FR2868600A1 - Procede de preparation de puces electroniques, et ensemble de puces en resultant - Google Patents
Procede de preparation de puces electroniques, et ensemble de puces en resultantInfo
- Publication number
- FR2868600A1 FR2868600A1 FR0403558A FR0403558A FR2868600A1 FR 2868600 A1 FR2868600 A1 FR 2868600A1 FR 0403558 A FR0403558 A FR 0403558A FR 0403558 A FR0403558 A FR 0403558A FR 2868600 A1 FR2868600 A1 FR 2868600A1
- Authority
- FR
- France
- Prior art keywords
- test
- chip
- module
- preparation
- electronic chips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/3025—Wireless interface with the DUT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Landscapes
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
L'invention concerne un procédé permettant d'une part de tester, au moyen de signaux de test (St), des puces électroniques (11 à 13) réalisées sur une même plaquette (100) de matériau semi-conducteur, et d'autre part de discriminer les puces opérationnelles des puces défaillantes.Selon l'invention, chaque puce de la plaquette est dotée d'un module de réception (2) de signaux transmis sans contact, d'un module d'autotest (3) relié au module de réception (2) de cette même puce (11 à 13), et d'un révélateur optique d'état (4) commandé par le module d'autotest, de sorte que les signaux de test (St) peuvent être adressés en parallèle à toutes les puces de la plaquette, et que chaque puce ayant passé le test avec succès est directement identifiée par un changement d'état optique du révélateur d'état (4) commandée par le module d'autotest de cette puce.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0403558A FR2868600A1 (fr) | 2004-04-05 | 2004-04-05 | Procede de preparation de puces electroniques, et ensemble de puces en resultant |
PCT/FR2005/000831 WO2005101482A1 (fr) | 2004-04-05 | 2005-04-05 | Procede de preparation de puces electroniques, et ensemble de puces en resultant |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0403558A FR2868600A1 (fr) | 2004-04-05 | 2004-04-05 | Procede de preparation de puces electroniques, et ensemble de puces en resultant |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2868600A1 true FR2868600A1 (fr) | 2005-10-07 |
Family
ID=34944634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0403558A Pending FR2868600A1 (fr) | 2004-04-05 | 2004-04-05 | Procede de preparation de puces electroniques, et ensemble de puces en resultant |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2868600A1 (fr) |
WO (1) | WO2005101482A1 (fr) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6164137A (ja) * | 1984-09-05 | 1986-04-02 | Sharp Corp | 半導体装置 |
JPS63102332A (ja) * | 1986-10-20 | 1988-05-07 | Matsushita Electronics Corp | 半導体装置の検査方法 |
JPH0290549A (ja) * | 1988-09-28 | 1990-03-30 | Hitachi Ltd | 半導体装置 |
US5248936A (en) * | 1990-10-01 | 1993-09-28 | Matsushita Electric Industrial Co., Ltd. | Semiconductor integrated circuit and a method of testing the same |
WO1999032893A1 (fr) * | 1997-12-22 | 1999-07-01 | Conexant Systems, Inc. | Dispositif d'essai sans fil pour microplaquette |
US6211689B1 (en) * | 1998-01-14 | 2001-04-03 | Nec Corporation | Method for testing semiconductor device and semiconductor device with transistor circuit for marking |
-
2004
- 2004-04-05 FR FR0403558A patent/FR2868600A1/fr active Pending
-
2005
- 2005-04-05 WO PCT/FR2005/000831 patent/WO2005101482A1/fr active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6164137A (ja) * | 1984-09-05 | 1986-04-02 | Sharp Corp | 半導体装置 |
JPS63102332A (ja) * | 1986-10-20 | 1988-05-07 | Matsushita Electronics Corp | 半導体装置の検査方法 |
JPH0290549A (ja) * | 1988-09-28 | 1990-03-30 | Hitachi Ltd | 半導体装置 |
US5248936A (en) * | 1990-10-01 | 1993-09-28 | Matsushita Electric Industrial Co., Ltd. | Semiconductor integrated circuit and a method of testing the same |
WO1999032893A1 (fr) * | 1997-12-22 | 1999-07-01 | Conexant Systems, Inc. | Dispositif d'essai sans fil pour microplaquette |
US6211689B1 (en) * | 1998-01-14 | 2001-04-03 | Nec Corporation | Method for testing semiconductor device and semiconductor device with transistor circuit for marking |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 010, no. 228 (E - 426) 8 August 1986 (1986-08-08) * |
PATENT ABSTRACTS OF JAPAN vol. 012, no. 342 (E - 658) 14 September 1988 (1988-09-14) * |
PATENT ABSTRACTS OF JAPAN vol. 014, no. 282 (E - 0942) 19 June 1990 (1990-06-19) * |
Also Published As
Publication number | Publication date |
---|---|
WO2005101482A1 (fr) | 2005-10-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7855567B2 (en) | Electronic device testing system and method | |
Wagner | Failure analysis of integrated circuits: tools and techniques | |
US7702982B2 (en) | Electronic device testing system and method | |
US9651610B2 (en) | Visible laser probing for circuit debug and defect analysis | |
WO2003100446A3 (fr) | Systeme de sonde haute performance | |
TW200907380A (en) | Semiconductor device, a method of manufacturing a semiconductor device and a testing method of the same | |
TW200633102A (en) | Method and structures for testing a semiconductor wafer prior to performing a flip chip bumping process | |
EP1394560A3 (fr) | Système de test de puce semiconductrice et procédé de test correspondant | |
CN102411006A (zh) | 一种晶体材料检查装置及方法 | |
US7212939B2 (en) | Method and system for timing measurement of embedded macro module | |
RU2011127427A (ru) | Устройство | |
TW334607B (en) | Method for high speed testing a semiconductor device | |
FR2868600A1 (fr) | Procede de preparation de puces electroniques, et ensemble de puces en resultant | |
TW200709316A (en) | Substrate and testing method thereof | |
US7102372B2 (en) | Apparatus and method for testing conductive bumps | |
US8037089B2 (en) | Test system | |
Hess et al. | Device array scribe characterization vehicle test chip for ultra fast product wafer variability monitoring | |
US20030080334A1 (en) | Semiconductor device having test element and method of testing using same | |
US20090079462A1 (en) | Semiconductor device testing apparatus | |
KR101377168B1 (ko) | 이미지 소자의 검사 장치 및 이미지 소자 검사 방법 | |
Muela et al. | Novel IC Device Repackaging for SIL and Backside Analysis Capability | |
KR102649846B1 (ko) | 멀티 칩 패키지 내 칩 간 인터커넥션 결함 검사 장치 및 방법 | |
JP4744884B2 (ja) | ウエハ検査装置及びウエハ検査方法 | |
JPH0389529A (ja) | チップ内良否判定素子を搭載した半導体ウェーハ及びその検査方法 | |
Gattiker et al. | Smart Substrate MCMs |