FR2848335B1 - Procede d'elaboration de diamant de type n a haute conductivite electrique - Google Patents
Procede d'elaboration de diamant de type n a haute conductivite electriqueInfo
- Publication number
- FR2848335B1 FR2848335B1 FR0215453A FR0215453A FR2848335B1 FR 2848335 B1 FR2848335 B1 FR 2848335B1 FR 0215453 A FR0215453 A FR 0215453A FR 0215453 A FR0215453 A FR 0215453A FR 2848335 B1 FR2848335 B1 FR 2848335B1
- Authority
- FR
- France
- Prior art keywords
- diamond
- conductivity
- preparation
- type
- type diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910003460 diamond Inorganic materials 0.000 title 2
- 239000010432 diamond Substances 0.000 title 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
- H01L21/2236—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase from or into a plasma phase
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0405—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising semiconducting carbon, e.g. diamond, diamond-like carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0405—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising semiconducting carbon, e.g. diamond, diamond-like carbon
- H01L21/041—Making n- or p-doped regions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0215453A FR2848335B1 (fr) | 2002-12-06 | 2002-12-06 | Procede d'elaboration de diamant de type n a haute conductivite electrique |
AU2003298415A AU2003298415A1 (en) | 2002-12-06 | 2003-12-04 | Method of producing an n-type diamond with high electrical conductivity |
JP2004558172A JP4823523B2 (ja) | 2002-12-06 | 2003-12-04 | 高い電気伝導率を有するn−型ダイヤモンドを製造する方法 |
PCT/FR2003/003592 WO2004053960A1 (fr) | 2002-12-06 | 2003-12-04 | Procede d'elaboration de diamant de type n a haute conductivite electrique |
EP03796163A EP1568072A1 (fr) | 2002-12-06 | 2003-12-04 | Procede d elaboration de diamant de type n a haute conductiv ite electrique |
US11/144,279 US7368317B2 (en) | 2002-12-06 | 2005-06-03 | Method of producing an N-type diamond with high electrical conductivity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0215453A FR2848335B1 (fr) | 2002-12-06 | 2002-12-06 | Procede d'elaboration de diamant de type n a haute conductivite electrique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2848335A1 FR2848335A1 (fr) | 2004-06-11 |
FR2848335B1 true FR2848335B1 (fr) | 2005-10-07 |
Family
ID=32320061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0215453A Expired - Fee Related FR2848335B1 (fr) | 2002-12-06 | 2002-12-06 | Procede d'elaboration de diamant de type n a haute conductivite electrique |
Country Status (6)
Country | Link |
---|---|
US (1) | US7368317B2 (fr) |
EP (1) | EP1568072A1 (fr) |
JP (1) | JP4823523B2 (fr) |
AU (1) | AU2003298415A1 (fr) |
FR (1) | FR2848335B1 (fr) |
WO (1) | WO2004053960A1 (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CZ301547B6 (cs) * | 2008-08-29 | 2010-04-14 | Fyzikální ústav AV CR, v.v.i. | Zpusob dopování diamantu prenosem náboje z organických barviv |
US8111724B2 (en) * | 2009-07-07 | 2012-02-07 | International Business Machines Corporation | Temperature control device for optoelectronic devices |
SG179318A1 (en) * | 2010-09-27 | 2012-04-27 | Gemesis Company S Pte Ltd | Method for growing white color diamonds by using diborane and nitrogen in combination in a microwave plasma chemical vapor deposition system |
GB201021860D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for diamond synthesis |
GB201021870D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for manufacturing synthetic diamond material |
GB201021913D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | Microwave plasma reactors and substrates for synthetic diamond manufacture |
GB201021853D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for manufacturing synthetic diamond material |
US9637838B2 (en) | 2010-12-23 | 2017-05-02 | Element Six Limited | Methods of manufacturing synthetic diamond material by microwave plasma enhanced chemical vapor deposition from a microwave generator and gas inlet(s) disposed opposite the growth surface area |
GB201021855D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | Microwave power delivery system for plasma reactors |
GB201021865D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for manufacturing synthetic diamond material |
US20130026492A1 (en) * | 2011-07-30 | 2013-01-31 | Akhan Technologies Inc. | Diamond Semiconductor System and Method |
US8933462B2 (en) | 2011-12-21 | 2015-01-13 | Akhan Semiconductor, Inc. | Method of fabricating diamond semiconductor and diamond semiconductor formed according to the method |
SG10201505413VA (en) | 2015-01-14 | 2016-08-30 | Iia Technologies Pte Ltd | Electronic device grade single crystal diamonds and method of producing the same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0543392A3 (en) * | 1991-11-21 | 1993-10-20 | Canon Kk | Diamond semiconductor device and method of producing the same |
JPH05139889A (ja) * | 1991-11-21 | 1993-06-08 | Canon Inc | ダイヤモンド結晶 |
JP3165536B2 (ja) * | 1992-11-12 | 2001-05-14 | 松下電器産業株式会社 | 半導体ダイヤモンドの形成方法及び装置 |
JP3334286B2 (ja) * | 1993-09-30 | 2002-10-15 | ソニー株式会社 | ダイアモンド半導体の製造方法 |
JP3232470B2 (ja) | 1995-07-02 | 2001-11-26 | 科学技術振興事業団 | 水素化アモルファスカーボンを用いた単結晶ダイヤモンドの合成法 |
US5653800A (en) * | 1995-08-03 | 1997-08-05 | Eneco, Inc. | Method for producing N-type semiconducting diamond |
JP3893710B2 (ja) | 1997-02-12 | 2007-03-14 | 東レ株式会社 | オイル薄膜の形成方法およびその薄膜を用いた蒸着製品の製造方法 |
JPH10247624A (ja) | 1997-03-05 | 1998-09-14 | Asahi Chem Ind Co Ltd | n型単結晶ダイヤモンドおよびその製造方法、人工ダイヤモンドの製造方法 |
JP3568394B2 (ja) * | 1998-07-07 | 2004-09-22 | 独立行政法人 科学技術振興機構 | 低抵抗n型ダイヤモンドの合成法 |
-
2002
- 2002-12-06 FR FR0215453A patent/FR2848335B1/fr not_active Expired - Fee Related
-
2003
- 2003-12-04 JP JP2004558172A patent/JP4823523B2/ja not_active Expired - Fee Related
- 2003-12-04 AU AU2003298415A patent/AU2003298415A1/en not_active Abandoned
- 2003-12-04 EP EP03796163A patent/EP1568072A1/fr not_active Withdrawn
- 2003-12-04 WO PCT/FR2003/003592 patent/WO2004053960A1/fr active Application Filing
-
2005
- 2005-06-03 US US11/144,279 patent/US7368317B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
AU2003298415A8 (en) | 2004-06-30 |
US7368317B2 (en) | 2008-05-06 |
FR2848335A1 (fr) | 2004-06-11 |
WO2004053960A1 (fr) | 2004-06-24 |
JP2006508887A (ja) | 2006-03-16 |
US20050266606A1 (en) | 2005-12-01 |
AU2003298415A1 (en) | 2004-06-30 |
JP4823523B2 (ja) | 2011-11-24 |
EP1568072A1 (fr) | 2005-08-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TQ | Partial transmission of property | ||
ST | Notification of lapse |
Effective date: 20140829 |