FR2824902B1 - Procede et agencement pour la determination sans contact de caracteristiques de produits - Google Patents
Procede et agencement pour la determination sans contact de caracteristiques de produitsInfo
- Publication number
- FR2824902B1 FR2824902B1 FR0205910A FR0205910A FR2824902B1 FR 2824902 B1 FR2824902 B1 FR 2824902B1 FR 0205910 A FR0205910 A FR 0205910A FR 0205910 A FR0205910 A FR 0205910A FR 2824902 B1 FR2824902 B1 FR 2824902B1
- Authority
- FR
- France
- Prior art keywords
- arrangement
- product characteristics
- contact determination
- determination
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
- G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
- G01N2021/3568—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor applied to semiconductors, e.g. Silicon
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10123470A DE10123470B4 (de) | 2001-05-15 | 2001-05-15 | Verfahren und Anordnung zur berührungslosen Ermittlung von Produkteigenschaften |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2824902A1 FR2824902A1 (fr) | 2002-11-22 |
FR2824902B1 true FR2824902B1 (fr) | 2004-02-13 |
Family
ID=7684770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0205910A Expired - Fee Related FR2824902B1 (fr) | 2001-05-15 | 2002-05-14 | Procede et agencement pour la determination sans contact de caracteristiques de produits |
Country Status (4)
Country | Link |
---|---|
US (1) | US7012698B2 (fr) |
DE (1) | DE10123470B4 (fr) |
FR (1) | FR2824902B1 (fr) |
GB (1) | GB2380258B (fr) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6674533B2 (en) * | 2000-12-21 | 2004-01-06 | Joseph K. Price | Anodizing system with a coating thickness monitor and an anodized product |
US7274463B2 (en) * | 2003-12-30 | 2007-09-25 | Sensory Analytics | Anodizing system with a coating thickness monitor and an anodized product |
US7391557B1 (en) * | 2003-03-28 | 2008-06-24 | Applied Photonics Worldwide, Inc. | Mobile terawatt femtosecond laser system (MTFLS) for long range spectral sensing and identification of bioaerosols and chemical agents in the atmosphere |
US7271921B2 (en) * | 2003-07-23 | 2007-09-18 | Kla-Tencor Technologies Corporation | Method and apparatus for determining surface layer thickness using continuous multi-wavelength surface scanning |
JP2006214935A (ja) * | 2005-02-04 | 2006-08-17 | Omron Corp | 薄膜検査装置および薄膜検査方法 |
WO2006122276A1 (fr) * | 2005-05-11 | 2006-11-16 | University Of North Texas | Instrument, systeme et procede pour mesures atmospheriques automatisees peu onereuses |
JP2007027478A (ja) * | 2005-07-19 | 2007-02-01 | Sharp Corp | エッチング方法およびエッチング装置 |
DE102005050432A1 (de) * | 2005-10-21 | 2007-05-03 | Rap.Id Particle Systems Gmbh | Vorrichtung und Verfahren zur Charakterisierung von Gleitmittel und Hydrophobierungsfilmen in pharmazeutischen Behältnissen bezüglich Dicke und Homogenität |
EP2128603A1 (fr) * | 2008-05-29 | 2009-12-02 | Applied Materials, Inc. | Procédé pour déterminer une propriété optique d'une couche optique |
WO2009143921A1 (fr) * | 2008-05-29 | 2009-12-03 | Applied Materials, Inc | Procédé permettant de déterminer une propriété optique d'une couche optique |
US20090296100A1 (en) * | 2008-05-29 | 2009-12-03 | Applied Materials, Inc. | Method for determining an optical property of an optical layer |
US20100006785A1 (en) * | 2008-07-14 | 2010-01-14 | Moshe Finarov | Method and apparatus for thin film quality control |
JP5712787B2 (ja) * | 2011-05-18 | 2015-05-07 | 日立化成株式会社 | 調光フィルムの硬化率の測定方法、調光フィルムの製造方法、及び調光フィルム |
DE102012010794A1 (de) * | 2011-09-02 | 2013-03-07 | Leybold Optics Gmbh | Testglaswechseln |
