FR2815121B1 - Procede de revelation de defauts cristallins et/ou de champs de contraintes a l'interface d'adhesion moleculaire de deux materiaux solides - Google Patents

Procede de revelation de defauts cristallins et/ou de champs de contraintes a l'interface d'adhesion moleculaire de deux materiaux solides

Info

Publication number
FR2815121B1
FR2815121B1 FR0012796A FR0012796A FR2815121B1 FR 2815121 B1 FR2815121 B1 FR 2815121B1 FR 0012796 A FR0012796 A FR 0012796A FR 0012796 A FR0012796 A FR 0012796A FR 2815121 B1 FR2815121 B1 FR 2815121B1
Authority
FR
France
Prior art keywords
crystalline
stress fields
securing
revelation
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0012796A
Other languages
English (en)
French (fr)
Other versions
FR2815121A1 (fr
Inventor
Franck Fournel
Hubert Moriceau
Noel Magnea
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0012796A priority Critical patent/FR2815121B1/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to AT01974440T priority patent/ATE451716T1/de
Priority to EP01974440A priority patent/EP1332517B1/fr
Priority to PCT/FR2001/003074 priority patent/WO2002029876A1/fr
Priority to US10/398,630 priority patent/US7041227B2/en
Priority to DE60140760T priority patent/DE60140760D1/de
Priority to JP2002533358A priority patent/JP2004511102A/ja
Publication of FR2815121A1 publication Critical patent/FR2815121A1/fr
Application granted granted Critical
Publication of FR2815121B1 publication Critical patent/FR2815121B1/fr
Priority to JP2007302263A priority patent/JP4954853B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P10/00—Bonding of wafers, substrates or parts of devices
    • H10P10/12—Bonding of semiconductor wafers or semiconductor substrates to semiconductor wafers or semiconductor substrates
    • H10P10/128—Bonding of semiconductor wafers or semiconductor substrates to semiconductor wafers or semiconductor substrates by direct semiconductor to semiconductor bonding

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Recrystallisation Techniques (AREA)
  • Micromachines (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Surface Treatment Of Glass (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Current Or Voltage (AREA)
FR0012796A 2000-10-06 2000-10-06 Procede de revelation de defauts cristallins et/ou de champs de contraintes a l'interface d'adhesion moleculaire de deux materiaux solides Expired - Fee Related FR2815121B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0012796A FR2815121B1 (fr) 2000-10-06 2000-10-06 Procede de revelation de defauts cristallins et/ou de champs de contraintes a l'interface d'adhesion moleculaire de deux materiaux solides
EP01974440A EP1332517B1 (fr) 2000-10-06 2001-10-05 Procede de revelation de defauts cristallins et/ou de champs de contraintes a l'interface d'adhesion moleculaire de deux materiaux solides
PCT/FR2001/003074 WO2002029876A1 (fr) 2000-10-06 2001-10-05 Procede de revelation de defauts cristallins et/ou de champs de contraintes a l'interface d'adhesion moleculaire de deux materiaux solides
US10/398,630 US7041227B2 (en) 2000-10-06 2001-10-05 Method for revealing crystalline defects and/or stress field defects at the molecular adhesion interface of two solid materials
AT01974440T ATE451716T1 (de) 2000-10-06 2001-10-05 Verfahren zum aufzeigen von kristallfehlern und/oder spannungsfeldern in der kontaktfläche von zwei verbundenen materialen
DE60140760T DE60140760D1 (de) 2000-10-06 2001-10-05 Verfahren zum aufzeigen von kristallfehlern und/oder spannungsfeldern in der kontaktfläche von zwei verbundenen materialen
JP2002533358A JP2004511102A (ja) 2000-10-06 2001-10-05 ２つの固体材料の分子接着界面における結晶欠陥および／または応力場の顕在化プロセス
JP2007302263A JP4954853B2 (ja) 2000-10-06 2007-11-21 ２つの固体材料の分子接着界面における結晶欠陥および／または応力場の顕在化プロセス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0012796A FR2815121B1 (fr) 2000-10-06 2000-10-06 Procede de revelation de defauts cristallins et/ou de champs de contraintes a l'interface d'adhesion moleculaire de deux materiaux solides

Publications (2)

Publication Number Publication Date
FR2815121A1 FR2815121A1 (fr) 2002-04-12
FR2815121B1 true FR2815121B1 (fr) 2002-12-13

