FR2853078B1 - Capteur a semiconducteurs pour la detection d'une quantite dynamique - Google Patents

Capteur a semiconducteurs pour la detection d'une quantite dynamique

Info

Publication number
FR2853078B1
FR2853078B1 FR0402997A FR0402997A FR2853078B1 FR 2853078 B1 FR2853078 B1 FR 2853078B1 FR 0402997 A FR0402997 A FR 0402997A FR 0402997 A FR0402997 A FR 0402997A FR 2853078 B1 FR2853078 B1 FR 2853078B1
Authority
FR
France
Prior art keywords
detection
semiconductor sensor
dynamic quantity
dynamic
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0402997A
Other languages
English (en)
Other versions
FR2853078A1 (fr
Inventor
Minekazu Sakai
Takashi Katsumata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2853078A1 publication Critical patent/FR2853078A1/fr
Application granted granted Critical
Publication of FR2853078B1 publication Critical patent/FR2853078B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
FR0402997A 2003-03-27 2004-03-23 Capteur a semiconducteurs pour la detection d'une quantite dynamique Expired - Fee Related FR2853078B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003088877A JP2004294332A (ja) 2003-03-27 2003-03-27 半導体力学量センサ

Publications (2)

Publication Number Publication Date
FR2853078A1 FR2853078A1 (fr) 2004-10-01
FR2853078B1 true FR2853078B1 (fr) 2007-08-17

Family

ID=32959514

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0402997A Expired - Fee Related FR2853078B1 (fr) 2003-03-27 2004-03-23 Capteur a semiconducteurs pour la detection d'une quantite dynamique

Country Status (4)

Country Link
US (1) US7007550B2 (fr)
JP (1) JP2004294332A (fr)
DE (1) DE102004014708B4 (fr)
FR (1) FR2853078B1 (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4544107B2 (ja) * 2005-06-29 2010-09-15 株式会社デンソー センサ装置
JP2007150098A (ja) * 2005-11-29 2007-06-14 Denso Corp 半導体装置
US20090265671A1 (en) * 2008-04-21 2009-10-22 Invensense Mobile devices with motion gesture recognition
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
WO2010001613A1 (fr) * 2008-07-02 2010-01-07 富士通株式会社 Matrice de micro-miroirs et commutateur optique
DE102008040855B4 (de) * 2008-07-30 2022-05-25 Robert Bosch Gmbh Dreiachsiger Beschleunigungssensor
EP2336788B1 (fr) * 2008-09-08 2014-07-09 Hitachi, Ltd. Capteur d'inertie
JP5750867B2 (ja) 2010-11-04 2015-07-22 セイコーエプソン株式会社 機能素子、機能素子の製造方法、物理量センサーおよび電子機器
DE102012200740B4 (de) * 2011-10-27 2024-03-21 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements
CN102435777B (zh) * 2011-11-02 2012-10-31 重庆理工大学 一种硅微电容式二维集成加速度传感器
CN102435779B (zh) * 2011-11-02 2012-10-03 重庆理工大学 一种硅微电容式二维加速度传感器
JP6020392B2 (ja) 2013-09-03 2016-11-02 株式会社デンソー 加速度センサ
KR101915954B1 (ko) * 2016-06-29 2018-11-08 주식회사 신성씨앤티 멤스 기반의 3축 가속도 센서
DE102016112041A1 (de) * 2016-06-30 2018-01-04 Infineon Technologies Ag Dämpfung eines sensors
CN110308308B (zh) * 2019-06-27 2021-07-13 深迪半导体(绍兴)有限公司 一种带补偿电极的面内平动式加速度计

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5734105A (en) * 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
JPH07245413A (ja) 1994-03-07 1995-09-19 Fuji Electric Co Ltd 加速度センサ
DE19530007C2 (de) 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
DE19539049A1 (de) * 1995-10-20 1997-04-24 Bosch Gmbh Robert Verfahren zur Herstellung eines Coriolis-Drehratensensors
US5880369A (en) 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
JPH1151967A (ja) * 1997-08-08 1999-02-26 Mitsubishi Electric Corp 多軸加速度センサ及びその製造方法
JP3307328B2 (ja) 1998-05-11 2002-07-24 株式会社デンソー 半導体力学量センサ
JP2001004658A (ja) * 1999-06-25 2001-01-12 Matsushita Electric Works Ltd ２軸半導体加速度センサおよびその製造方法
JP2001227902A (ja) * 2000-02-16 2001-08-24 Mitsubishi Electric Corp 半導体装置
JP3489534B2 (ja) * 2000-04-20 2004-01-19 トヨタ自動車株式会社 センサ装置及びセンサ素子
JP3589182B2 (ja) * 2000-07-07 2004-11-17 株式会社村田製作所 外力計測装置
JP3627665B2 (ja) * 2001-04-11 2005-03-09 株式会社デンソー 角速度センサ
JP2003202226A (ja) 2002-01-07 2003-07-18 Murata Mfg Co Ltd 外力計測装置

Also Published As

Publication number Publication date
FR2853078A1 (fr) 2004-10-01
DE102004014708A1 (de) 2004-10-21
JP2004294332A (ja) 2004-10-21
US7007550B2 (en) 2006-03-07
US20040187573A1 (en) 2004-09-30
DE102004014708B4 (de) 2015-07-02

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