FR2837922B1 - Structure de capteur a compensation de sensibilite, dependante de la temperature - Google Patents

Structure de capteur a compensation de sensibilite, dependante de la temperature

Info

Publication number
FR2837922B1
FR2837922B1 FR0303617A FR0303617A FR2837922B1 FR 2837922 B1 FR2837922 B1 FR 2837922B1 FR 0303617 A FR0303617 A FR 0303617A FR 0303617 A FR0303617 A FR 0303617A FR 2837922 B1 FR2837922 B1 FR 2837922B1
Authority
FR
France
Prior art keywords
dependent
temperature
sensor structure
sensitivity compensation
compensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0303617A
Other languages
English (en)
Other versions
FR2837922A1 (fr
Inventor
Takanori Makino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2837922A1 publication Critical patent/FR2837922A1/fr
Application granted granted Critical
Publication of FR2837922B1 publication Critical patent/FR2837922B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
    • G01D3/0365—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves the undesired influence being measured using a separate sensor, which produces an influence related signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR0303617A 2002-03-29 2003-03-25 Structure de capteur a compensation de sensibilite, dependante de la temperature Expired - Fee Related FR2837922B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002095521A JP2003294559A (ja) 2002-03-29 2002-03-29 センサ回路

Publications (2)

Publication Number Publication Date
FR2837922A1 FR2837922A1 (fr) 2003-10-03
FR2837922B1 true FR2837922B1 (fr) 2005-11-04

Family

ID=28035866

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0303617A Expired - Fee Related FR2837922B1 (fr) 2002-03-29 2003-03-25 Structure de capteur a compensation de sensibilite, dependante de la temperature

Country Status (4)

Country Link
US (1) US6810745B2 (fr)
JP (1) JP2003294559A (fr)
DE (1) DE10313348A1 (fr)
FR (1) FR2837922B1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2003133241A (ru) * 2003-11-17 2005-04-20 Александр Владимирович Лопатин (RU) Устройство определения значения изменяющейся во времени измеряемой величины
JP4863818B2 (ja) * 2006-08-29 2012-01-25 セイコーインスツル株式会社 温度センサ回路
US7918137B2 (en) * 2009-02-06 2011-04-05 Kulite Semiconductor Products, Inc. Method for temperature compensation of a piezoresistive gaged metal diaphragm
IT1404585B1 (it) * 2010-11-11 2013-11-22 St Microelectronics Srl Trasduttore temperatura-corrente
JP5900536B2 (ja) 2013-09-30 2016-04-06 株式会社デンソー センサ信号検出装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3967188A (en) * 1973-05-24 1976-06-29 Bell & Howell Company Temperature compensation circuit for sensor of physical variables such as temperature and pressure
JPS5744830A (en) * 1980-09-01 1982-03-13 Hitachi Ltd Pressure detecting device
US4355537A (en) * 1980-11-06 1982-10-26 Combustion Engineering, Inc. Temperature compensation for transducer components
JPS5931404A (ja) * 1982-08-16 1984-02-20 Hitachi Ltd 圧力センサ回路
JPH0691265B2 (ja) 1986-08-01 1994-11-14 株式会社日立製作所 半導体圧力センサ
JPH01110343A (ja) 1987-10-23 1989-04-27 Hitachi Denshi Ltd Ｔｖ内視鏡における画像のセンタリング補正装置
JPH032640A (ja) * 1989-05-31 1991-01-09 Copal Electron Co Ltd 半導体圧力センサーの温度補償回路
US5197334A (en) * 1991-06-04 1993-03-30 Schlumberger Industries, Inc. Programmable compensation of bridge circuit thermal response
US5253532A (en) * 1992-03-09 1993-10-19 Timex Corporation Temperature compensated pressure transducer with digital output for low voltage power supply

Also Published As

Publication number Publication date
US6810745B2 (en) 2004-11-02
DE10313348A1 (de) 2003-11-13
JP2003294559A (ja) 2003-10-15
US20030184327A1 (en) 2003-10-02
FR2837922A1 (fr) 2003-10-03

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Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 13

ST Notification of lapse

Effective date: 20161130