US8829518B2 (en) | 2011-09-13 | 2014-09-09 | International Business Machines Corporation | Test structure and calibration method |
US8830464B2 (en) * | 2012-11-06 | 2014-09-09 | Kla-Tencor Corporation | Film thickness, refractive index, and extinction coefficient determination for film curve creation and defect sizing in real time |
US20160320310A1 (en) * | 2013-12-26 | 2016-11-03 | Posco | Apparatus for simultaneously measuring whiteness and coating amount |
DE102014223745A1 (de) * | 2014-11-20 | 2016-05-25 | Bundesdruckerei Gmbh | Verfahren und Vorrichtung zur Erfassung von abgestrahltem Licht sowie Verfahren zur Herstellung |
CN106841098B (zh) * | 2016-07-29 | 2019-08-06 | 重庆医科大学 | 一种判别顺式与反式几何异构体的近红外光谱分析方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60122333A (ja) * | 1983-12-07 | 1985-06-29 | Univ Tohoku | 偏光解析装置 |
JPH01230241A (ja) * | 1988-03-10 | 1989-09-13 | Oki Electric Ind Co Ltd | 埋込拡散層の不良検出方法 |
FR2640040B1 (fr) * | 1988-12-05 | 1994-10-28 | Micro Controle | Procede et dispositif de mesure optique |
DE69021813T2 (de) * | 1989-09-25 | 1996-05-23 | Jasco Corp | Apparat und Verfahren für die Ausmessung von dünnen mehrschichtigen Lagen. |
WO1992015924A1 (fr) * | 1991-03-04 | 1992-09-17 | Site Services, Inc. | Procedes de photolithographie et d'analyse de developpement |
JPH05302816A (ja) * | 1992-04-28 | 1993-11-16 | Jasco Corp | 半導体膜厚測定装置 |
US5365340A (en) * | 1992-12-10 | 1994-11-15 | Hughes Aircraft Company | Apparatus and method for measuring the thickness of thin films |
JP2840181B2 (ja) * | 1993-08-20 | 1998-12-24 | 大日本スクリーン製造株式会社 | 多層膜試料の膜厚測定方法 |
US5555472A (en) * | 1993-12-22 | 1996-09-10 | Integrated Process Equipment Corp. | Method and apparatus for measuring film thickness in multilayer thin film stack by comparison to a reference library of theoretical signatures |
US5604581A (en) * | 1994-10-07 | 1997-02-18 | On-Line Technologies, Inc. | Film thickness and free carrier concentration analysis method and apparatus |
GB2301884A (en) * | 1995-06-06 | 1996-12-18 | Holtronic Technologies Ltd | Characterising multilayer thin film systems by interferometry |
FR2748562B1 (fr) * | 1996-05-10 | 1998-07-03 | Sofie Instr | Procede et dispositif a deux cameras d'observation pour des mesures tridimensionnelles d'une structure complexe |
GB2335310B (en) * | 1998-03-11 | 2001-09-19 | Draftex Ind Ltd | Force-responsive detectors and systems |
US5889592A (en) * | 1998-03-18 | 1999-03-30 | Zawaideh; Emad | Nondestructive optical techniques for simultaneously measuring optical constants and thicknesses of single and multilayer films |
US6034772A (en) * | 1998-10-29 | 2000-03-07 | Eastman Kodak Company | Method for processing interferometric measurement data |
WO2000071971A1 (fr) * | 1999-05-24 | 2000-11-30 | Luxtron Corporation | Techniques optiques de mesure d'epaisseurs de couche |
US6570662B1 (en) * | 1999-05-24 | 2003-05-27 | Luxtron Corporation | Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers |
GB2355310A (en) * | 1999-09-28 | 2001-04-18 | Ocular Sciences Ltd | White light interferometer |
-
2001
- 2001-05-15 DE DE10123470A patent/DE10123470B4/de not_active Expired - Fee Related
-
2002
- 2002-05-13 GB GB0210854A patent/GB2380258B/en not_active Expired - Fee Related
- 2002-05-14 FR FR0205910A patent/FR2824902B1/fr not_active Expired - Fee Related
- 2002-05-14 US US10/146,452 patent/US7012698B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2380258A (en) | 2003-04-02 |
DE10123470B4 (de) | 2010-08-19 |
FR2824902A1 (fr) | 2002-11-22 |
DE10123470A1 (de) | 2002-11-21 |
GB0210854D0 (en) | 2002-06-19 |
US20020191192A1 (en) | 2002-12-19 |
GB2380258B (en) | 2005-11-09 |
US7012698B2 (en) | 2006-03-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20140131 |