FR2868601B1 - Tranche de semiconducteur et procede de fabrication de dispositif a semiconducteur utilisant celle-ci - Google Patents

Tranche de semiconducteur et procede de fabrication de dispositif a semiconducteur utilisant celle-ci

Info

Publication number
FR2868601B1
FR2868601B1 FR0503039A FR0503039A FR2868601B1 FR 2868601 B1 FR2868601 B1 FR 2868601B1 FR 0503039 A FR0503039 A FR 0503039A FR 0503039 A FR0503039 A FR 0503039A FR 2868601 B1 FR2868601 B1 FR 2868601B1
Authority
FR
France
Prior art keywords
same
semiconductor device
semiconductor wafer
manufacturing
manufacturing semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0503039A
Other languages
English (en)
Other versions
FR2868601A1 (fr
Inventor
Yuji Kutsuna
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2868601A1 publication Critical patent/FR2868601A1/fr
Application granted granted Critical
Publication of FR2868601B1 publication Critical patent/FR2868601B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2856—Internal circuit aspects, e.g. built-in test features; Test chips; Measuring material aspects, e.g. electro migration [EM]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
FR0503039A 2004-03-30 2005-03-29 Tranche de semiconducteur et procede de fabrication de dispositif a semiconducteur utilisant celle-ci Expired - Fee Related FR2868601B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004099876A JP2005283432A (ja) 2004-03-30 2004-03-30 半導体ウエハおよびその半導体ウエハを用いた半導体装置の製造方法

Publications (2)

Publication Number Publication Date
FR2868601A1 FR2868601A1 (fr) 2005-10-07
FR2868601B1 true FR2868601B1 (fr) 2008-06-06

Family

ID=34982663

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0503039A Expired - Fee Related FR2868601B1 (fr) 2004-03-30 2005-03-29 Tranche de semiconducteur et procede de fabrication de dispositif a semiconducteur utilisant celle-ci

Country Status (4)

Country Link
US (1) US7229858B2 (fr)
JP (1) JP2005283432A (fr)
DE (1) DE102005014156A1 (fr)
FR (1) FR2868601B1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7579689B2 (en) * 2006-01-31 2009-08-25 Mediatek Inc. Integrated circuit package, and a method for producing an integrated circuit package having two dies with input and output terminals of integrated circuits of the dies directly addressable for testing of the package
US8063480B2 (en) * 2006-02-28 2011-11-22 Canon Kabushiki Kaisha Printed board and semiconductor integrated circuit
CN102279356A (zh) * 2010-06-08 2011-12-14 旺宏电子股份有限公司 集成电路测试方法
ITMI20111418A1 (it) 2011-07-28 2013-01-29 St Microelectronics Srl Architettura di testing di circuiti integrati su un wafer
JP6179158B2 (ja) * 2013-03-27 2017-08-16 三菱電機株式会社 トランジスタの製造方法、増幅器の製造方法
JP6299117B2 (ja) 2013-08-30 2018-03-28 三菱電機株式会社 窒化物半導体デバイスの製造方法、バーンイン装置
JP6292104B2 (ja) * 2014-11-17 2018-03-14 三菱電機株式会社 窒化物半導体装置の製造方法
US10375971B1 (en) * 2018-10-17 2019-08-13 Joseph Tyminski Cutting board and storage assembly
CN115856588B (zh) * 2023-02-22 2023-08-04 长鑫存储技术有限公司 芯片测试板及测试方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5367208A (en) * 1986-09-19 1994-11-22 Actel Corporation Reconfigurable programmable interconnect architecture
US5191224A (en) * 1987-04-22 1993-03-02 Hitachi, Ltd. Wafer scale of full wafer memory system, packaging method thereof, and wafer processing method employed therein
JPH05136243A (ja) 1991-11-12 1993-06-01 Nippon Eng Kk エージング等テスト用パターンを付加した半導体ウエハー
US5442282A (en) * 1992-07-02 1995-08-15 Lsi Logic Corporation Testing and exercising individual, unsingulated dies on a wafer
US5390011A (en) * 1993-05-27 1995-02-14 Delphax Systems Compact imaging roll printer
US5619462A (en) * 1995-07-31 1997-04-08 Sgs-Thomson Microelectronics, Inc. Fault detection for entire wafer stress test
US5994912A (en) * 1995-10-31 1999-11-30 Texas Instruments Incorporated Fault tolerant selection of die on wafer
US6313658B1 (en) * 1998-05-22 2001-11-06 Micron Technology, Inc. Device and method for isolating a short-circuited integrated circuit (IC) from other IC's on a semiconductor wafer
US6590412B2 (en) * 2001-06-26 2003-07-08 Logicvision, Inc. Circuit and method for detecting transient voltages on a dc power supply rail
US6967348B2 (en) * 2002-06-20 2005-11-22 Micron Technology, Inc. Signal sharing circuit with microelectric die isolation features

Also Published As

Publication number Publication date
FR2868601A1 (fr) 2005-10-07
DE102005014156A1 (de) 2005-10-20
US20050218923A1 (en) 2005-10-06
US7229858B2 (en) 2007-06-12
JP2005283432A (ja) 2005-10-13

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Legal Events

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ST Notification of lapse

Effective date: 20111130