FR2885260B1 - Procede de fabrication d'un dispositf electronique multicouches depourvu de resistances d'interface parasites - Google Patents

Procede de fabrication d'un dispositf electronique multicouches depourvu de resistances d'interface parasites

Info

Publication number
FR2885260B1
FR2885260B1 FR0504313A FR0504313A FR2885260B1 FR 2885260 B1 FR2885260 B1 FR 2885260B1 FR 0504313 A FR0504313 A FR 0504313A FR 0504313 A FR0504313 A FR 0504313A FR 2885260 B1 FR2885260 B1 FR 2885260B1
Authority
FR
France
Prior art keywords
parasites
electronic device
multilayer electronic
manufacturing multilayer
interface resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0504313A
Other languages
English (en)
Other versions
FR2885260A1 (fr
Inventor
Brahim Tayed Mohammed
Olivier Bonnaud
Claude Simon
Nathalie Coulon
Amar Saboundji
Khalid Kandoussi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Rennes 1
Original Assignee
Universite de Rennes 1
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite de Rennes 1 filed Critical Universite de Rennes 1
Priority to FR0504313A priority Critical patent/FR2885260B1/fr
Priority to PCT/FR2006/000987 priority patent/WO2006114535A1/fr
Publication of FR2885260A1 publication Critical patent/FR2885260A1/fr
Application granted granted Critical
Publication of FR2885260B1 publication Critical patent/FR2885260B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
FR0504313A 2005-04-28 2005-04-28 Procede de fabrication d'un dispositf electronique multicouches depourvu de resistances d'interface parasites Expired - Fee Related FR2885260B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0504313A FR2885260B1 (fr) 2005-04-28 2005-04-28 Procede de fabrication d'un dispositf electronique multicouches depourvu de resistances d'interface parasites
PCT/FR2006/000987 WO2006114535A1 (fr) 2005-04-28 2006-04-28 Procédé de fabrication d'un dispositif électronique multicouches dépourvu de résistances d'interface parasites

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0504313A FR2885260B1 (fr) 2005-04-28 2005-04-28 Procede de fabrication d'un dispositf electronique multicouches depourvu de resistances d'interface parasites

Publications (2)

Publication Number Publication Date
FR2885260A1 FR2885260A1 (fr) 2006-11-03
FR2885260B1 true FR2885260B1 (fr) 2007-08-24

Family

ID=35429203

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0504313A Expired - Fee Related FR2885260B1 (fr) 2005-04-28 2005-04-28 Procede de fabrication d'un dispositf electronique multicouches depourvu de resistances d'interface parasites

Country Status (2)

Country Link
FR (1) FR2885260B1 (fr)
WO (1) WO2006114535A1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3512056A (en) * 1967-04-25 1970-05-12 Westinghouse Electric Corp Double epitaxial layer high power,high speed transistor
JPS60143627A (ja) * 1983-12-29 1985-07-29 Matsushita Electric Ind Co Ltd 光電変換膜の製造方法
JP2566914B2 (ja) * 1985-12-28 1996-12-25 キヤノン株式会社 薄膜半導体素子及びその形成法
US4868014A (en) * 1986-01-14 1989-09-19 Canon Kabushiki Kaisha Method for forming thin film multi-layer structure member
JP2560716B2 (ja) * 1987-03-25 1996-12-04 株式会社日本自動車部品総合研究所 半導体素子及びその製造方法

Also Published As

Publication number Publication date
WO2006114535A1 (fr) 2006-11-02
FR2885260A1 (fr) 2006-11-03
WO2006114535A8 (fr) 2007-01-25

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