Family

ID=8855073

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0012796A Expired - Fee Related FR2815121B1 (fr) 2000-10-06 2000-10-06 Procede de revelation de defauts cristallins et/ou de champs de contraintes a l'interface d'adhesion moleculaire de deux materiaux solides

Country Status (7)

Country Link
US (1) US7041227B2 (https=)
EP (1) EP1332517B1 (https=)
JP (2) JP2004511102A (https=)
AT (1) ATE451716T1 (https=)
DE (1) DE60140760D1 (https=)
FR (1) FR2815121B1 (https=)
WO (1) WO2002029876A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004281878A (ja) * 2003-03-18 2004-10-07 Seiko Epson Corp 半導体基板の製造方法及びこれにより製造される半導体基板、電気光学装置並びに電子機器
JP2005279843A (ja) * 2004-03-29 2005-10-13 Univ Of Tokyo 細線を含む結晶材料とその製造方法、およびこれを用いたナノ細線デバイス
US7495266B2 (en) * 2004-06-16 2009-02-24 Massachusetts Institute Of Technology Strained silicon-on-silicon by wafer bonding and layer transfer
FR2876498B1 (fr) * 2004-10-12 2008-03-14 Commissariat Energie Atomique Procede de realisation d'heterostructures resonnantes a transport planaire
FR2877662B1 (fr) 2004-11-09 2007-03-02 Commissariat Energie Atomique Reseau de particules et procede de realisation d'un tel reseau.
WO2007053686A2 (en) * 2005-11-01 2007-05-10 Massachusetts Institute Of Technology Monolithically integrated semiconductor materials and devices
US20070252223A1 (en) * 2005-12-05 2007-11-01 Massachusetts Institute Of Technology Insulated gate devices and method of making same
FR2895391B1 (fr) * 2005-12-27 2008-01-25 Commissariat Energie Atomique Procede d'elaboration de nanostructures ordonnees
FR2895419B1 (fr) 2005-12-27 2008-02-22 Commissariat Energie Atomique Procede de realisation simplifiee d'une structure epitaxiee
FR2896493B1 (fr) * 2006-01-23 2008-02-22 Commissariat Energie Atomique Procede d'elaboration d'un support pour la croissance de nanostructures allongees localisees
US8063397B2 (en) * 2006-06-28 2011-11-22 Massachusetts Institute Of Technology Semiconductor light-emitting structure and graded-composition substrate providing yellow-green light emission
FR2903810B1 (fr) * 2006-07-13 2008-10-10 Commissariat Energie Atomique Procede de nanostructuration de la surface d'un substrat
JP2009063202A (ja) * 2007-09-05 2009-03-26 Daikin Ind Ltd 放熱器およびそれを備えた冷凍装置
FR2925748B1 (fr) 2007-12-21 2010-01-29 Commissariat Energie Atomique Support de stockage de donnees et procede associe

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2766620B1 (fr) * 1997-07-22 2000-12-01 Commissariat Energie Atomique Realisation de microstructures ou de nanostructures sur un support
FR2767604B1 (fr) * 1997-08-19 2000-12-01 Commissariat Energie Atomique Procede de traitement pour le collage moleculaire et le decollage de deux structures
US5981400A (en) * 1997-09-18 1999-11-09 Cornell Research Foundation, Inc. Compliant universal substrate for epitaxial growth
JP3031904B2 (ja) * 1998-02-18 2000-04-10 キヤノン株式会社 複合部材とその分離方法、及びそれを利用した半導体基体の製造方法
FR2784800B1 (fr) * 1998-10-20 2000-12-01 Commissariat Energie Atomique Procede de realisation de composants passifs et actifs sur un meme substrat isolant
US6329070B1 (en) * 1999-12-09 2001-12-11 Cornell Research Foundation, Inc. Fabrication of periodic surface structures with nanometer-scale spacings

Also Published As

Publication number Publication date
FR2815121A1 (fr) 2002-04-12
JP2004511102A (ja) 2004-04-08
EP1332517A1 (fr) 2003-08-06
JP2008124480A (ja) 2008-05-29
JP4954853B2 (ja) 2012-06-20
ATE451716T1 (de) 2009-12-15
US7041227B2 (en) 2006-05-09
DE60140760D1 (de) 2010-01-21
EP1332517B1 (fr) 2009-12-09
US20040074866A1 (en) 2004-04-22
WO2002029876A1 (fr) 2002-04-11

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Effective date: 20120629