-13 | General Electric Company | Ultrasound transducer probes and system and method of manufacture |
| US20090230823A1 (en) * | 2008-03-13 | 2009-09-17 | Leonid Kushculey | Operation of patterned ultrasonic transducers |
| US8212456B1 (en) * | 2009-08-19 | 2012-07-03 | Sandia Corporation | Method of making and ceramic articles with multiple regions of distinct density |
-
2011
- 2011-09-22 US US13/240,754 patent/US8853918B2/en active Active
-
2012
- 2012-09-13 CA CA2790266A patent/CA2790266C/en not_active Expired - Fee Related
- 2012-09-18 DE DE102012108796.2A patent/DE102012108796B4/de not_active Expired - Fee Related
- 2012-09-19 JP JP2012205150A patent/JP6208933B2/ja not_active Expired - Fee Related
- 2012-09-19 FR FR1258773A patent/FR2980379A1/fr not_active Ceased
- 2012-09-21 CN CN201210354044.5A patent/CN103008218B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP6208933B2 (ja) | 2017-10-04 |
| CA2790266C (en) | 2019-11-26 |
| CA2790266A1 (en) | 2013-03-22 |
| CN103008218B (zh) | 2016-06-29 |
| JP2013068616A (ja) | 2013-04-18 |
| CN103008218A (zh) | 2013-04-03 |
| US8853918B2 (en) | 2014-10-07 |
| DE102012108796B4 (de) | 2021-03-04 |
| US20130076207A1 (en) | 2013-03-28 |
| DE102012108796A1 (de) | 2013-03-28 |
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| PLSC | Publication of the preliminary search report |
Effective date: 20210416 |
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| RX | Complete rejection |
Effective date: 20220307 |