FR2846785B1 - Nacelle de manutention de tranches de materiau semiconducteur - Google Patents

Nacelle de manutention de tranches de materiau semiconducteur

Info

Publication number
FR2846785B1
FR2846785B1 FR0213738A FR0213738A FR2846785B1 FR 2846785 B1 FR2846785 B1 FR 2846785B1 FR 0213738 A FR0213738 A FR 0213738A FR 0213738 A FR0213738 A FR 0213738A FR 2846785 B1 FR2846785 B1 FR 2846785B1
Authority
FR
France
Prior art keywords
nacelle
semi
wafer handling
conductor wafer
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0213738A
Other languages
English (en)
Other versions
FR2846785A1 (fr
Inventor
Thuan Daniel Truong
Michel Poulenard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR0213738A priority Critical patent/FR2846785B1/fr
Publication of FR2846785A1 publication Critical patent/FR2846785A1/fr
Application granted granted Critical
Publication of FR2846785B1 publication Critical patent/FR2846785B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR0213738A 2002-11-04 2002-11-04 Nacelle de manutention de tranches de materiau semiconducteur Expired - Fee Related FR2846785B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0213738A FR2846785B1 (fr) 2002-11-04 2002-11-04 Nacelle de manutention de tranches de materiau semiconducteur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0213738A FR2846785B1 (fr) 2002-11-04 2002-11-04 Nacelle de manutention de tranches de materiau semiconducteur

Publications (2)

Publication Number Publication Date
FR2846785A1 FR2846785A1 (fr) 2004-05-07
FR2846785B1 true FR2846785B1 (fr) 2005-02-04

Family

ID=32104394

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0213738A Expired - Fee Related FR2846785B1 (fr) 2002-11-04 2002-11-04 Nacelle de manutention de tranches de materiau semiconducteur

Country Status (1)

Country Link
FR (1) FR2846785B1 (fr)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068775A (fr) * 1973-10-19 1975-06-09
DE2422527A1 (de) * 1974-05-09 1975-11-20 Semikron Gleichrichterbau Vorrichtung zum gleichzeitigen, beiderseitigen beschichten mehrerer halbleiterscheiben mit einem schutzlack
US4256229A (en) * 1979-09-17 1981-03-17 Rockwell International Corporation Boat for wafer processing
US4287851A (en) * 1980-01-16 1981-09-08 Dozier Alfred R Mounting and excitation system for reaction in the plasma state
JPS60136309A (ja) * 1983-12-26 1985-07-19 Hitachi Ltd 収容治具
US4653636A (en) * 1985-05-14 1987-03-31 Microglass, Inc. Wafer carrier and method
US4723799A (en) * 1985-09-13 1988-02-09 Wollmann Engineering, Inc. Wafer carrier transport system interface
US4993559A (en) * 1989-07-31 1991-02-19 Motorola, Inc. Wafer carrier
JP3280438B2 (ja) * 1992-11-30 2002-05-13 東芝セラミックス株式会社 縦型ボート
US6041938A (en) * 1996-08-29 2000-03-28 Scp Global Technologies Compliant process cassette
TW320342U (en) * 1997-06-20 1997-11-11 Winbond Electronics Corp Reinforced type quartz wafer
US6039187A (en) * 1998-08-17 2000-03-21 Micron Technology, Inc. Off center three point carrier for wet processing semiconductor substrates

Also Published As

Publication number Publication date
FR2846785A1 (fr) 2004-05-07

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20100730